公开(公告)号：US5811754A

公开(公告)日：1998-09-22

申请号：US444871

申请日：1995-05-19

申请人： Hajime Nakatani ,  Atsushi Sugitatsu ,  Masao Izumo ,  Tadao Minagawa ,  Yasushi Minamitani ,  Yoshifumi Matsushita ,  Toshinori Yagi ,  Nobuyuki Zumoto

发明人： Hajime Nakatani ,  Atsushi Sugitatsu ,  Masao Izumo ,  Tadao Minagawa ,  Yasushi Minamitani ,  Yoshifumi Matsushita ,  Toshinori Yagi ,  Nobuyuki Zumoto

IPC分类号： H05K3/00 ,  H05K3/46 ,  B23K26/02

CPC分类号： B23K26/046 ,  B23K26/04 ,  B23K26/043 ,  B23K26/048 ,  B23K26/066 ,  H05K3/0026 ,  H05K2203/056

摘要： An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system (1) for generating a light beam (B) for illuminating a mask (3; 100) having a predetermined pattern, a imaging lens (5) for copying a pattern image of the mask (3; 100) onto a workpiece (7), a mask moving mechanism (4) for moving the mask in a direction perpendicular to an optical axis (L) of the imaging lens (5), a workpiece moving mechanism for moving the workpiece in a direction perpendicular to the optical axis (L) of the imaging lens (5), a imaging magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit (9) which is comprised of an actual imaging magnification arithmetic module (91) for determining an actual imaging magnification value (M') in terms of a ratio between the copied pattern image and a predetermined pattern, a magnification decision module (92) for making decision whether or not a difference between the actual imaging magnification value and a desired imaging magnification value is smaller than a permissible value, an optical-axis displacement control module (93) responsive to indication that the difference exceeds a permissible value (.delta.) to thereby arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual imaging magnification value (M') becomes equal to the desired imaging magnification value (M) for controlling thereby the imaging magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically determined distance, and a displacement control module for controlling the mask moving mechanism and the workpiece moving mechanism.

公开(公告)号：US5305339A

公开(公告)日：1994-04-19

申请号：US793430

申请日：1991-12-17

申请人： Hajime Nakatani ,  Atsushi Sugitatsu ,  Yasushi Minamitani

发明人： Hajime Nakatani ,  Atsushi Sugitatsu ,  Yasushi Minamitani

IPC分类号： H01S3/0971 ,  H01S3/00

CPC分类号： H01S3/0971

摘要： By dissipating a reverse voltage energy occurring on the pulse generation capacitor (4) of a pulse laser apparatus through the diode (11) connected in parallel with this pulse generation capacitor (4), arc or streamer becomes not occurring, and hence the lifetime of the main discharge electrodes become long and a high-repetition rate oscillation becomes possible.

摘要翻译： PCT No.PCT / JP91 / 00152 Sec。 371 1991年12月17日第 102（e）1991年12月17日PCT 1991年2月8日PCT。通过与该脉冲并联连接的二极管（11）消散在脉冲激光装置的脉冲发生电容器（4）上产生的反向电压能量 发电电容器（4）不会发生电弧或流光，因此主放电电极的寿命变长，高重复率振荡成为可能。

公开(公告)号：US5243614A

公开(公告)日：1993-09-07

申请号：US795793

申请日：1991-11-21

申请人： Hitoshi Wakata ,  Atsushi Sugitatsu ,  Hajime Nakatani ,  Yasushi Minamitani

发明人： Hitoshi Wakata ,  Atsushi Sugitatsu ,  Hajime Nakatani ,  Yasushi Minamitani

IPC分类号： G01J1/44 ,  G01J3/26 ,  H01S3/137 ,  H01S3/225

CPC分类号： G01J3/02 ,  G01J3/0237 ,  G01J3/26 ,  H01S3/137 ,  G01J2001/4493 ,  G01J2003/265 ,  H01S3/225

摘要： A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.

摘要翻译： 用于狭窄控制激光带宽的波长监视器/稳定器; 监视器/稳定器使用通过测量由波长控制的窄带宽激光束的波束给出的干涉条纹的直径导出的参数Q，F或G，例如 准分子激光和由参考光给出的那些。 的水银灯。 通过将参数控制在预定范围内来进行控制。 用于检测干涉条纹的图像感测单元被分割成具有可调节距离的多个图像传感器，以通过跳过中间部分来实现更快速的测量。

公开(公告)号：US5708676A

公开(公告)日：1998-01-13

申请号：US543987

申请日：1995-10-17

申请人： Yasushi Minamitani ,  Hajime Nakatani

发明人： Yasushi Minamitani ,  Hajime Nakatani

IPC分类号： B23H1/00 ,  B23H1/02 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225

CPC分类号： H01S3/09713 ,  H01S3/0384 ,  H01S3/225

摘要： A discharge excitation type pulse laser apparatus includes main discharge electrodes and and an auxiliary discharge electrode. In order to make a voltage pulse applied to the auxiliary discharge electrode rise up steeply without incurring any appreciable time lag, a reactor connected in series to a first charging capacitor is constituted by a first saturable reactor 19 with a second saturable reactor being additionally inserted in series to a second charging capacitor. After stray inductance and resistance components of a switch become minimum, inductance of the saturable reactor is first decreased, which is then followed by decreasing of inductance of the first saturable reactor. Degree of steepness of the voltage rise-up for corona and main discharges can set at high values, respectively, whereby preionization is accelerated to allow the main discharge to occur uniformly. The energy injected into the main discharge is increased. Laser output power and oscillation efficiency are enhanced.

