公开(公告)号：US06507421B1

公开(公告)日：2003-01-14

申请号：US09414621

申请日：1999-10-08

申请人： David John Bishop ,  Randy Clinton Giles ,  David Thomas Neilson

发明人： David John Bishop ,  Randy Clinton Giles ,  David Thomas Neilson

IPC分类号： H04J1400

CPC分类号： H04Q11/0005 ,  H04Q2011/0026 ,  H04Q2011/0043 ,  H04Q2011/0083

摘要： An optical crossconnect (OXC) fabric including an array of tiltable mirrors, a reflector and a plurality of optical fibers controls the position of the mirrors to optimize the transfer of a signal between an input optical fiber and an output optical fiber by monitoring the optical signal at an optical translation unit in each of the input optical fiber and the output optical fiber. The optical translation units are operable for regenerating the optical signals transmitted through the fibers.

摘要翻译： 包括可倾斜反射镜阵列，反射器和多个光纤的光学交叉连接（OXC）结构控制反射镜的位置，以通过监视光信号来优化输入光纤和输出光纤之间的信号传输 在每个输入光纤和输出光纤中的光学平移单元处。 光学平移单元可操作用于再生通过光纤传输的光信号。

公开(公告)号：US06798992B1

公开(公告)日：2004-09-28

申请号：US09518070

申请日：2000-03-02

申请人： David John Bishop ,  Randy Clinton Giles

发明人： David John Bishop ,  Randy Clinton Giles

IPC分类号： H04J1400

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3582

摘要： A device and method for detecting rotational drift of mirror elements in a MEMS tilt mirror array used in an optical crossconnect. The optical crossconnect directs optical signals from an input fiber to an output fiber along an optical path by rotatably positioning mirror elements in desired positions. A monitoring device disposed outside of the optical path is used to obtain images of the MEMS array or to transmit and receive a test signal through the crossconnect for detecting the presence of mirror element drift.

摘要翻译： 一种用于检测在光学交叉连接中使用的MEMS倾斜反射镜阵列中的镜元件的旋转漂移的装置和方法。 光学交叉连接器通过将镜子元件可旋转地定位在期望的位置，将光信号从输入光纤引导到输出光纤。 设置在光路外部的监视装置用于获得MEMS阵列的图像，或者通过交叉连接器发送和接收测试信号，以检测镜元件漂移的存在。

公开(公告)号：US06441360B1

公开(公告)日：2002-08-27

申请号：US09515412

申请日：2000-02-29

申请人： David John Bishop ,  Randy Clinton Giles

发明人： David John Bishop ,  Randy Clinton Giles

IPC分类号： H01J314

CPC分类号： G02B6/3566 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3598 ,  G02B26/02 ,  G02B26/0841

摘要： An opto-isolator incorporating a MEMS device includes an optical signal source and an optical signal detector defining therebeween an optical path for communication of optical signals. A MEMS device having an actuator for controlling a moveable element is disposed between the source and detector for manipulating the optical signals. In one embodiment, the moveable element is a shutter which is operable to selectively allow optical signals to be received by the detector and prevent signals from being detected. In another embodiment, the moveable member is a MEMS tilt mirror for selectively directing optical signals to the detector.

摘要翻译： 结合MEMS器件的光隔离器包括光信号源和光信号检测器，其中定义用于光信号通信的光路。 具有用于控制可移动元件的致动器的MEMS装置设置在源和检测器之间，用于操纵光信号。 在一个实施例中，可移动元件是快门，其可操作以选择性地允许光信号被检测器接收并防止检测信号。 在另一个实施例中，可移动构件是用于将光信号选择性地引导到检测器的MEMS倾斜镜。

公开(公告)号：US06288821B1

公开(公告)日：2001-09-11

申请号：US09410586

申请日：1999-10-01

申请人： Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  John VanAtta Gates, II ,  Randy Clinton Giles ,  Ronald Edward Scotti

发明人： Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  John VanAtta Gates, II ,  Randy Clinton Giles ,  Ronald Edward Scotti

IPC分类号： G02F103

CPC分类号： G02B26/0816 ,  G02B6/3512 ,  G02B6/3556 ,  H01L2224/48091 ,  H01L2224/48227 ,  Y10S359/904 ,  H01L2924/00014

摘要： An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.

