公开(公告)号：US09378925B2

公开(公告)日：2016-06-28

申请号：US14869553

申请日：2015-09-29

Applicant: FEI Company

Inventor： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC: H01J37/00 ,  H01J37/305 ,  G01N1/28 ,  H01J37/26

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

Abstract: An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

公开(公告)号：US20160020069A1

公开(公告)日：2016-01-21

申请号：US14869553

申请日：2015-09-29

Applicant: FEI Company

Inventor： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC: H01J37/305 ,  G01N1/28 ,  H01J37/26

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

Abstract: An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

公开(公告)号：US20150075972A1

公开(公告)日：2015-03-19

申请号：US14456946

申请日：2014-08-11

Applicant: FEI Company

Inventor： Corey Senowitz

IPC: C23C14/30

CPC classification number: C23C14/30 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/304 ,  H01J2237/31745

Abstract: An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.

Abstract translation: 一种制备TEM样品的改进方法。 将样品从工件中取出并附着到探头上以运送到样品架上。 使用带电粒子束沉积将样品连接到样品架上，并且通过使探针和样品架相对于彼此移动而与探针机械分离，而不会使用带电粒子束而断开连接。

公开(公告)号：US10053768B2

公开(公告)日：2018-08-21

申请号：US14456946

申请日：2014-08-11

Applicant: FEI Company

Inventor： Corey Senowitz

IPC: C23C14/00 ,  C23C14/30 ,  G01N1/32 ,  H01J37/305

CPC classification number: C23C14/30 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/304 ,  H01J2237/31745

Abstract: An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.

公开(公告)号：US09177760B2

公开(公告)日：2015-11-03

申请号：US14502522

申请日：2014-09-30

Applicant: FEI Company

Inventor： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC: H01J37/00 ,  H01J37/305 ,  G01N1/28 ,  H01J37/26

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

Abstract: An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

Abstract translation: 一种改进的制备超薄TEM样品的方法，其结合了背面变薄与额外的清洁步骤，以去除面向FIB的衬底表面上的表面缺陷。 这个额外的步骤导致创建一个清洁，统一的“硬掩模”来控制样品稀化的最终结果，并且允许对厚度低至10nm范围的样品进行可靠和鲁棒的准备。

公开(公告)号：US20150053548A1

公开(公告)日：2015-02-26

申请号：US14502522

申请日：2014-09-30

Applicant: FEI Company

Inventor： Jeffrey Blackwood ,  Matthew Bray ,  Corey Senowitz ,  Cliff Bugge

IPC: H01J37/305 ,  H01J37/26

CPC classification number: H01J37/3056 ,  G01N1/286 ,  G01N2001/2886 ,  H01J37/261 ,  H01J2237/31745

Abstract: An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform “hardmask” that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10 nm range.

Abstract translation: 一种改进的制备超薄TEM样品的方法，其结合了背面变薄与额外的清洁步骤，以去除面向FIB的衬底表面上的表面缺陷。 这个额外的步骤导致创建一个清洁，统一的“硬掩模”来控制样品稀化的最终结果，并且允许对厚度低至10nm范围的样品进行可靠和鲁棒的准备。

公开(公告)号：US08729469B1

公开(公告)日：2014-05-20

申请号：US13935720

申请日：2013-07-05

Applicant: FEI Company

Inventor： Michael Schmidt ,  Stacey Stone ,  Corey Senowitz

IPC: H01J37/20

CPC classification number: H01J37/3023 ,  G01N1/286 ,  H01J2237/201 ,  H01J2237/208 ,  H01J2237/31745

Abstract: An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.

Abstract translation: 公开了一种用于提取和处理多个样品进行S / TEM分析的改进方法。 本发明的优选实施例利用将叠层结构中的多个样品一次附着在一起的显微操纵器和将每个样品放置在TEM网格上的方法。 通过使用允许多个样品处理的方法，样品制备的生产量显着增加。