公开(公告)号：US10916910B2

公开(公告)日：2021-02-09

申请号：US16571390

申请日：2019-09-16

Applicant: Gigaphoton Inc.

Inventor： Shinichi Matsumoto ,  Miwa Igarashi

IPC: H01S3/13 ,  H01S3/137 ,  H01S3/08 ,  H01S3/081 ,  H01S3/225 ,  H01S3/1055

Abstract: A line narrowing module includes a prism that refracts laser light in a first plane, a grating that disperses the laser light in the first plane, first to fourth elements, and a rotation mechanism and narrows the linewidth of the laser light. The second element is supported between the first and fourth elements by the first element. The rotation mechanism rotates the second element relative to the first element around an axis intersecting the first plane. The prism is located between the second and fourth elements and so supported by the second element that the rotation mechanism rotates the prism and the second element. The third element has elasticity and is compressed and located between the prism and the fourth element. The fourth element receives reaction force from the compressed third element. The second element is mechanically independent of the fourth element in the rotational direction of the rotation mechanism.

公开(公告)号：US09894743B2

公开(公告)日：2018-02-13

申请号：US14984458

申请日：2015-12-30

Applicant: GIGAPHOTON INC.

Inventor： Yukio Watanabe ,  Miwa Igarashi ,  Masato Moriya ,  Hiroaki Nakarai

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G03F7/70033 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.

公开(公告)号：US09179534B2

公开(公告)日：2015-11-03

申请号：US14158710

申请日：2014-01-17

Applicant: GIGAPHOTON INC.

Inventor： Yukio Watanabe ,  Osamu Wakabayashi ,  Miwa Igarashi

IPC: H05G2/00 ,  G03F7/20 ,  G21K1/04

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/70916 ,  G21K1/04 ,  H05G2/003 ,  H05G2/005

Abstract: An extreme ultraviolet light source apparatus for supplying extreme ultraviolet light to a processing unit for performing processing by using the extreme ultraviolet light. The extreme ultraviolet light source apparatus includes: a chamber in which the extreme ultraviolet light to be supplied to the processing unit is generated; a collector mirror for collecting the extreme ultraviolet light generated in the chamber to output the extreme ultraviolet light to the processing unit; and an optical path connection module for defining a route of the extreme ultraviolet light between the chamber and the processing unit and isolating the route of the extreme ultraviolet light from outside.

Abstract translation: 一种用于向处理单元提供极紫外光的极紫外光源装置，用于通过使用极紫外光进行处理。 所述极紫外光源装置具有：向所述处理单元供给所述极紫外光的室， 收集器反射镜，用于收集在室中产生的极紫外光，以将极紫外光输出到处理单元; 以及光路连接模块，其用于限定所述室与所述处理单元之间的所述极紫外光的路线，并将所述极紫外光的路径与外部隔离。

公开(公告)号：US09882334B2

公开(公告)日：2018-01-30

申请号：US15201769

申请日：2016-07-05

Applicant: Gigaphoton Inc.

Inventor： Toru Suzuki ,  Yukio Watanabe ,  Miwa Igarashi ,  Osamu Wakabayashi

IPC: H01S3/00 ,  G02B7/182 ,  H05G2/00 ,  H01S3/10 ,  G02B7/18 ,  G02B27/14 ,  G02B26/06 ,  H01S3/223 ,  H01S3/23

CPC classification number: H01S3/0071 ,  G02B7/1815 ,  G02B7/182 ,  G02B26/06 ,  G02B27/144 ,  H01S3/005 ,  H01S3/1003 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/003 ,  H05G2/008

Abstract: A mirror device may include: an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough; and a holder in surface contact with the optical element to hold the optical element. A flatness of a contact surface of the holder in contact with the optical element may be equal to or smaller than a flatness of the optical element.

公开(公告)号：US11978997B2

公开(公告)日：2024-05-07

申请号：US17398084

申请日：2021-08-10

Applicant: Gigaphoton Inc.

Inventor： Hirotaka Miyamoto ,  Takuma Yamanaka ,  Miwa Igarashi

IPC: H01S3/13 ,  G03F7/00 ,  H01S3/038 ,  H01S3/08 ,  H01S3/137

CPC classification number: H01S3/1305 ,  G03F7/70025 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/137

Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.

公开(公告)号：US09198273B2

公开(公告)日：2015-11-24

申请号：US14339172

申请日：2014-07-23

Applicant: GIGAPHOTON INC.

Inventor： Miwa Igarashi ,  Yukio Watanabe ,  Kouji Ashikawa ,  Norio Iwai ,  Osamu Wakabayashi

IPC: G21K5/04 ,  H05G2/00 ,  G21K5/10

CPC classification number: H05G2/008 ,  G21K5/10 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.

Abstract translation: 用于产生极紫外光的装置可以包括参考构件，固定到参考构件的腔室，所述腔室包括至少一个窗口，激光束引入光学系统，其配置成通过至少一个外部供应的激光束 一个窗口，以及配置成将激光束引入光学系统定位到参考构件的定位机构。

公开(公告)号：US11411364B2

公开(公告)日：2022-08-09

申请号：US17372106

申请日：2021-07-09

Applicant: Gigaphoton Inc.

Inventor： Miwa Igarashi ,  Shinichi Matsumoto

IPC: H01S3/137 ,  G03F7/20 ,  H01S3/08 ,  G02B26/08 ,  H01S3/034 ,  H01S3/225

Abstract: A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.