公开(公告)号：US06690036B2

公开(公告)日：2004-02-10

申请号：US09811171

申请日：2001-03-16

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Michael T. Morse ,  Dmitri E. Nikonov ,  Yi Ding

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Michael T. Morse ,  Dmitri E. Nikonov ,  Yi Ding

IPC分类号： H01L2724

CPC分类号： G02B6/122 ,  G02B6/2813 ,  G02F1/025 ,  G02F1/2955 ,  G02F2001/217

摘要： An optical steering method and apparatus. In one aspect of the present invention, the disclosed apparatus includes a multi-mode interference (MMI) device disposed in a semiconductor substrate. The MMI device includes an input and a plurality of outputs Each one of the plurality of outputs of the MMI device is optically coupled to the input of the MMI device. A phase array is disposed in the semiconductor substrate. The phase array includes a plurality of inputs and a plurality of outputs. The plurality of inputs of the phase array optically are coupled to the plurality of outputs of the phase array. The phase array is coupled to control relative phase differences between optical beams output by each one of the plurality of outputs of the phase array.

摘要翻译： 一种光学转向方法和装置。 在本发明的一个方面，所公开的装置包括设置在半导体衬底中的多模干涉（MMI）装置。 MMI设备包括输入和多个输出MMI设备的多个输出中的每一个光学耦合到MMI设备的输入。 相位阵列设置在半导体衬底中。 相位阵列包括多个输入和多个输出。 光学上的相位阵列的多个输入耦合到相位阵列的多个输出端。 相位阵列被耦合以控制由相位阵列的多个输出中的每一个输出的光束之间的相对相位差。

公开(公告)号：US06566679B2

公开(公告)日：2003-05-20

申请号：US10246967

申请日：2002-09-18

申请人： Dmitri E. Nikonov ,  Mario J. Paniccia

发明人： Dmitri E. Nikonov ,  Mario J. Paniccia

IPC分类号： H01L2978

CPC分类号： B82Y20/00 ,  G02F1/01708 ,  G02F1/025 ,  Y10T24/4051

摘要： Devices and techniques for integrating a silicon superlattice optical modulator on a silicon substrate with other circuit elements. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The modulator can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.

公开(公告)号：US06434289B1

公开(公告)日：2002-08-13

申请号：US09676294

申请日：2000-09-28

申请人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

IPC分类号： G02B626

CPC分类号： G02F1/025 ,  G02B2006/12145

摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the layers. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.

摘要翻译： 用于将光束限制在光开关中的装置。 在一个实施例中，所公开的光开关包括设置在设置在多个光限制层之间的半导体衬底层中的光输入端口和光输出端口之间的光开关器件，使得光束被限制在残留在层内。 在一个实施例中，光开关中包括多个半导体衬底层。 每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。 在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

公开(公告)号：US06501092B1

公开(公告)日：2002-12-31

申请号：US09435057

申请日：1999-10-25

申请人： Dmitri E. Nikonov ,  Mario J. Paniccia

发明人： Dmitri E. Nikonov ,  Mario J. Paniccia

IPC分类号： H01L2978

CPC分类号： B82Y20/00 ,  G02F1/01708 ,  G02F1/025 ,  Y10T24/4051

摘要： Devices and techniques for integrating a silicon superlattice optical modulator on a silicon substrate with other circuit elements. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The modulator can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.

摘要翻译： 将硅超晶格光调制器与硅衬底与其他电路元件集成的器件和技术。 超晶格结构被设计为将硅的间接带隙结构转换成直接带隙结构以实现更有效的光吸收。 可以通过使用诸如金属氧化物半导体处理的硅集成电路的标准制造工艺，基于电路元件的结构来制造调制器。

公开(公告)号：US06891653B2

公开(公告)日：2005-05-10

申请号：US10177872

申请日：2002-06-19

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Michael T. Morse ,  Dmitri E. Nikonov ,  Yi Ding

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Michael T. Morse ,  Dmitri E. Nikonov ,  Yi Ding

IPC分类号： G02B6/122 ,  G02B6/28 ,  G02F1/025 ,  G02F1/295

CPC分类号： G02B6/122 ,  G02B6/2813 ,  G02F1/025 ,  G02F1/2955 ,  G02F2001/217

摘要： An optical steering method and apparatus. In one aspect of the present invention, the disclosed apparatus includes a multi-mode interference (MMI) device disposed in a semiconductor substrate. The MMI device includes an input and a plurality of outputs. Each one of the plurality of outputs of the MMI device is optically coupled to the input of the MMI device. A phase array is disposed in the semiconductor substrate. The phase array includes a plurality of inputs and a plurality of outputs. The plurality of inputs of the phase array optically are coupled to the plurality of outputs of the phase array. The phase array is coupled to control relative phase differences between optical beams output by each one of the plurality of outputs of the phase array.

