Phase-change memory devices
    1.
    发明授权
    Phase-change memory devices 有权
    相变存储器件

    公开(公告)号:US08872148B2

    公开(公告)日:2014-10-28

    申请号:US13735180

    申请日:2013-01-07

    IPC分类号: H01L27/10 H01L45/00 H01L27/24

    摘要: A phase-change memory device includes a diode, a plug, a doping layer pattern, a phase-change layer pattern and an upper electrode. The diode is disposed on a substrate. The plug is disposed on the diode and has a bottom surface whose area is equal to the area of a top surface of the diode. The plug is formed of metal or a conductive metallic compound. The doping layer pattern is disposed on the plug and has a bottom surface whose area is equal to the area of a top surface of the plug, and includes the same metal or conductive metallic compound as the plug. The phase-change layer pattern is disposed on the doping layer pattern. The upper electrode is disposed on the phase-change layer pattern.

    摘要翻译: 相变存储器件包括二极管,插头,掺杂层图案,相变层图案和上电极。 二极管设置在基板上。 插头设置在二极管上,并具有面积等于二极管顶表面面积的底面。 插头由金属或导电金属化合物形成。 掺杂层图案设置在插塞上,并且具有面积等于插头顶面的面积的底面,并且包括与插头相同的金属或导电金属化合物。 相变层图案设置在掺杂层图案上。 上电极配置在相变层图案上。

    Methods of manufacturing phase-change memory devices
    2.
    发明授权
    Methods of manufacturing phase-change memory devices 有权
    制造相变存储器件的方法

    公开(公告)号:US08551805B2

    公开(公告)日:2013-10-08

    申请号:US13469498

    申请日:2012-05-11

    摘要: A phase-change memory device includes a word line on a substrate and a phase-change memory cell on the word line and comprising a phase-change material pattern. The device also includes a non-uniform conductivity layer pattern comprising a conductive region on the phase-change material pattern and a non-conductive region contiguous therewith. The device further includes a bit line on the conductive region of the non-uniform conductivity layer pattern. In some embodiments, the phase-change memory cell may further include a diode on the word line, a heating electrode on the diode and wherein the phase-change material layer is disposed on the heating electrode. An ohmic contact layer and a contact plug may be disposed between the diode and the heating electrode.

    摘要翻译: 相变存储器件包括衬底上的字线和字线上的相变存储器单元,并且包括相变材料图案。 该装置还包括不均匀的导电层图案,其包括相变材料图案上的导电区域和与其相邻的非导电区域。 该器件还包括位于不均匀导电层图案的导电区上的位线。 在一些实施例中,相变存储单元还可以包括字线上的二极管,二极管上的加热电极,并且其中相变材料层设置在加热电极上。 欧姆接触层和接触插塞可以设置在二极管和加热电极之间。

    METHODS OF MANUFACTURING PHASE-CHANGE MEMORY DEVICES
    3.
    发明申请
    METHODS OF MANUFACTURING PHASE-CHANGE MEMORY DEVICES 有权
    制造相变存储器件的方法

    公开(公告)号:US20120322223A1

    公开(公告)日:2012-12-20

    申请号:US13469498

    申请日:2012-05-11

    IPC分类号: H01L45/00

    摘要: A phase-change memory device includes a word line on a substrate and a phase-change memory cell on the word line and comprising a phase-change material pattern. The device also includes a non-uniform conductivity layer pattern comprising a conductive region on the phase-change material pattern and a non-conductive region contiguous therewith. The device further includes a bit line on the conductive region of the non-uniform conductivity layer pattern. In some embodiments, the phase-change memory cell may further include a diode on the word line, a heating electrode on the diode and wherein the phase-change material layer is disposed on the heating electrode. An ohmic contact layer and a contact plug may be disposed between the diode and the heating electrode.

    摘要翻译: 相变存储器件包括衬底上的字线和字线上的相变存储器单元,并且包括相变材料图案。 该装置还包括不均匀的导电层图案,其包括相变材料图案上的导电区域和与其相邻的非导电区域。 该器件还包括位于不均匀导电层图案的导电区上的位线。 在一些实施例中,相变存储单元还可以包括字线上的二极管,二极管上的加热电极,并且其中相变材料层设置在加热电极上。 欧姆接触层和接触插塞可以设置在二极管和加热电极之间。