公开(公告)号：US11152760B2

公开(公告)日：2021-10-19

申请号：US16469484

申请日：2017-12-05

申请人： Forschungsverbund Berlin e.V.

发明人： Oliver Brandt ,  Lutz Geelhaar ,  Ivano Giuntoni

IPC分类号： H01S5/0625 ,  H01S5/12 ,  H01S5/187 ,  H01S5/042 ,  H01S5/34 ,  H01S5/11 ,  H01S5/02 ,  H01S5/04 ,  H01S5/10

摘要： A light emitter device (100) comprises a substrate (10) and a photonic crystal (20), which is arranged on the substrate (10) and comprises pillar- and/or wall-shaped semiconductor elements (21), which are arranged periodically standing out from the substrate (10), wherein the photonic crystal (20) forms a resonator, in which the semiconductor elements (21) are arranged in a first resonator section (22) with a first period (d1), in a second resonator section (23) with a second period (d2) and in a third resonator section (24) with a third period (d3), wherein on the substrate (10) the second resonator section (23) and the third resonator section (24) are arranged on two mutually opposing sides of the first resonator section (22) and the second period (d2) and the third period (d3) differ from the first period (d1), the first resonator section (22) forms a light-emitting medium and the third resonator section (24) forms a coupling-out region, through which a part of the light field in the first resonator section (22) can be coupled out of the resonator in a light outcoupling direction parallel to a substrate surface (11) of the substrate (10). Methods for operating and producing the light emitter device (100) are also described.

公开(公告)号：US09184235B2

公开(公告)日：2015-11-10

申请号：US14357583

申请日：2012-11-09

申请人： Forschungsverbund Berlin e.V.

发明人： Oliver Brandt ,  Lutz Geelhaar ,  Vladimir Kaganer ,  Martin Woelz

IPC分类号： H01L21/00 ,  H01L29/06 ,  H01L27/15 ,  H01L31/109 ,  H01L29/12 ,  H01L33/18 ,  H01L29/04 ,  H01L29/16 ,  H01L29/20 ,  H01L31/0352 ,  H01L33/06

CPC分类号： H01L29/122 ,  H01L29/04 ,  H01L29/16 ,  H01L29/20 ,  H01L29/2003 ,  H01L31/035209 ,  H01L33/06 ,  H01L33/18 ,  H01L2924/0002 ,  H01L2924/00

摘要： Described is a method for producing a semiconductor device (100), in which at least one column-shaped or wall-shaped semiconductor device (10, 20) extending in a main direction (z) is formed on a substrate (30), wherein at least two sections (11, 13, 21, 23) of a first crystal type and one section (12, 22) of a second crystal type therebetween are formed in an active region (40), each section with a respective predetermined height (h1, h2), wherein the first and second crystal types have different lattice constants and each of the sections of the first crystal type has a lattice strain which depends on the lattice constants in the section of the second crystal type. According to the invention, at least a height (h2) of the section (12, 22) of the second crystal type and a lateral thickness (D) of the active region (40) is formed perpendicular to the main direction, in such a manner that the lattice strain in one of the sections (11) of the first crystal type also depends on the lattice constants in the other section (13) of the first crystal type. A semiconductor device (100) is also described, having at least one column-shaped or wall-shaped semiconductor element (10, 20) on a substrate (30), which can be produced in particular by means of the stated method.

摘要翻译： 描述了一种半导体器件（100）的制造方法，其中在基板（30）上形成有沿主方向（z）延伸的至少一个柱状或壁状半导体器件（10,20），其中 在有源区域（40）中形成有第一晶体类型的至少两个部分（11,13,21,23）和第二晶体类型的一个部分（12,22），每个部分具有相应的预定高度 h1，h2），其中第一和第二晶体类型具有不同的晶格常数，并且第一晶体类型的每个部分具有取决于第二晶体类型的截面中的晶格常数的晶格应变。 根据本发明，垂直于主方向形成第二晶体类型的部分（12,22）和有源区（40）的横向厚度（D）的至少高度（h2） 第一晶体类型的部分（11）之一的晶格应变也取决于第一晶体类型的另一部分（13）中的晶格常数。 还描述了一种半导体器件（100），其在衬底（30）上具有至少一个柱状或壁状半导体元件（10,20），其特别可以通过所述方法制造。

公开(公告)号：US20140312301A1

公开(公告)日：2014-10-23

申请号：US14357583

申请日：2012-11-09

申请人： Forschungsverbund Berlin e.V.