摘要翻译： 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片，以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线，至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。

公开(公告)号：US06356377B1

公开(公告)日：2002-03-12

申请号：US09515999

申请日：2000-02-29

申请人： David John Bishop ,  Randy Clinton Giles

发明人： David John Bishop ,  Randy Clinton Giles

IPC分类号： G02B2600

CPC分类号： G02B6/2861

摘要： A variable optical delay line using MEMS devices. A reflector on a micro machine linear rack is positioned and spaced from an input source and/or an output to receive and reflect input light waves toward the output. The distance between the reflector and the input and output is variable and thereby enables selective path delay compensation of the input light wave signals. Other disclosed embodiments utilize pivoting MEMS mirrors and selective adjustment of the mirror pivot angles to provide the selective path delay compensation required in a light wave system.

摘要翻译： 使用MEMS器件的可变光延迟线。 微机器线性架上的反射器与输入源和/或输出端定位并隔开，以将输入光波接收并反射到输出端。 反射器与输入和输出之间的距离是可变的，从而使输入光波信号的选择性路径延迟补偿成为可能。 其他公开的实施例利用旋转的MEMS镜子和镜子枢转角度的选择性调整，以提供在光波系统中所需的选择性路径延迟补偿。

公开(公告)号：US06690885B1

公开(公告)日：2004-02-10

申请号：US09512174

申请日：2000-02-24

申请人： Vladmir Anatolyevich Aksyuk ,  David John Bishop ,  Randy Clinton Giles

发明人： Vladmir Anatolyevich Aksyuk ,  David John Bishop ,  Randy Clinton Giles

IPC分类号： H04J1400

CPC分类号： G02B6/3518 ,  G02B6/32 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B26/0833

摘要： An optical crossconnect constructed of micro -electromechanical systems (MEMS) tilt mirror arrays for selectively routing optical signals to optic fibers. The crossconnect includes a lens array for directing optical signals from a fiber array to the MEMS mirror array. Individual mirror elements in the mirror array reflect the optic signals to additional optic elements such as a planar mirror, a transmissive/reflective optical element or a second MEMS mirror array for routing the optical signals to output optic fibers.

摘要翻译： 由微机电系统（MEMS）倾斜镜阵列构成的光学交叉连接器，用于选择性地将光信号路由到光纤。 交叉连接包括用于将光信号从光纤阵列引导到MEMS反射镜阵列的透镜阵列。 反射镜阵列中的单个镜像元件将光学信号反射到附加光学元件，例如平面镜，透射/反射光学元件或用于将光信号路由到输出光纤的第二MEMS镜阵列。

公开(公告)号：US06300619B1

公开(公告)日：2001-10-09

申请号：US09415178

申请日：1999-10-08

申请人： Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  Randy Clinton Giles ,  Flavio Pardo

发明人： Vladimir Anatolyevich Aksyuk ,  David John Bishop ,  Cristian A. Bolle ,  Randy Clinton Giles ,  Flavio Pardo

IPC分类号： G02B2600

CPC分类号： B81B7/0003 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0866

摘要： A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.

摘要翻译： 一种微机电（MEM）光学装置，其具有减小的占地面积，以增加基板上的产量。 MEM装置包括具有外边缘并由设置在基板上的支撑结构支撑的光学元件。 支撑结构通过第一和第二对梁将其机械地连接到基板，所述梁将结构移动到用于将光学装置升高到基板上方的活动位置。 当处于升高位置时，可以选择性地倾斜光学装置以偏转光信号。 梁在一端连接到支撑结构，另一端连接到基板，并且被布置成使得第一和第二梁端部位于光学装置外边缘附近。 在优选实施例中，在光学装置的外边缘上包括一个减小降低力的元件，用于减小光学元件边缘和基板之间的接触面积。

公开(公告)号：US07220388B2

公开(公告)日：2007-05-22

申请号：US10786199

申请日：2004-02-25

申请人： David John Bishop ,  John VanAtta Gates ,  Marc Scott Hodes ,  Avinoam Kornblit ,  Stanley Pau ,  Brijesh Vyas

发明人： David John Bishop ,  John VanAtta Gates ,  Marc Scott Hodes ,  Avinoam Kornblit ,  Stanley Pau ,  Brijesh Vyas

IPC分类号： B01L3/02 ,  B01L11/00 ,  B32B5/02 ,  B32B27/04 ,  B32B27/12 ,  G01N1/22 ,  G01N1/18 ,  G01N1/10 ,  B01D63/00

CPC分类号： B01D61/364 ,  B01D1/00 ,  B01D63/087 ,  B01D63/088 ,  G01N2001/4027 ,  Y10T436/255 ,  Y10T436/2575 ,  Y10T436/25875

摘要： Apparatus and method for increasing the concentration of a chemical substance in a fluid comprise a micro-fluidic elongated channel formed in a substrate, with the channel being in fluid-flow communication with an ambient region along its elongated dimension. In general, the fluid includes first and second chemical substances having different vapor pressures. The apparatus includes an evaporation controller for increasing the evaporation rate of the fluid from the channel into the ambient region, thereby increasing the concentration of the higher vapor pressure (HVP) substance in the portion of the fluid remaining in the channel and increasing the concentration of the lower vapor pressure (LVP) substance in the portion of the fluid evaporated into the ambient region.

