公开(公告)号：US20100215986A1

公开(公告)日：2010-08-26

申请号：US12712981

申请日：2010-02-25

申请人： Eijirou IWASE ,  Jun FUJINAWA ,  Toyoaki HIEDA ,  Toshiyuki KATAGIRI ,  Hiroshi ARAKATSU

发明人： Eijirou IWASE ,  Jun FUJINAWA ,  Toyoaki HIEDA ,  Toshiyuki KATAGIRI ,  Hiroshi ARAKATSU

IPC分类号： B32B9/00 ,  B32B38/10

CPC分类号： C23C14/562 ,  B05D7/04 ,  B05D2252/02 ,  B32B37/003 ,  B32B37/12 ,  B32B37/203 ,  B32B38/10 ,  B32B2037/243 ,  B32B2305/02 ,  B32B2309/68 ,  B32B2457/00 ,  C23C14/024 ,  C23C14/081 ,  C23C16/0272 ,  C23C16/545

摘要： A method for manufacturing a functional film includes steps of: feeding a support continuously from a first film roll, forming a coating film on the support, providing a laminate film on a surface of the coating film, and taking up the support to a second film roll; and loading the second film roll made by the aforementioned step in a vacuum film-forming apparatus, feeding the support provided with the laminate film continuously from the film roll, peeling off the laminate film, forming an inorganic film on the coating film on the support, and taking up the support to a third film roll.

摘要翻译： 一种功能膜的制造方法，其特征在于，包括以下步骤：从第一胶片辊连续地供给载体，在所述载体上形成涂膜，在所述涂膜的表面上设置层叠膜，并将所述支持体吸附到第二膜 滚; 并将由上述步骤制成的第二薄膜辊装载到真空成膜装置中，从薄膜辊连续地供给具有层叠膜的支撑体，剥离层压膜，在支撑体上的涂膜上形成无机膜 ，并支持第三部电影卷。

公开(公告)号：US20110041765A1

公开(公告)日：2011-02-24

申请号：US12862213

申请日：2010-08-24

申请人： Tatsuya FUJINAMI ,  Shinsuke TAKAHASHI ,  Kouji TONOHARA ,  Jun FUJINAWA

发明人： Tatsuya FUJINAMI ,  Shinsuke TAKAHASHI ,  Kouji TONOHARA ,  Jun FUJINAWA

IPC分类号： C23C16/52

CPC分类号： C23C16/545 ,  C23C16/45519

摘要： The film deposition device includes a CVD film forming room disposed on a travel path of a substrate and having a function of performing the film deposition on a substrate by CVD, a treatment room disposed upstream or downstream of the CVD film forming room on the travel path and having a function of performing a predetermined treatment on the substrate, and a differential room disposed between and communicating with the CVD film forming room and the treatment room. The differential room includes a evacuation unit, a gas introducing unit for introducing at least one of a gas to be supplied to both of the CVD film forming room and the treatment room, and an inert gas, and a controller which controls the evacuation unit and the gas introducing unit to keep the differential room at a higher pressure than the CVD film forming room and the treatment room.

摘要翻译： 该膜沉积装置包括设置在基板的行进路径上并具有通过CVD在基板上进行膜沉积的功能的CVD成膜室，设置在行进路径上的CVD成膜室的上游或下游的处理室 并且具有对基板进行预定处理的功能，以及设置在CVD成膜室和处理室之间并与其连通的差动室。 差速室包括排气单元，用于引入要供应到CVD成膜室和处理室的气体中的至少一种的气体引入单元和惰性气体，以及控制排气单元和 该气体导入单元将差压室保持在比CVD成膜室和处理室更高的压力。

公开(公告)号：US20090196997A1

公开(公告)日：2009-08-06

申请号：US12363348

申请日：2009-01-30

申请人： Masami NAKAGAME ,  Hiroyuki NISHIDA ,  Norihiro KADOTA ,  Jun FUJINAWA ,  Daisuke ONODERA

发明人： Masami NAKAGAME ,  Hiroyuki NISHIDA ,  Norihiro KADOTA ,  Jun FUJINAWA ,  Daisuke ONODERA

IPC分类号： B05D1/00

CPC分类号： C23C16/545 ,  B05D1/28 ,  B05D3/067 ,  B05D7/04 ,  B05D7/54 ,  B05D2252/02 ,  C23C14/562

摘要： A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.

摘要翻译： 制备具有特定有机膜和特定无机膜的功能膜。 功能膜始终如一地产生并表现出预期的性能。 功能性膜制造方法包括在基板的表面上形成有机膜，处理其上形成有机膜的基板，使得在真空中没有元件与有机膜表面直接接触形成无机膜，并形成 无机膜通过真空沉积在有机膜表面上。

公开(公告)号：US20110064890A1

公开(公告)日：2011-03-17

申请号：US12880615

申请日：2010-09-13

申请人： Tatsuya FUJINAMI ,  Shinsuke TAKAHASHI ,  Jun FUJINAWA ,  Kouji TONOHARA

发明人： Tatsuya FUJINAMI ,  Shinsuke TAKAHASHI ,  Jun FUJINAWA ,  Kouji TONOHARA

IPC分类号： C23C16/458 ,  C23C16/505

CPC分类号： C23C16/50 ,  C23C16/44 ,  C23C16/503 ,  C23C16/505 ,  C23C16/509 ,  C23C16/517 ,  C23C16/54 ,  C23C16/545

摘要： A film deposition method deposits a film on a surface of a substrate in strip form traveling on a peripheral surface of a cylindrical drum in at least one film deposition compartment around the peripheral surface of the drum. The method disposes previously a differential compartment between one film deposition compartment and a compartment including a wrapping space containing at least one of a first position at which the substrate starts to travel on the drum and a second position at which the substrate separates from the drum, the differential compartments communicating with the compartment including the wrapping space and the film deposition compartment, sets a first pressure of the wrapping space lower than a second pressure of the at least one film deposition compartment and performs film deposition in the film deposition compartment with electric power supplied to the drum.

摘要翻译： 薄膜沉积方法将薄膜沉积在基板的表面上，以条带形式在圆筒形滚筒的圆周表面上行进，在至少一个薄膜沉积室周围的圆筒表面上。 该方法事先将一个薄膜沉积隔室和隔室之间的差分隔室置于包含一个包装空间的隔间，该包装空间包含基板开始在滚筒上行进的第一位置和基板与滚筒分离的第二位置中的至少一个， 与包括所述包装空间和所述成膜室的所述隔室连通的所述差动隔间将所述包装空间的第一压力设定为低于所述至少一个成膜室的第二压力，并且利用电力在所述成膜室中进行膜沉积 提供给鼓。