公开(公告)号：US20220115205A1

公开(公告)日：2022-04-14

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J49/42 ,  H01J37/20

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US20230393074A1

公开(公告)日：2023-12-07

申请号：US17833670

申请日：2022-06-06

Applicant: FEI Company

Inventor： Joseph Christian ,  Jorge Filevich

IPC: G01N21/65 ,  G01J3/44 ,  G01J3/02

CPC classification number: G01N21/65 ,  H01J3/021 ,  G01J3/0291 ,  G01J3/44

Abstract: Methods and apparatus are disclosed for concurrent cleaning and cleanliness monitoring of a sample such as a substrate for electron point projection microscopy. A graphene sample is illuminated by a laser. Raman scattering from contaminants generates secondary light which is analyzed by spectrometer. Based on Raman scattering analysis, sample cleanliness is determined. Cleaning can be dynamically terminated based on achieving a target cleanliness level or based on prediction thereof. Variations and additional applications are disclosed.

公开(公告)号：US11749498B2

公开(公告)日：2023-09-05

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

CPC classification number: H01J37/295 ,  H01J37/20 ,  H01J49/4215

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11735404B2

公开(公告)日：2023-08-22

申请号：US17017580

申请日：2020-09-10

Applicant: FEI Company

Inventor： Alex De Marco ,  Sergey Gorelick ,  Chad Rue ,  Joseph Christian ,  Kenny Mani ,  Steven Randolph ,  Matthias Langhorst

IPC: H01J37/32 ,  H01J49/00 ,  G01N1/32

CPC classification number: H01J49/0027 ,  G01N1/32 ,  H01J37/32009 ,  H01J2237/0807 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: The invention relates to a method, a device and a system for the treatment of biological frozen samples using plasma focused ion beams (FIB). The samples can then be used for mass spectrometry (MS), genomics, such as gene sequencing analysis or next generation sequencing (NGS) analysis, and proteomics. The present invention particularly relates to a method of treatment of at least one biological sample. This method is particularly used for high performance microscopy, proteomics analytics, sequencing, such as NGS etc. According to the present invention the method comprises the steps of providing at least one biological sample in frozen form. The milling treats at least one part of the sample by a plasma ion beam comprising at least one of an O+ and/or a Xe+ plasma.

公开(公告)号：US12165839B2

公开(公告)日：2024-12-10

申请号：US18354524

申请日：2023-07-18

Applicant: FEI Company

Inventor： Marcus Straw ,  Dmitry Grinfeld ,  Alexander Makarov ,  Alan Bahm ,  Aaron Torok ,  Kun Liu ,  Joseph Christian ,  Josh Gilbert ,  Tom Nichols ,  Jeff Kosmoski

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US12158372B2

公开(公告)日：2024-12-03

申请号：US17833670

申请日：2022-06-06

Applicant: FEI Company

Inventor： Joseph Christian ,  Jorge Filevich

IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65 ,  G01N21/94 ,  H01J37/28

Abstract: Methods and apparatus are disclosed for concurrent cleaning and cleanliness monitoring of a sample such as a substrate for electron point projection microscopy. A graphene sample is illuminated by a laser. Raman scattering from contaminants generates secondary light which is analyzed by spectrometer. Based on Raman scattering analysis, sample cleanliness is determined. Cleaning can be dynamically terminated based on achieving a target cleanliness level or based on prediction thereof. Variations and additional applications are disclosed.

公开(公告)号：US11217425B2

公开(公告)日：2022-01-04

申请号：US16914924

申请日：2020-06-29

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.