利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

75 条记录 (耗时 0.025 秒)

    MAGNETIC FIELD SENSOR AND METHOD FOR PRODUCING A MAGNETIC FIELD SENSOR
    1.
    发明申请
    MAGNETIC FIELD SENSOR AND METHOD FOR PRODUCING A MAGNETIC FIELD SENSOR 有权
    磁场传感器及其生产磁场传感器的方法

    公开(公告)号：US20120126799A1

    公开(公告)日：2012-05-24

    申请号：US13321759

    申请日：2010-07-26

    申请人： Frank Schatz ,  Tino Fuchs ,  Ando Feyh

    发明人： Frank Schatz ,  Tino Fuchs ,  Ando Feyh

    IPC分类号： G01N27/72 ,  H01F41/00

    CPC分类号： G01R33/04 ,  H01F27/2804 ,  Y10T29/49073

    摘要： A magnetometer is described, having a substrate and a magnetic core, the substrate having an excitation coil for generating a magnetic flux in the magnetic core; and the excitation coil having a coil cross section, which is aligned generally perpendicular to a main plane of extension of the substrate. The magnetic core is situated outside the coil cross section.

    摘要翻译： 描述了具有基板和磁芯的磁力计，所述基板具有用于在磁芯中产生磁通的励磁线圈; 并且所述激励线圈具有线圈横截面，所述线圈横截面大致垂直于所述衬底的主平面延伸。 磁芯位于线圈横截面外。

    Magnetic field sensor and method for producing a magnetic field sensor
    2.
    发明授权
    Magnetic field sensor and method for producing a magnetic field sensor 有权
    磁场传感器及磁场传感器的制造方法

    公开(公告)号：US09030198B2

    公开(公告)日：2015-05-12

    申请号：US13321759

    申请日：2010-07-26

    申请人： Frank Schatz ,  Tino Fuchs ,  Ando Feyh

    发明人： Frank Schatz ,  Tino Fuchs ,  Ando Feyh

    IPC分类号： G01N27/72 ,  G01R33/04 ,  H01F27/28

    CPC分类号： G01R33/04 ,  H01F27/2804 ,  Y10T29/49073

    摘要： A magnetometer is described, having a substrate and a magnetic core, the substrate having an excitation coil for generating a magnetic flux in the magnetic core; and the excitation coil having a coil cross section, which is aligned generally perpendicular to a main plane of extension of the substrate. The magnetic core is situated outside the coil cross section.

    摘要翻译： 描述了具有基板和磁芯的磁力计，所述基板具有用于在磁芯中产生磁通的励磁线圈; 并且所述激励线圈具有线圈横截面，所述线圈横截面大致垂直于所述衬底的主平面延伸。 磁芯位于线圈横截面外。

    MEMS with single use valve and method of operation
    8.
    发明授权
    MEMS with single use valve and method of operation 有权
    MEMS单用阀和操作方法

    公开(公告)号：US08779533B2

    公开(公告)日：2014-07-15

    申请号：US13180954

    申请日：2011-07-12

    申请人： Ando Feyh ,  Po-Jui Chen

    发明人： Ando Feyh ,  Po-Jui Chen

    IPC分类号： H01L29/84

    CPC分类号： F16K99/003 ,  F16K99/0044

    摘要： In one embodiment, a method of opening a passageway to a cavity includes providing a donor portion, forming a heating element adjacent to the donor portion, forming a first sacrificial slab abutting the donor portion, wherein the donor portion and the sacrificial slab are a shrinkable pair, forming a first cavity, a portion of the first cavity bounded by the first sacrificial slab, generating heat with the heating element, forming a first reduced volume slab from the first sacrificial slab using the generated heat and the donor portion, and forming a passageway to the first cavity by forming the first reduced volume slab.

