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公开(公告)号：US6019000A
公开(公告)日：2000-02-01
申请号：US975531
申请日：1997-11-20
CPC分类号： G01H5/00 , G01N29/075 , G01N29/326 , G01N29/348 , G01N2291/012 , G01N2291/0231 , G01N2291/02854 , G01N2291/02881 , G01N2291/0421 , G01N2291/0422
摘要： A system is disclosed that employs ultrasonic waves to perform in-situ measurements to determine the properties of films deposited on substrates in the course of various semiconductor or processing steps. In one embodiment a single transducer excites incident acoustic waves at multiple frequencies that reflect from the films. The reflected waves are received by the same transducer. An analysis system determines the phase shift of the received reflected waves and, based on the phase shift, determines the film properties. Other embodiments employ distinct source and receiving transducers. Embodiments are also disclosed that compensate the measured phase shift for temperature variations in the substrate. In one such system, temperature compensation is performed based on the processing of phase measurements made at multiple frequencies or incidence angles or with multiple ultrasonic modes. The disclosed techniques are equally applicable to determining the degree of erosion of chamber members.
摘要翻译： 公开了一种采用超声波进行原位测量以确定在各种半导体或处理步骤过程中沉积在衬底上的膜的性质的系统。 在一个实施例中，单个换能器以从膜反射的多个频率激发入射的声波。 反射波由相同的传感器接收。 分析系统确定接收的反射波的相移，并且基于相移来确定胶片特性。 其他实施例采用不同的源和接收换能器。 还公开了补偿测量的衬底温度变化的相移的实施例。 在一个这样的系统中，基于在多个频率或入射角或多个超声波模式下进行的相位测量的处理来执行温度补偿。 所公开的技术同样适用于确定室构件的侵蚀程度。
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公开(公告)号：US5996415A
公开(公告)日：1999-12-07
申请号：US847144
申请日：1997-04-30
申请人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
发明人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
CPC分类号： G01N29/46 , G01N29/041 , G01N29/07 , G01N29/449 , G01N2291/02854 , G01N2291/02881 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/102 , G01N2291/2698
摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.
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3.发明授权Apparatus and method for characterizing semiconductor wafers during processing 有权用于在加工期间表征半导体晶片的装置和方法
公开(公告)号：US6112595A
公开(公告)日：2000-09-05
申请号：US420217
申请日：1999-10-18
申请人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
发明人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
CPC分类号： G01N29/46 , G01N29/041 , G01N29/07 , G01N29/449 , G01N2291/02854 , G01N2291/02881 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/102 , G01N2291/2698
摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.
摘要翻译： 公开了用于表征可支持声波的半导体晶片或其它测试对象的装置和方法。 源和接收换能器被配置成各种布置以分别激发和检测要表征的晶片中的声波（例如，兰姆波）。 表示检测到的波的信号被数字处理并用于计算与晶片中的波速相关的测量集。 提供了表征灵敏度，其描述不同的感兴趣的晶片特性随着声波传播的变化而变化。 使用在所有晶片特性已知的建立时间计算的表征灵敏度和测量集，以及当至少一个特性未知时的一个或多个处理时间，可以确定设置和处理时间之间的晶片特性的扰动。 通过晶片校准程序改进表征精度，其中针对每个被表征的晶片确定对已知条件的测量偏移。 公开了一种用于校正由于相对于晶片的优选结晶轴的波传播方向引起的声波速度的各向异性的装置和技术。 还描述了一种用于使用单个换能器来测量晶片温度的装置和技术，其温度与晶片的温度和可选的谐振器结构相关。 对于在夹持晶片时发生的表征步骤，描述了一种卡盘结构，其减小卡盘干扰晶片中的波的可能性。
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公开(公告)号：US08451693B2
公开(公告)日：2013-05-28
申请号：US12806763
申请日：2010-08-20
CPC分类号： B06B1/0292
摘要： A compression post capacitive micromachined ultrasonic transducer (CMUT) is provided. The compression post CMUT includes a first electrode, a top conductive layer having a pattern of post holes, a moveable mass that includes the first electrode. The compression post CMUT further includes an operating gap disposed between the top surface of the top conductive layer and a bottom surface of the moveable mass, a pattern of compression posts, where a proximal end the compression post is connected perpendicularly to a bottom surface of the moveable mass, where the pattern of compression posts span through the pattern of post holes. The top conductive layer includes the second electrode that is electronically insulated from the first electrode, where the pattern of compression posts compress to provide a restoring force in a direction that is normal to the bottom surface of the moveable mass.