发明人： Oliver Brandt ,  Lutz Geelhaar ,  Vladimir Kaganer ,  Martin Woelz

IPC分类号： H01L29/12 ,  H01L31/0352 ,  H01L29/16 ,  H01L33/06 ,  H01L29/04 ,  H01L29/20

CPC分类号： H01L29/122 ,  H01L29/04 ,  H01L29/16 ,  H01L29/20 ,  H01L29/2003 ,  H01L31/035209 ,  H01L33/06 ,  H01L33/18 ,  H01L2924/0002 ,  H01L2924/00

摘要： Described is a method for producing a semiconductor device (100), in which at least one column-shaped or wall-shaped semiconductor device (10, 20) extending in a main direction (z) is formed on a substrate (30), wherein at least two sections (11, 13, 21, 23) of a first crystal type and one section (12, 22) of a second crystal type therebetween are formed in an active region (40), each section with a respective predetermined height (h1, h2), wherein the first and second crystal types have different lattice constants and each of the sections of the first crystal type has a lattice strain which depends on the lattice constants in the section of the second crystal type. According to the invention, at least a height (h2) of the section (12, 22) of the second crystal type and a lateral thickness (D) of the active region (40) is formed perpendicular to the main direction, in such a manner that the lattice strain in one of the sections (11) of the first crystal type also depends on the lattice constants in the other section (13) of the first crystal type. A semiconductor device (100) is also described, having at least one column-shaped or wall-shaped semiconductor element (10, 20) on a substrate (30), which can be produced in particular by means of the stated method.

摘要翻译： 描述了一种半导体器件（100）的制造方法，其中在基板（30）上形成有沿主方向（z）延伸的至少一个柱状或壁状半导体器件（10,20），其中 在有源区域（40）中形成有第一晶体类型的至少两个部分（11,13,21,23）和第二晶体类型的一个部分（12,22），每个部分具有相应的预定高度 h1，h2），其中第一和第二晶体类型具有不同的晶格常数，并且第一晶体类型的每个部分具有取决于第二晶体类型的截面中的晶格常数的晶格应变。 根据本发明，垂直于主方向形成第二晶体类型的部分（12,22）和有源区（40）的横向厚度（D）的至少高度（h2） 第一晶体类型的部分（11）之一的晶格应变也取决于第一晶体类型的另一部分（13）中的晶格常数。 还描述了一种半导体器件（100），其在衬底（30）上具有至少一个柱状或壁状半导体元件（10,20），其特别可以通过所述方法制造。

公开(公告)号：US11955773B2

公开(公告)日：2024-04-09

申请号：US16467719

申请日：2017-12-13

申请人： Forschungsverbund Berlin e.V.

发明人： Ivano Giuntoni ,  Lutz Geelhaar

IPC分类号： H01S5/11 ,  H01S5/02 ,  H01S5/04 ,  H01S5/10 ,  H01S5/125 ,  H01S5/34 ,  H01S5/343

CPC分类号： H01S5/11 ,  H01S5/021 ,  H01S5/041 ,  H01S5/1021 ,  H01S5/1028 ,  H01S5/1042 ,  H01S5/1071 ,  H01S5/125 ,  H01S5/341 ,  H01S5/3412 ,  H01S5/343 ,  H01S5/0208 ,  H01S5/101 ,  H01S2304/00

摘要： The invention relates to a laser device (100) comprising a substrate (10), on the surface of which an optical waveguide (11) is arranged, which has an optical resonator (12, 13) with such a resonator length that at least one resonator mode forms a stationary wave in the resonator (12, 13), and an amplification medium that is arranged on a surface of the optical waveguide (11), wherein the amplification medium comprises a photonic crystal (20) having a plurality of column- and/or wall-shaped semiconductor elements (21) which are arranged periodically on the surface of the optical waveguide (11) while protruding from the optical waveguide (11), and wherein the photonic crystal (20) is designed to optically interact with the at least one resonator mode of the optical resonator (12, 13) and to amplify light having a wavelength of the at least one resonator mode of the optical resonator (12, 13). The invention also relates to methods for the operation and production of the laser device.