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公开(公告)号:US20190221737A1
公开(公告)日:2019-07-18
申请号:US16360099
申请日:2019-03-21
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
CPC classification number: H01L43/12 , B82Y25/00 , G01R33/0052 , G01R33/09 , G01R33/093 , G01R33/098 , H01L27/22 , H01L43/02 , H01L43/08
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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公开(公告)号:US20160163962A1
公开(公告)日:2016-06-09
申请号:US15041178
申请日:2016-02-11
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Phillip MATHER , Jon SLAUGHTER , Nicholas RIZZO
IPC: H01L43/02
CPC classification number: H01L43/02 , G01R33/098 , H01L27/22 , H01L43/08 , H01L43/12
Abstract: A magnetic sensor includes a plurality of groups, each group comprising a plurality of magnetic tunnel junction (MTJ) devices having a plurality of conductors configured to couple the MTJ devices within one group in parallel and the groups in series enabling independent optimization of the material resistance area (RA) of the MTJ and setting total device resistance so that the total bridge resistance is not so high that Johnson noise becomes a signal limiting concern, and yet not so low that CMOS elements may diminish the read signal. Alternatively, the magnetic tunnel junction devices within each of at least two groups in series and the at least two groups in parallel resulting in the individual configuration of the electrical connection path and the magnetic reference direction of the reference layer, leading to independent optimization of both functions, and more freedom in device design and layout. The X and Y pitch of the sense elements are arranged such that the line segment that stabilizes, for example, the right side of one sense element; also stabilizes the left side of the adjacent sense element.
Abstract translation: 磁传感器包括多个组,每个组包括多个磁隧道结(MTJ)装置,其具有多个导体,其被配置成并联连接一组内的MTJ装置,并且该组可串联实现材料电阻的独立优化 面积(RA),并设置总的器件电阻,使得总的桥接电阻不是很高,以至于Johnson噪声成为限制信号的关键,而不是那么低,使得CMOS元件可能会削弱读取信号。 或者,串联的至少两组中的每一个中的磁隧道结装置和并联的至少两个组,导致电连接路径的单独配置和参考层的磁参考方向,导致两者的独立优化 功能,以及更多设备设计和布局自由。 感测元件的X和Y间距被布置成使得例如稳定一个感测元件的右侧的线段; 也稳定了相邻感测元件的左侧。
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公开(公告)号:US20240090335A1
公开(公告)日:2024-03-14
申请号:US18307633
申请日:2023-04-26
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
CPC classification number: H10N50/01 , B82Y25/00 , G01R33/0052 , G01R33/09 , G01R33/093 , G01R33/098 , H10B61/00 , H10N50/10 , H10N50/80 , H10N59/00
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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公开(公告)号:US20210265563A1
公开(公告)日:2021-08-26
申请号:US17245882
申请日:2021-04-30
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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公开(公告)号:US20190123268A1
公开(公告)日:2019-04-25
申请号:US16230031
申请日:2018-12-21
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Jijun SUN , Nicholas RIZZO , Jon SLAUGHTER , Dimitri HOUSSAMEDDINE , Frederick MANCOFF
CPC classification number: H01L43/12 , G11C11/161 , H01L43/02 , H01L43/08 , H01L43/10
Abstract: A magnetoresistive element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer, having a high-iron alloy interface region located along a surface of the free magnetic layer, wherein the high-iron alloy interface region has at least 50% iron by atomic composition, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. The magnetoresistive element further includes a second dielectric, having a first surface that is in contact with the surface of the free magnetic layer, and an electrode, disposed between the second dielectric and a conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion having at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.
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公开(公告)号:US20170117461A1
公开(公告)日:2017-04-27
申请号:US15388650
申请日:2016-12-22
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
CPC classification number: H01L43/12 , B82Y25/00 , G01R33/0052 , G01R33/09 , G01R33/093 , G01R33/098 , H01L27/22 , H01L43/02 , H01L43/08
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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公开(公告)号:US20190386212A1
公开(公告)日:2019-12-19
申请号:US16551952
申请日:2019-08-27
Applicant: Everspin Technologies, Inc.
Inventor: Renu WHIG , Jijun SUN , Nicholas RIZZO , Jon SLAUGHTER , Dimitri HOUSSAMEDDINE , Frederick MANCOFF
Abstract: A magnetoresistive element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer, having a high-iron alloy interface region located along a surface of the free magnetic layer, wherein the high-iron alloy interface region has at least 50% iron by atomic composition, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. The magnetoresistive element further includes a second dielectric, having a first surface that is in contact with the surface of the free magnetic layer, and an electrode, disposed between the second dielectric and a conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion having at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.
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公开(公告)号:US20190280198A1
公开(公告)日:2019-09-12
申请号:US16419165
申请日:2019-05-22
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Jijun SUN , Nicholas RIZZO , Jon SLAUGHTER , Dimitri HOUSSAMEDDINE , Frederick MANCOFF
Abstract: A magnetoresistive element (e.g., a spin-torque magnetoresistive memory element) includes a fixed magnetic layer, a free magnetic layer, having a high-iron alloy interface region located along a surface of the free magnetic layer, wherein the high-iron alloy interface region has at least 50% iron by atomic composition, and a first dielectric, disposed between the fixed magnetic layer and the free magnetic layer. The magnetoresistive element further includes a second dielectric, having a first surface that is in contact with the surface of the free magnetic layer, and an electrode, disposed between the second dielectric and a conductor. The electrode includes: (i) a non-ferromagnetic portion having a surface that is in contact with a second surface of the second dielectric, and (ii) a second portion having at least one ferromagnetic material disposed between the non-ferromagnetic portion of the electrode and the conductor.
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公开(公告)号:US20160260895A1
公开(公告)日:2016-09-08
申请号:US15145515
申请日:2016-05-03
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
CPC classification number: H01L43/12 , B82Y25/00 , G01R33/0052 , G01R33/09 , G01R33/093 , G01R33/098 , H01L27/22 , H01L43/02 , H01L43/08
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
Abstract translation: 半导体工艺集成了三个桥接电路,每个电路包括在单个芯片上作为惠斯登电桥耦合的磁阻传感器,以在三个正交方向上感测磁场。 该过程包括形成磁阻传感器的各种沉积和蚀刻步骤以及在三个桥接电路中的一个上的多个通量引导器,用于将“Z”轴磁场传送到在XY平面中定向的传感器上。
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公开(公告)号:US20160260894A1
公开(公告)日:2016-09-08
申请号:US15142721
申请日:2016-04-29
Applicant: EVERSPIN TECHNOLOGIES, INC.
Inventor: Renu WHIG , Phillip MATHER , Kenneth SMITH , Sanjeev AGGARWAL , Jon SLAUGHTER , Nicholas RIZZO
CPC classification number: H01L43/12 , B82Y25/00 , G01R33/0052 , G01R33/09 , G01R33/093 , G01R33/098 , H01L27/22 , H01L43/02 , H01L43/08
Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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