摘要翻译： 一种光学转向方法和装置。 在本发明的一个方面，所公开的装置包括设置在半导体衬底中的多模干涉（MMI）装置。 MMI设备包括输入和多个输出。 MMI设备的多个输出中的每一个光耦合到MMI设备的输入。 相位阵列设置在半导体衬底中。 相位阵列包括多个输入和多个输出。 光学上的相位阵列的多个输入耦合到相位阵列的多个输出端。 相位阵列被耦合以控制由相位阵列的多个输出中的每一个输出的光束之间的相对相位差。

公开(公告)号：US06421473B1

公开(公告)日：2002-07-16

申请号：US09676297

申请日：2000-09-28

申请人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

IPC分类号： G02B612

CPC分类号： G02F1/025 ,  G02B2006/12145 ,  G02F1/313

摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer of an integrated circuit die. The semiconductor substrate layer is disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the semiconductor substrate layer until exiting through the optical output port. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, at least one optical switching device is disposed in each of the plurality of semiconductor substrate layers. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.

摘要翻译： 用于将光束限制在光开关中的装置。 在一个实施例中，所公开的光开关包括设置在集成电路管芯的半导体衬底层中的光输入端口和光输出端口之间的光开关器件。 半导体衬底层设置在多个光学限制层之间，使得光束被限制为保持在半导体衬底层内，直到通过光学输出端口离开。 在一个实施例中，光开关中包括多个半导体衬底层。 每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。 在一个实施例中，至少一个光学开关器件设置在多个半导体衬底层的每一个中。 在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

公开(公告)号：US06621097B2

公开(公告)日：2003-09-16

申请号：US10246992

申请日：2002-09-18

申请人： Dmitri E. Nikonov ,  Mario J. Paniccia

发明人： Dmitri E. Nikonov ,  Mario J. Paniccia

IPC分类号： H01L2906

CPC分类号： B82Y20/00 ,  G02F1/01708 ,  G02F1/025 ,  Y10T24/4051

摘要： Apparatuses and methods for modulating an optical signal that include a superlattice structure. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The apparatus can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.

公开(公告)号：US06463193B2

公开(公告)日：2002-10-08

申请号：US09732033

申请日：2000-12-06

申请人： Mario J. Paniccia ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Dmitri E. Nikonov

IPC分类号： G02B626

CPC分类号： G02F1/025 ,  G02F2203/48 ,  G02F2203/50

摘要： A device for switching an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed in a well region in a semiconductor substrate layer. In one embodiment, the well region has a higher doping concentration than the semiconductor substrate layer in which the well region is disposed. The optical switching device is optically coupled to an optical input port and an optical output port of the integrated circuit die.

公开(公告)号：US06449405B1

公开(公告)日：2002-09-10

申请号：US09676293

申请日：2000-09-28

申请人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

发明人： Mario J. Paniccia ,  Yi Ding ,  Dmitri E. Nikonov

IPC分类号： G02B642

CPC分类号： G02F1/025 ,  G02B2006/12145

摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the layers. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.

摘要翻译： 用于将光束限制在光开关中的装置。 在一个实施例中，所公开的光开关包括设置在设置在多个光限制层之间的半导体衬底层中的光输入端口和光输出端口之间的光开关器件，使得光束被限制在残留在层内。 在一个实施例中，光开关中包括多个半导体衬底层。 每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。 在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

公开(公告)号：US08767792B2

公开(公告)日：2014-07-01

申请号：US13838932

申请日：2013-03-15

申请人： John E. Bowers ,  Oded Cohen ,  Alexander W. Fang ,  Richard Jones ,  Mario J. Paniccia ,  Hyundai Park

发明人： John E. Bowers ,  Oded Cohen ,  Alexander W. Fang ,  Richard Jones ,  Mario J. Paniccia ,  Hyundai Park

IPC分类号： H01S3/091 ,  H01S3/094

CPC分类号： H01S5/30 ,  G02B2006/12121 ,  H01S5/021 ,  H01S5/026 ,  H01S5/0424 ,  H01S5/0425 ,  H01S5/1032 ,  H01S5/125 ,  H01S5/141 ,  H01S5/2214 ,  H01S5/223 ,  H01S5/34

摘要： Embodiments of a method comprising guiding an optical mode with an optical waveguide disposed in silicon, overlapping both the optical waveguide and an active semiconductor material evanescently coupled to the optical waveguide with the optical mode guided through the optical waveguide, electrically pumping the active semiconductor material to inject current directed through the active semiconductor material and through the optical mode, and generating light in the active semiconductor material in response to the injected current. Other embodiments are disclosed and claimed.

摘要翻译： 一种方法的实施方案包括用设置在硅中的光波导引导光学模式，与光波导和有源半导体材料重叠，该有源半导体材料通过光波导引导而光学耦合到光波导，将活性半导体材料电泵送到 注入引导通过有源半导体材料并通过光学模式的电流，并响应于注入的电流产生有源半导体材料中的光。 公开和要求保护其他实施例。