公开(公告)号：US20220115205A1

公开(公告)日：2022-04-14

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J49/42 ,  H01J37/20

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11749498B2

公开(公告)日：2023-09-05

申请号：US17559553

申请日：2021-12-22

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

CPC classification number: H01J37/295 ,  H01J37/20 ,  H01J49/4215

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11887805B2

公开(公告)日：2024-01-30

申请号：US17491039

申请日：2021-09-30

Applicant: FEI Company

Inventor： John Stiller ,  Aaron Torok ,  Kevin Kagarice

IPC: H01J37/075 ,  H01J37/21 ,  H01J37/073

CPC classification number: H01J37/075 ,  H01J37/21 ,  H01J2237/06316

Abstract: Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.

公开(公告)号：US20230101787A1

公开(公告)日：2023-03-30

申请号：US17491039

申请日：2021-09-30

Applicant: FEI Company

Inventor： John Stiller ,  Aaron Torok ,  Kevin Kagarice

IPC: H01J37/075 ,  H01J37/21

Abstract: Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.

公开(公告)号：US12165839B2

公开(公告)日：2024-12-10

申请号：US18354524

申请日：2023-07-18

Applicant: FEI Company

Inventor： Marcus Straw ,  Dmitry Grinfeld ,  Alexander Makarov ,  Alan Bahm ,  Aaron Torok ,  Kun Liu ,  Joseph Christian ,  Josh Gilbert ,  Tom Nichols ,  Jeff Kosmoski

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.

公开(公告)号：US11217425B2

公开(公告)日：2022-01-04

申请号：US16914924

申请日：2020-06-29

Applicant: FEI Company

Inventor： Marcus Straw ,  Alexander Makarov ,  Josh Gilbert ,  Aaron Torok ,  Joseph Christian ,  Alan Bahm ,  Kun Liu ,  Tom Nichols ,  Jeff Kosmoski ,  Dmitry Grinfeld

IPC: H01J37/295 ,  H01J37/20 ,  H01J49/42

Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.