摘要翻译： 提供压缩后电容式微机械超声波换能器（CMUT）。 压缩柱CMUT包括第一电极，具有柱孔图案的顶部导电层，包括第一电极的可移动质量块。 压缩柱CMUT还包括设置在顶部导电层的顶表面和可移动块的底表面之间的操作间隙，压缩柱的图案，其中压缩柱的近端垂直于底部表面连接 可移动质量块，其中压缩柱的图案跨过柱孔的图案。 顶部导电层包括与第一电极电子绝缘的第二电极，其中压缩柱的图案被压缩以在与可移动质量块的底表面垂直的方向上提供恢复力。
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公开(公告)号：US20130023752A1
公开(公告)日：2013-01-24
申请号：US13554985
申请日：2012-07-20
IPC分类号： A61B6/00
CPC分类号： A61B5/0095 , A61B5/0507
摘要： Surface selective photoacoustic (PA) medical imaging is introduced. Surface selective PA imaging is responsive to surface features and does not image sub-surface features, in contrast to conventional PA imaging. The surface PA signal can be considerably larger than the bulk PA signal, for an air-coupled (or gas-coupled) acoustic transducer. Distinguishing these two signals based on time of arrival at the transducer can further distinguish the two signals. This approach provides numerous advantages.Non-contact imaging simplifies and expedites imaging, and can serve as a replacement for visual inspection by physicians. Applications include skin screening and endoscopy.
摘要翻译： 介绍了表面选择性光声（PA）医学成像。 与传统的PA成像相比，表面选择性PA成像对表面特征有反应，并且不影像亚表面特征。 对于空气耦合（或气体耦合）的声换能器，表面PA信号可以大大地大于体积PA信号。 基于到达换能器的时间区分这两个信号可以进一步区分两个信号。 这种方法提供了许多优点。 非接触式成像简化并加速成像，可作为医生进行视觉检查的替代品。 应用包括皮肤筛查和内窥镜检查。
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公开(公告)号：US07972271B2
公开(公告)日：2011-07-05
申请号：US11709347
申请日：2007-02-21
IPC分类号： A61B8/14
CPC分类号： A61B8/14 , G01S7/52046 , G01S15/8915 , G01S15/8927 , G01S15/8993
摘要： An invention for coherent array image formation and restoration is taught. The invention is applicable for both 2D and 3D imaging using either 1D or 2D arrays, respectively. A transducer array is subdivided into subarrays, each subarray having a number of adjacent array elements. All elements of each subarray transmit and receive in parallel. The signals received from each subarray are delayed and summed to form scan lines, or beams. The low-beam-rate beams formed from each subarray are upsampled and interpolated prior to forming high-beam-rate images. Depending on the subarray geometry, a subarray-dependent restoration filter is also applied to the subarray beams. The restored beams from each subarray are combined to form the final high-beam-rate image. The invention significantly reduces the front-end hardware complexity compared to conventional methods such as full phased array imaging with comparable image quality.
摘要翻译： 教导了相干阵列图像形成和恢复的发明。 本发明分别适用于使用1D或2D阵列的2D和3D成像。 换能器阵列被细分为子阵列，每个子阵列具有多个相邻的阵列元件。 每个子阵列的所有元素并行传输和接收。 从每个子阵列接收的信号被延迟并相加以形成扫描线或光束。 在形成高光束速率图像之前，从每个子阵列形成的低光束速率光束被上采样和内插。 根据子阵列几何，子阵列依赖的恢复滤波器也被应用于子阵列波束。 来自每个子阵列的恢复的波束被组合以形成最终的高光束速率图像。 与常规方法相比，本发明显着降低了前端硬件复杂性，例如具有可比较图像质量的全相控阵列成像。
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7.发明申请APPARATUS AND METHOD FOR NON-INVASIVE AND MINIMALLY-INVASIVE SENSING OF PARAMETERS RELATING TO BLOOD 审中-公开用于非侵入性和微量入侵感染参数相关血液的装置和方法公开(公告)号：US20100152591A1
公开(公告)日：2010-06-17
申请号：US12618614
申请日：2009-11-13
IPC分类号： A61B5/02
CPC分类号： A61B5/14552 , A61B5/0051 , A61B5/029 , A61B5/14551 , A61B5/1459 , A61B8/00 , A61B8/12
摘要： A system and method for monitoring one or more parameters relating to blood, such as cardiac output, of a patient is provided. The system preferably includes an acoustic energy transducer unit configured and positioned to transmit acoustic energy into a target structure, preferably a blood vessel, within the patient so as to induce a measurable change, preferably a change in blood volume, within the target structure. The transducer unit can be an ultrasonic array, annular array, or groups thereof, or a single element transducer. The unit can also be a vibrator or acoustic loudspeaker. An optical transmitter transmits light into the target structure, and an optical receiver senses light scattered from within the target structure. The blood parameter can then be estimated from the sensed scattered radiation. Relative blood oxygen saturation in the blood vessel can be estimated by transmitting two wavelengths to measure oxy-hemoglobin and deoxy-hemoglobin.
