-
公开(公告)号：US20230358610A1
公开(公告)日：2023-11-09
申请号：US18223209
申请日：2023-07-18
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Kei TABATA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
CPC分类号： G01J3/26 , G01J3/0297 , G01J3/45 , G02B5/281 , G02B26/001
摘要： A light detection device of the present invention includes: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
-
公开(公告)号：US20200310104A1
公开(公告)日：2020-10-01
申请号：US16765529
申请日：2018-11-09
发明人： Yumi KURAMOTO , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA
IPC分类号： G02B26/00 , H01L31/0203 , H01L31/0216 , H01L27/144 , G01N21/95 , G01N21/45
摘要： A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. In the wafer, a gap is formed between the first mirror portion and the second mirror portion so as to form a plurality of Fabry-Perot interference filter portions. A wafer inspection method according to an embodiment includes a step of performing faulty/non-faulty determination of each of the plurality of Fabry-Perot interference filter portions, and a step of applying ink to at least part of a portion overlapping the gap when viewed in a facing direction on the second mirror layer of the Fabry-Perot interference filter portion determined as faulty.
-
公开(公告)号：US20190179131A1
公开(公告)日：2019-06-13
申请号：US16322161
申请日：2017-07-05
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC分类号： G02B26/00
摘要： A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.
-
公开(公告)号：US20210364681A1
公开(公告)日：2021-11-25
申请号：US16763859
申请日：2018-11-09
发明人： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC分类号： G02B5/28
摘要： A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
-
公开(公告)号：US20190186994A1
公开(公告)日：2019-06-20
申请号：US16322170
申请日：2017-07-05
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
摘要： A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.
-
公开(公告)号：US20180011232A1
公开(公告)日：2018-01-11
申请号：US15633863
申请日：2017-06-27
发明人： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi TERAMACHI
CPC分类号： G02B5/285 , G01J1/0488 , G01J5/023 , G01J5/0235 , G01J5/024 , G01J5/041 , G01J5/045 , G01J5/06 , G01J5/0862 , G02B5/288 , G02B26/001
摘要： A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
-
公开(公告)号：US20160245696A1
公开(公告)日：2016-08-25
申请号：US15031780
申请日：2014-10-31
CPC分类号： G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
摘要： A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.
摘要翻译： 光谱传感器1A包括具有透光区域11的法布里 - 珀罗干涉滤光器10; 光检测器3，其检测透射光透射区域11的光; 在光透射区域11的周围区域中支撑法布里 - 珀罗干涉滤光器10的间隔件4A和4B; 以及将法布里 - 珀罗干涉滤光器10和隔离物4A和4B彼此粘合的芯片接合树脂5。 当在光透射区域11中从透光方向观察时，裸片接合树脂5具有与周围区域的内侧连通的一个开口A2和周围区域的外侧。
-
公开(公告)号：US20220341780A1
公开(公告)日：2022-10-27
申请号：US17634280
申请日：2020-10-06
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Kei TABATA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
摘要： A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
-
公开(公告)号：US20200310105A1
公开(公告)日：2020-10-01
申请号：US16765547
申请日：2018-11-09
发明人： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi KURAMOTO
IPC分类号： G02B26/00
摘要： A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
-
公开(公告)号：US20200056940A1
公开(公告)日：2020-02-20
申请号：US16662448
申请日：2019-10-24
摘要： A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
-
-
-
-
-
-
-
-
-
搜索结果
38 条记录 (耗时 0.017 秒)
