公开(公告)号：US20180061613A1

公开(公告)日：2018-03-01

申请号：US15683734

申请日：2017-08-22

Applicant: FEI Company

Inventor： Bohuslav Sed'a ,  Lubomír Tuma ,  Petr Hlavenka ,  Marek Uncovský ,  Radovan Vasina ,  Jan Trojek ,  Mostafa Maazouz

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/261 ,  G21K7/00 ,  H01J37/12 ,  H01J37/1413 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/121 ,  H01J2237/1415 ,  H01J2237/188 ,  H01J2237/2605

Abstract: A charged-particle microscope having a vacuum chamber comprises a specimen holder, a particle-optical column, a detector and an exchangeable column extending element. The specimen holder is for holding a specimen. The particle-optical column is for producing and directing a beam of charged particles along an axis so as to irradiate the specimen. The column has a terminal pole piece at an extremity facing the specimen holder. The detector is for detecting a flux of radiation emanating from the specimen in response to irradiation by the beam. The exchangeable column extending element is magnetically mounted on the pole piece in a space between the pole piece and the specimen holder. Methods of using the microscope are also disclosed.