摘要翻译： 提供了一种用于监测与患者血液（例如心输出量）相关的一个或多个参数的系统和方法。 该系统优选地包括声能换能器单元，其被配置和定位成将声能传递到患者体内的目标结构，优选血管，以便在目标结构内引起可测量的变化，优选血容量的变化。 换能器单元可以是超声波阵列，环形阵列或其组，或单个元件换能器。 该单元也可以是振动器或声音扬声器。 光学发射器将光发射到目标结构中，并且光学接收器感测从目标结构内散射的光。 然后可以从感测的散射辐射估计血液参数。 可以通过传输两个波长来估计血管中的相对血氧饱和度来测量氧血红蛋白和脱氧血红蛋白。
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公开(公告)号：US20090301550A1
公开(公告)日：2009-12-10
申请号：US12329325
申请日：2008-12-05
CPC分类号： H01L31/0392 , B41J2/04505 , B41J2/04528 , B41J2/04553 , B41J2/04575 , B82Y20/00 , H01L31/035236 , H01L31/03923 , H01L31/03925 , Y02E10/541 , Y02P70/521
摘要： Photovoltaic material is printed on a substrate using acoustic printing, to produce solar cells. Acoustic printheads are configured to eject droplets of photovoltaic material to positions on the substrate, responsive to focused acoustic energy provided by acoustic ejectors in the acoustic printheads, to print a film of the photovoltaic material. A positioning system is configured to position the acoustic printheads with respect to the substrate. A feedback system controls the acoustic ejection of the droplets of photovoltaic material by the acoustic printheads or the positioning of the acoustic printheads with respect to the substrate by the positioning system, based on feedback data indicative of characteristics of the printed film. The acoustic printheads are designed optimally for printing of photovoltaic material for solar cells in single scans in only one direction of the substrate. Solar cells can be manufactured at low cost and with high throughput using acoustic printing.
摘要翻译： 使用声学印刷将光伏材料印刷在基板上，以产生太阳能电池。 声学打印头被配置为响应于在声学打印头中由声学喷射器提供的聚焦声能来将光伏材料的液滴喷射到基板上的位置，以印刷光伏材料的膜。 定位系统被配置为相对于基底定位声学打印头。 反馈系统基于指示印刷膜特性的反馈数据，通过声学打印头控制光伏材料的液滴的声学喷射或通过定位系统相对于基板的定位。 声学打印头被设计成最佳地用于在仅在基板的一个方向上的单次扫描中印刷用于太阳能电池的光伏材料。 太阳能电池可以低成本制造，并且使用声学印刷具有高产量。
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9.发明授权Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections 有权具有通过晶圆通孔连接的电容微加工超声换能器元件阵列公开(公告)号：US06430109B1
公开(公告)日：2002-08-06
申请号：US09667203
申请日：2000-09-21
IPC分类号： H04R1900
CPC分类号： H01L21/76898 , B06B1/0292 , H01L23/481 , H01L2224/05568 , H01L2224/05573 , H01L2224/131 , H01L2224/16145 , H01L2924/00014 , H01L2924/014 , H01L2224/05599
摘要： There is described a cMUT array with transducer elements which include a plurality of cells with membranes formed on one surface of a wafer. Voltages applied between said spaced electrodes drive said membranes. The voltages applied to said electrodes are applied from the opposite surface of the wafer through the wafer and through vias formed in the wafer.
摘要翻译： 描述了具有换能器元件的cMUT阵列，其包括形成在晶片的一个表面上的膜的多个单元。 施加在所述间隔开的电极之间的电压驱动所述膜。 施加到所述电极的电压从晶片的相对表面通过晶片和通过形成在晶片中的通孔施加。
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公开(公告)号：US5629724A
公开(公告)日：1997-05-13
申请号：US890995
申请日：1992-05-29
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： Techniques for obtaining an ejection rate independent, spatial relationship between an acoustic focal area and the free surface of a liquid. Variations in the spatial relationship are reduced or eliminated by applying substantially the same acoustic energy to the liquid's free surface during periods when droplets are not ejected as when they are, but at power levels insufficient to eject a droplet. During ejection periods in which a droplet is not ejected, the acoustic energy is applied at a lower level, but for a longer time. Because it is more convenient to measure and control, the transducer drive voltage is used to control the acoustic energy applied to the liquid's free surface.
摘要翻译： 用于获得喷射速率独立的声学焦点区域和液体的自由表面之间的空间关系的技术。 在液滴不喷射的时段期间，通过对液体的自由表面施加基本上相同的声能，而在功率水平不足以喷射液滴的时期，空间关系的变化被减少或消除。 在不喷射液滴的喷射期间，声能被施加在较低的水平上，但持续较长的时间。 因为测量和控制更方便，因此传感器驱动电压用于控制施加到液体自由表面的声能。
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