    摘要翻译： 在一个实施例中，将通道打开到空腔的方法包括提供供体部分，形成邻近供体部分的加热元件，形成邻接供体部分的第一牺牲板，其中供体部分和牺牲板是可收缩的 形成第一空腔，由第一牺牲板限定的第一空腔的一部分，用加热元件产生热量，使用产生的热量和供体部分从第一牺牲板形成第一减小体积的板坯，并形成 通过形成第一减小体积的板坯到第一空腔的通道。

    Sensor and method for its production
    9.
    发明授权
    Sensor and method for its production 有权
    传感器及其生产方法

    公开(公告)号：US08749013B2

    公开(公告)日：2014-06-10

    申请号：US12302677

    申请日：2007-04-23

    申请人： Hubert Benzel ,  Simon Armbruster ,  Arnim Hoechst ,  Christoph Schelling ,  Ando Feyh

    发明人： Hubert Benzel ,  Simon Armbruster ,  Arnim Hoechst ,  Christoph Schelling ,  Ando Feyh

    IPC分类号： H01L31/058

    CPC分类号： B81B3/0081 ,  B81B2201/0278 ,  B81B2203/0109 ,  B81B2207/015 ,  B81C2201/0109 ,  G01J5/06 ,  G01J5/20

    摘要： A sensor, in particular for the spatially resolved detection, includes a substrate, at least one micropatterned sensor element having an electric characteristic whose value varies as a function of the temperature, and at least one diaphragm above a cavity, the sensor element being disposed on the underside of the at least one diaphragm, and the sensor element being contacted via connecting lines, which extend within, on top of or underneath the diaphragm. In particular, a plurality of sensor elements may be formed as diode pixels within a monocrystalline layer formed by epitaxy. Suspension springs, which accommodate the individual sensor elements in elastic and insulating fashion, may be formed within the diaphragm.

    摘要翻译： 特别是用于空间分辨检测的传感器包括基板，至少一个微图案化的传感器元件，其具有值随温度变化的电特性，以及在空腔上方的至少一个隔膜，传感器元件设置在 所述至少一个隔膜的下侧，并且所述传感器元件经由连接线接触，所述连接线在隔膜的顶部或下方延伸。 特别地，多个传感器元件可以形成为通过外延形成的单晶层内的二极管像素。 可以在隔膜内形成以弹性和绝缘方式容纳各个传感器元件的悬挂弹簧。

    Thermally decoupled micro-structured reference element for sensors
    10.
    发明授权
    Thermally decoupled micro-structured reference element for sensors 有权
    用于传感器的热分解微结构参考元件

    公开(公告)号：US08556504B2

    公开(公告)日：2013-10-15

    申请号：US13061670

    申请日：2009-07-02

    申请人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

    发明人： Ingo Herrmann ,  Daniel Herrmann ,  Frank Freund ,  Ando Feyh ,  Martin Eckardt

    IPC分类号： G01K7/00 ,  B32B3/00

    CPC分类号： H01L27/14669 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/06 ,  G01J5/20 ,  H01L31/09

    摘要： A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.

    摘要翻译： 一种用于具有基底和电介质膜的传感器中的微结构参考元件。 参考元件具有基于温度改变其值的电性质。 参考元件相对于衬底布置，使得参考元件（i）与衬底电绝缘，和（ii）热耦合到衬底。 参考元件布置在电介质膜的下侧。 衬底的参考元件和侧壁在它们之间限定周向的洞穴，它们也被布置在它们之间的电介质膜界定。 电介质膜与基板连接。 由电介质膜覆盖的参考元件的表面积大于或等于可能可覆盖表面积的10％且小于或等于100％。 由电介质膜覆盖的洞穴的表面大于或等于可能可覆盖表面的50％且小于或等于100％。 面向电介质膜的参考元件的边缘具有大于或等于其与电介质膜接触的程度的50％且小于或等于100％。 面向电介质膜的洞穴的侧壁的截面具有大于或等于电介质膜接触的可能尺寸的50％且小于或等于100％。