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公开(公告)号：US20120244038A1
公开(公告)日：2012-09-27
申请号：US13388223
申请日：2010-06-22
申请人： Feng Tao , Miquel Salmeron , Gabor A. Somorjai
发明人： Feng Tao , Miquel Salmeron , Gabor A. Somorjai
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/12 , G01Q30/16 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871
摘要： An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
摘要翻译： 扫描隧道显微镜（STM）反应器的一个实施例包括压力容器，STM组件和三个弹簧耦合物体。 压力容器包括可密封的端口，内部和外部。 STM系统的实施例包括真空室，STM反应器和三个弹簧。 三个弹簧将STM反应器耦合到真空室，并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置，耦合到粗位移布置的压电精细位移扫描管和接收器。 压电精细位移扫描管耦合到粗排位置。 接收器耦合到压电扫描管并且可操作以接收尖端保持器，并且尖端保持器可操作以接收尖端。
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公开(公告)号：US08893309B2
公开(公告)日：2014-11-18
申请号：US13388223
申请日：2010-06-22
申请人： Feng Tao , Miquel Salmeron , Gabor A. Somorjai
发明人： Feng Tao , Miquel Salmeron , Gabor A. Somorjai
IPC分类号： G01Q60/10 , G01Q30/18 , G01Q30/16 , G01Q60/16 , G01Q30/12 , G01Q60/00 , G21K5/10 , B82Y35/00
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/12 , G01Q30/16 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871
摘要： An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
摘要翻译： 扫描隧道显微镜（STM）反应器的一个实施例包括压力容器，STM组件和三个弹簧耦合物体。 压力容器包括可密封的端口，内部和外部。 STM系统的实施例包括真空室，STM反应器和三个弹簧。 三个弹簧将STM反应器耦合到真空室，并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置，耦合到粗位移布置的压电精细位移扫描管和接收器。 压电精细位移扫描管耦合到粗排位置。 接收器耦合到压电扫描管并且可操作以接收尖端保持器，并且尖端保持器可操作以接收尖端。
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3.发明授权Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication 失效微型脉冲真空电弧等离子体枪和薄膜制造装置
公开(公告)号：US5841236A
公开(公告)日：1998-11-24
申请号：US326667
申请日：1994-09-14
CPC分类号： C23C14/325 , H05H1/44 , H05H1/48
摘要： A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.
摘要翻译： 描述了一种用于制造薄膜的装置中的微型（横截面尺寸）蒸气真空电弧等离子体枪。 任何导电材料可以在几乎任何基底上作为膜分层。 因为整个设备可以容易地容纳在小的真空室中，所以可以施加多个不同的层，而没有额外的污染的风险。 本发明在半导体制造中具有特殊应用。
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公开(公告)号：US10177271B2
公开(公告)日：2019-01-08
申请号：US15359882
申请日：2016-11-23
IPC分类号： H01L31/09 , H01L31/18 , H01L31/0296 , H01L31/0368 , H01L31/113
摘要： This disclosure provides systems, methods, and apparatus related to photodetectors. In one aspect, a photodetector device comprises a substrate, a polycrystalline layer disposed on the substrate, and a first electrode and a second electrode disposed on the polycrystalline layer. The polycrystalline layer comprises nanograins with grain boundaries between the nanograins. The nanograins comprise a semiconductor material. A doping element comprising a halogen is segregated at the grain boundaries. A length of the polycrystalline layer is between and separating the first electrode and the second electrode.
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公开(公告)号：US20170148938A1
公开(公告)日：2017-05-25
申请号：US15359882
申请日：2016-11-23
IPC分类号： H01L31/0392 , H01L31/0304 , H01L31/09 , H01L31/18 , H01L31/113 , H01L31/0296 , H01L31/0368
CPC分类号： H01L31/1872 , H01L31/02963 , H01L31/0368 , H01L31/09 , H01L31/1136 , H01L31/1836 , H01L31/1892 , Y02E10/50 , Y02P70/521
摘要： This disclosure provides systems, methods, and apparatus related to photodetectors. In one aspect, a photodetector device comprises a substrate, a polycrystalline layer disposed on the substrate, and a first electrode and a second electrode disposed on the polycrystalline layer. The polycrystalline layer comprises nanograins with grain boundaries between the nanograins. The nanograins comprise a semiconductor material. A doping element comprising a halogen is segregated at the grain boundaries. A length of the polycrystalline layer is between and separating the first electrode and the second electrode.
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