公开(公告)号：US20160243646A1

公开(公告)日：2016-08-25

申请号：US15047279

申请日：2016-02-18

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： Jan Kleinert ,  Fumiyo Yoshino ,  Corie Neufeld ,  Jeremy Willey ,  Mehmet Alpay

IPC分类号： B23K26/067 ,  B23K26/364 ,  B23K26/08 ,  H01S3/00 ,  B23K26/00

CPC分类号： B23K26/364 ,  B23K26/0006 ,  B23K26/066 ,  B23K26/0676 ,  B23K26/08 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/0853 ,  B23K26/352 ,  B23K26/355 ,  B23K26/359 ,  B23K2101/40 ,  B23K2103/50 ,  B23K2103/56

摘要： A laser system (112, 1300) modifies a large area on an article (100) by employing a beamlet generator (1404) to provide a plurality of beamlets (1408) to a beamlet selection device (2350) whose operation is synchronized with movement of a beam steering system (1370) to variably select a number and spatial arrangement of beamlets (1408) to propagate a variable pattern of spot areas (302) to the article (100).

摘要翻译： 激光系统（112,1300）通过使用子束发生器（1404）来修改物品（100）上的大面积，以向多个子束（1408）提供多个子束（1408），该小射束（1408）的操作与 波束转向系统（1370），用于可变地选择子束（1408）的数量和空间布置，以将斑点区域（302）的可变图案传播到物品（100）。

公开(公告)号：US20210346985A1

公开(公告)日：2021-11-11

申请号：US17272611

申请日：2019-10-15

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： Corie Neufeld ,  Jeremy Willey ,  Brandon Bilyeu ,  Wayne Crowther ,  Chris Ryder

IPC分类号： B23K26/12 ,  B23K26/70 ,  B23K37/00

摘要： A frame for a laser processing module can be characterized as including a platform having an upper surface and a lower surface, an optics bridge spaced apart from, and extending over, the upper surface of the platform and a bridge support interposed between, and coupled to, the platform and the optics bridge. At least one selected from the group consisting of the platform and the optics bridge includes a sandwich panel. The sandwich panel can include a first plate, a second plate and a core interposed between the first plate and the second plate. The first plate and the second plate can be indirectly attached to one another by the core and the core can define at least one channel extending between the first plate and the second plate. The sandwich panel can also include a first port formed at an exterior of the sandwich panel and in fluid communication with the at least one channel, and a second port formed at the exterior of the sandwich panel and in fluid communication with the at least one channel.

公开(公告)号：US20190001442A1

公开(公告)日：2019-01-03

申请号：US15750140

申请日：2016-09-08

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： Mark Unrath ,  Chuan Yang ,  Jan Kleinert ,  Mark Peeples ,  Hugh Owens ,  Gwendolyn Byrne ,  Haibin Zhang ,  Justin Redd ,  Corie Neufeld ,  James D. Brookhyser ,  Yasu Osako ,  Mehmet Alpay ,  Zhibin Lin ,  Patrick Riechel ,  Tim Nuckolls ,  Hisashi Matsumoto ,  Chris Ryder

IPC分类号： B23K26/382 ,  B23K26/082 ,  B23K26/70 ,  B23K26/0622

摘要： Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.