公开(公告)号：US11699582B2

公开(公告)日：2023-07-11

申请号：US17468478

申请日：2021-09-07

Applicant: Thermo Fisher Scientific (Bremen) GmbH ,  FEI Company

Inventor： Alexander Makarov ,  Wilko Balschun ,  Kyle Fort ,  Kun Liu

IPC: H01J37/02 ,  H01J49/06

CPC classification number: H01J49/063 ,  H01J37/02 ,  H01J2237/0216 ,  H01J2237/182

Abstract: A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising: a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system; wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.

公开(公告)号：US20220115205A1

公开(公告)日：2022-04-14

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J49/42 ,  H01J37/20

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11749498B2

公开(公告)日：2023-09-05

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

CPC classification number: H01J37/295 ,  H01J37/20 ,  H01J49/4215

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US12165839B2

公开(公告)日：2024-12-10

申请号：US18354524

申请日：2023-07-18

Applicant: FEI Company

Inventor： Marcus Straw ,  Dmitry Grinfeld ,  Alexander Makarov ,  Alan Bahm ,  Aaron Torok ,  Kun Liu ,  Joseph Christian ,  Josh Gilbert ,  Tom Nichols ,  Jeff Kosmoski

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11217425B2

公开(公告)日：2022-01-04

申请号：US16914924

申请日：2020-06-29

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US20220084806A1

公开(公告)日：2022-03-17

申请号：US17468478

申请日：2021-09-07

Applicant: Thermo Fisher Scientific (Bremen) GmbH ,  FEI Company

Inventor： Alexander Makarov ,  Wilko Balschun ,  Kyle Fort ,  Kun Liu

IPC: H01J49/06 ,  H01J37/02

Abstract: A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising: a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system; wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.