摘要翻译： 用于增加流体中化学物质浓度的装置和方法包括形成在基底中的微流体细长通道，其中通道沿其细长尺寸与环境区域流体流动连通。 通常，流体包括具有不同蒸气压的第一和第二化学物质。 该装置包括用于增加流体从通道进入环境区域的蒸发速率的蒸发控制器，从而增加通道中保留的流体部分中较高蒸气压（HVP）物质的浓度， 流体部分中的较低蒸汽压（LVP）物质蒸发到环境区域。

公开(公告)号：US06400009B1

公开(公告)日：2002-06-04

申请号：US09419488

申请日：1999-10-15

申请人： David John Bishop ,  John VanAtta Gates, II ,  Jungsang Kim

发明人： David John Bishop ,  John VanAtta Gates, II ,  Jungsang Kim

IPC分类号： H01L2312

CPC分类号： B81B7/0041 ,  B81C2203/019 ,  H01L23/04 ,  H01L23/057 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

摘要： A package for hermetically sealing a micro-electromechanical systems (MEMS) device in a hybrid circuit comprise a firewall formed on a substrate for the MEMS device and which has a height defining a cavity of the package in which the MEMS device will be sealed. A second substrate spaced from the first substrate hermetically seals the cavity when the second substrate is flip-chip bonded to the first substrate and soldered to the first substrate with a thin film metal material placed on at least a top portion of the firewall. The resulting firewall MEMS device package can be further packaged using conventional CMOS packaging techniques. By hermetically sealing the cavity, the enclosed MEMS device is protected from deleterious conditions found in the environment of conventional CMOS packaging techniques which is often detrimental to MEMS device function.

摘要翻译： 用于气密地密封混合电路中的微机电系统（MEMS）装置的封装包括形成在用于MEMS器件的衬底上的防火墙，其具有限定封装的空腔的高度，其中MEMS器件将被密封。 与第一基板间隔开的第二基板在第二基板被倒装芯片接合到第一基板时气密地密封空腔，并且将金属材料焊接到第一基板上，薄膜金属材料放置在防火墙的至少顶部上。 所得到的防火墙MEMS器件封装可以使用传统的CMOS封装技术进一步封装。 通过密封空腔，封装的MEMS器件得到保护，防止在常规CMOS封装技术的环境中发现有害条件，这常常对MEMS器件功能有害。

公开(公告)号：US5767997A

公开(公告)日：1998-06-16

申请号：US675980

申请日：1996-07-05

申请人： David John Bishop ,  Keith Wayne Goossen ,  James A. Walker

发明人： David John Bishop ,  Keith Wayne Goossen ,  James A. Walker

IPC分类号： H04B10/24 ,  H04B10/00

CPC分类号： H04B10/40

摘要： Apparatus and methods for a combined optical modulator/photodetector are disclosed. A modulator chip is attached to a photodetector chip using a non-conductive epoxy or solder. The combined modulator/photodetector can be configured in at least two ways. In one configuration, the modulator is located on the upper surface of a chip that is attached, at its lower surface, to a photodetector containing chip. In another configuration, the modulator is located on the lower surface of the modulator chip, which is again attached at its lower surface to the pbotodetector chip. By combining the modulator and photodetector in the manner described above, they can be placed in a single package, resulting in reduced packaging costs versus a separately packaged modulator and a separately packaged photodetector. Moreover, feedback from the photodetector can used to optimize the operation of micromechanical optical modulators.

摘要翻译： 公开了用于组合光调制器/光电检测器的装置和方法。 使用非导电环氧树脂或焊料将调制器芯片附接到光电检测器芯片。 组合的调制器/光电检测器可以至少两种方式配置。 在一种配置中，调制器位于芯片的上表面上，芯片的下表面附接到包含光电检测器的芯片。 在另一种配置中，调制器位于调制器芯片的下表面上，该调制器芯片的下表面再次连接到波导检测器芯片。 通过以上述方式组合调制器和光电检测器，它们可以放置在单个封装中，从而与单独封装的调制器和单独封装的光电检测器相比降低了封装成本。 此外，来自光电检测器的反馈可用于优化微机械光学调制器的操作。