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公开(公告)号：US6048255A
公开(公告)日：2000-04-11
申请号：US522287
申请日：1997-06-26
申请人： David S. Kuo , Dallas W. Meyer
发明人： David S. Kuo , Dallas W. Meyer
CPC分类号： G11B5/7315 , G11B5/8404
摘要： A surface treatment process employing pulsed laser energy enables selective texturizing and polishing of non-magnetizable substrate disks used in fabricating magnetic reading and recording media. Substrate surfaces are texturized over dedicated head contact zones to form multiple nodules that are highly uniform to precisely control surface roughness. Laser polishing of data zones causes localized flow of the substrate material, to remove the residual scratches of mechanical polishing without altering the non-magnetic character of the substrate at large. Between the data zones and contact zones, transition zones can be formed by selectively graduating the nodule heights in the radial direction. The rounded structure of the nodules increases surface resistance to intended or incidental transducing head contact. Removal of residual scratches enhances resistance to corrosion and improves signal quality, since subsequent layers, including the thin film recording layer and the protective carbon layer, tend to replicate the substrate surface topography.
摘要翻译： PCT No.PCT / US95 / 10697 Sec。 371日期：1997年6月26日 102（e）日期1997年6月26日PCT提交1995年8月22日PCT公布。 公开号WO97 / 07931 日期1997年3月6日使用脉冲激光能量的表面处理工艺能够选择性地对用于制造磁读取和记录介质的可磁化基板盘进行纹理化和抛光。 基底表面通过专用头部接触区域进行纹理化，以形成高度均匀以精确控制表面粗糙度的多个结节。 数据区域的激光抛光导致基板材料的局部流动，以消除机械抛光的残留划痕，而不会改变基板的非磁性特征。 在数据区和接触区之间，可以通过在径向上选择性地分级结节高度来形成过渡区。 结节的圆形结构增加了表面对预期或偶然的换能头接触的抵抗力。 由于包括薄膜记录层和保护性碳层在内的后续层倾向于复制衬底表面形貌，因此去除残留划痕增强了耐腐蚀性并提高了信号质量。
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公开(公告)号：US09330885B2
公开(公告)日：2016-05-03
申请号：US13174132
申请日：2011-06-30
IPC分类号： B44C1/22 , C23F1/00 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461 , H01J37/30 , H01J37/305
CPC分类号： H01J37/30 , H01J37/3053 , H01J37/3056 , H01J2237/2007 , H01J2237/31749
摘要： The embodiments disclose a method of stack patterning, including loading a stack into a stationary stack stage, rotating one or more ion beam grid assemblies substantially concentrically aligned with the stationary stack stage to etch the stack and controlling the operation of the one or more ion beam grid assemblies to achieve substantial axial uniformity of the etched stack.
摘要翻译： 实施例公开了一种堆叠图案化的方法，包括将堆叠装载到固定堆叠台中，使基本上与固定堆叠台同心对准的一个或多个离子束栅格组件旋转，以蚀刻堆叠并控制一个或多个离子束 栅格组件以实现蚀刻堆叠的显着的轴向均匀性。
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公开(公告)号：US08900655B2
公开(公告)日：2014-12-02
申请号：US11542129
申请日：2006-10-04
申请人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
发明人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/855
摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.
摘要翻译： 制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。
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公开(公告)号：US08792201B2
公开(公告)日：2014-07-29
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译： 过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。 相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案 碟盘将与盘片驱动主轴的中心同心对齐。 当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。 其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和 在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。
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公开(公告)号：US20110038082A1
公开(公告)日：2011-02-17
申请号：US12540185
申请日：2009-08-12
申请人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
发明人： Zhaohui Fan , David S. Kuo , Kim Yang Lee
摘要： A magnetic device having a magnetic feature, the magnetic feature including magnetic portions, a stop layer portion on each magnetic portion, and a region of non-magnetic material adjacent to the magnetic portions and the stop layer portions, where the stop layer portions define planar upper boundaries for the magnetic portions and an endpoint in planarization of the magnetic feature.
摘要翻译： 具有磁性特征的磁性装置，磁性部分包括磁性部分，每个磁性部分上的停止层部分和与磁性部分和止挡层部分相邻的非磁性材料区域，其中阻挡层部分限定平面 磁性部分的上边界和磁性特征的平坦化终点。
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公开(公告)号：US20110027407A1
公开(公告)日：2011-02-03
申请号：US12510894
申请日：2009-07-28
申请人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
发明人： Kim Yang Lee , David S. Kuo , Zhaoning Yu
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L2251/105
摘要： An imprint template is provided with a shallower field bordering the patterned region. The shallower field can be formed with additional lithography/etch steps after (or before) the formation of the features in the patterned region. The template is used to establish a thin film pattern with a field thickness that is shallower than the pattern. A shallower field bordering the patterned region alleviates sidewall re-deposition during ion mill. In a planarization/etch-back process, a thinner field helps to achieve a flat top surface by compensating for the thickness variation caused by different filling ratios. Fabrication of the recessed field template comprises a multi-step patterning process. The initial patterns are formed using a convention fabrication process. A second patterning step is used to reduce the height of the field region, which can be applied by coating the “half-finished” template with a suitable resist pattern and patterning the resist using a second lithography step that is aligned to the original pattern. Template material in the field region is then etched with the resist as a mask, forming a template with a recessed field region after the remaining resist is removed. It should be appreciated that the order of these etch steps can be reversed to obtain the same result.