摘要翻译： 放电激励型脉冲激光装置包括主放电电极和辅助放电电极。 为了使施加到辅助放电电极的电压脉冲上升而不引起任何明显的时间滞后，与第一充电电容器串联连接的电抗器由第一可饱和电抗器19构成，第一可饱和电抗器19另外插入第二可饱和电抗器 串联到第二个充电电容器。 在开关的杂散电感和电阻分量变得最小之后，可饱和电抗器的电感首先降低，随后降低第一饱和电抗器的电感。 电晕和主放电电压上升的陡度分别可以设定为高值，从而加速前置电位以允许主放电均匀地发生。 注入主放电的能量增加。 激光输出功率和振荡效率得到提高。

公开(公告)号：US5258994A

公开(公告)日：1993-11-02

申请号：US718534

申请日：1991-06-19

申请人： Kenyu Haruta ,  Akihiro Suzuki ,  Akihiko Iwata ,  Yasushi Minamitani ,  Hitoshi Wakata ,  Tomohiro Sasagawa ,  Takashi Kumagai

发明人： Kenyu Haruta ,  Akihiro Suzuki ,  Akihiko Iwata ,  Yasushi Minamitani ,  Hitoshi Wakata ,  Tomohiro Sasagawa ,  Takashi Kumagai

IPC分类号： H01S3/0971 ,  H01S3/097

CPC分类号： H01S3/0971

摘要： A discharge-excited laser apparatus includes a pair of discharge electrodes extending in a direction of an optical axis; a plurality of charging capacitors charged by a power source; a plurality of peaking capacitors arranged in parallel in a longitudinal direction of the discharge electrodes and receiving energy accumulated in the charging capacitors; and a plurality of semiconductor switches arranged with conductive plates in the longitudinal direction of the discharge electrodes and connected in series and in parallel to the peaking capacitors. The construction of the semiconductor switches enables uniform shift of the energy in the charging capacitors to the peaking capacitors and reduction of inductance of a loop for capacity shifting.

摘要翻译： 放电激励激光装置包括沿光轴方向延伸的一对放电电极; 由电源充电的多个充电电容器; 多个峰值电容器，沿着放电电极的纵向方向平行设置，并且接收蓄积在充电电容器中的能量; 以及多个半导体开关，其沿着放电电极的长度方向排列有导电板，并且与峰值电容器串联并联。 半导体开关的结构使得充电电容器中的能量均匀地移动到峰值电容器，并且减小用于容量偏移的回路的电感。

公开(公告)号：US20110240539A1

公开(公告)日：2011-10-06

申请号：US13128976

申请日：2009-09-10

申请人： Taisuke Nose ,  Yosuke Tashima ,  Yasushi Minamitani

发明人： Taisuke Nose ,  Yosuke Tashima ,  Yasushi Minamitani

IPC分类号： C02F1/78 ,  C02F101/10 ,  C02F101/30

CPC分类号： C02F1/4608 ,  B01F3/04241 ,  B01F3/04496 ,  B01F3/04503 ,  B01F5/0415 ,  B01F5/043 ,  B01F5/20 ,  B01F13/0001 ,  B01F13/0005 ,  C02F1/36 ,  C02F1/727 ,  C02F1/78 ,  C02F2001/46152 ,  C02F2201/003 ,  C02F2201/4619 ,  C02F2305/023

摘要： [Object] An object of the present invention is to provide a water treatment system capable of increasing the treatment rate by causing active species, such as radicals, produced by discharge to efficiently act on treatment water.[Solution] The water treatment system is characterized by including: at least a pair of cylindrical electrode 3 and a linear electrode 4 in a treatment chamber 2, the linear electrode 4 being disposed along the central axis of the cylindrical electrode 3; and treatment water mist supply means 7 for supplying treatment water in the form of mist composed of droplets having a particle diameter of 1500 μm or less to a discharge space generated by applying a high voltage between the cylindrical electrode 3 and the linear electrode 4.

摘要翻译： 本发明的目的是提供一种水处理系统，其能够通过使由放电产生的活性物质例如自由基有效地作用于处理水来提高处理率。 [处理]水处理系统的特征在于，在处理室2中至少具有一对圆筒状电极3和线状电极4，沿着圆筒状电极3的中心轴配置线状电极4， 以及处理用水雾供给装置7，用于将由粒径为1500μm以下的液滴形成的雾状的处理水供给到通过在圆筒状电极3和线状电极4之间施加高电压而产生的放电空间。