摘要翻译： 压印模板设置有与图案化区域相邻的较浅的场。 可以在（或之前）在图案化区域中形成特征之后的附加光刻/蚀刻步骤形成较浅的场。 该模板用于建立具有比图案浅的场厚的薄膜图案。 与图案区域相邻的较浅的场减轻离子磨中的侧壁再沉积。 在平坦化/回蚀刻工艺中，通过补偿由不同填充率引起的厚度变化，较薄的场有助于实现平坦的顶表面。 凹陷场模板的制造包括多步图案化工艺。 使用惯例制作工艺形成初始图案。 使用第二图案化步骤来减小场区域的高度，其可以通过用合适的抗蚀剂图案涂覆“半成品”模板并且使用与原始图案对准的第二光刻步骤来图案化抗蚀剂来施加。 然后用抗蚀剂作为掩模蚀刻场区域中的模板材料，在除去剩余的抗蚀剂之后，形成具有凹陷场区域的模板。 应当理解，可以颠倒这些蚀刻步骤的顺序以获得相同的结果。
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7.发明申请公开(公告)号：US20080024772A1
公开(公告)日：2008-01-31
申请号：US11492798
申请日：2006-07-26
申请人： Li-Ping Wang , David S. Kuo , Sophia A. Fujioka , Jianmin Wang
发明人： Li-Ping Wang , David S. Kuo , Sophia A. Fujioka , Jianmin Wang
IPC分类号： G01N21/00
CPC分类号： G01N21/9506 , G01N21/4738
摘要： An integrated unit comprising a particle detection tool and a particle removal tool combined as one merged tool comprising a disc mounting mechanism having a mount for mounting the disc for both particle detection and particle removal, wherein the particle detection tool is adapted to distinguish between a fixed defect in the disc and a particle on the disc is disclosed herein. Also, the methods of manufacturing the integrated unit and using the integrated unit for detect detection and analysis are disclosed herein.
摘要翻译： 一种集成单元，包括粒子检测工具和作为一个合并工具组合的颗粒去除工具，其包括盘安装机构，所述盘安装机构具有用于安装盘的用于颗粒检测和颗粒去除的安装件，其中所述粒子检测工具适于区分固定 本文公开了盘中的缺陷和盘上的颗粒。 此外，本文公开了制造集成单元的方法和使用用于检测检测和分析的集成单元。
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公开(公告)号：US06663938B1
公开(公告)日：2003-12-16
申请号：US09210018
申请日：1998-12-11
申请人： Wei H. Yao , Yuh-Jen Cheng , Li-Ping Wang , David S. Kuo , Chiao-Ping Ku , Bruno Marchon
发明人： Wei H. Yao , Yuh-Jen Cheng , Li-Ping Wang , David S. Kuo , Chiao-Ping Ku , Bruno Marchon
IPC分类号： G11B582
CPC分类号： G11B5/82 , G11B5/6005 , G11B23/0021 , Y10T428/24355
摘要： A magnetic data recording medium substrate has a contact zone and a data zone. The contact zone is textured by forming multiple texturing features, each having a bell-shaped profile resembling a Gaussian curve. The features preferably are formed by pulsed laser energy applied to a glass substrate, or to an aluminum nickel-phosphorous substrate coated with a glass layer. As compared to previous laser texturing approaches, the laser beam is less narrowly focused to provide a beam impingement area with a diameter of at least three microns, forming texturing features with diameters of at least three microns. The texturing features preferably are uniform in height and diameter, and may be symmetrical or have asymmetrical aspects, so long as bell-shaped profiles are present in the direction of travel of the recording medium, relative to transducing heads.
摘要翻译： 磁数据记录介质基板具有接触区和数据区。 通过形成多个纹理特征来形成接触区域，每个具有类似于高斯曲线的钟形轮廓。 特征优选通过施加到玻璃基板的脉冲激光能量或涂覆有玻璃层的铝镍磷基板形成。 与以前的激光纹理方法相比，激光束的聚焦较少，以提供直径至少为三微米的光束冲击区域，形成具有至少三微米直径的纹理特征。 纹理特征优选地在高度和直径上是均匀的，并且可以是对称的或具有不对称的方面，只要钟形轮廓相对于换能头在记录介质的行进方向上存在。
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公开(公告)号：US06473259B1
公开(公告)日：2002-10-29
申请号：US09405832
申请日：1999-09-24
申请人： David S. Kuo , Wei H. Yao , Ramesh Sundaram , Huan Tang
发明人： David S. Kuo , Wei H. Yao , Ramesh Sundaram , Huan Tang
IPC分类号： G11B2102
摘要： A disk head fly height adjustment method includes positioning a disk head over a surface of a rotating data storage disk and dynamically altering a load point of the disk head by changing an electrical force applied to an active element mounted to a head-gimbal assembly. A data storage apparatus includes a head assembly having a data transfer head coupled to a gimbal and an active element coupling the head assembly and a suspension. The active element is configured to exert a force between the head assembly and the suspension in response to an electrical force applied to the active element. The active element can dynamically shift a load point of a disk head. Shifting the load point can alter the pitch of the disk head and, consequently, the fly height of the head.
摘要翻译： 盘头飞行高度调节方法包括将盘头定位在旋转数据存储盘的表面上，并且通过改变施加到安装到头部万向节组件上的有源元件的电力来动态地改变盘头的负载点。 数据存储装置包括头组件，其具有耦合到万向节的数据传送头和联接头组件和悬架的有源元件。 有源元件构造成响应于施加到有源元件的电力而在头部组件和悬架之间施加力。 有源元件可以动态地移动磁盘头的负载点。 移动负载点可以改变磁头的间距，从而改变磁头的飞行高度。
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公开(公告)号：US20110128647A1
公开(公告)日：2011-06-02
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译： 过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。 相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案 碟盘将与盘片驱动主轴的中心同心对齐。 当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。 其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和 在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。
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