Optical processing method and apparatus for carrying out the same

    公开(公告)号:US5811754A

    公开(公告)日:1998-09-22

    申请号:US444871

    申请日:1995-05-19

    IPC分类号: H05K3/00 H05K3/46 B23K26/02

    摘要: An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system (1) for generating a light beam (B) for illuminating a mask (3; 100) having a predetermined pattern, a imaging lens (5) for copying a pattern image of the mask (3; 100) onto a workpiece (7), a mask moving mechanism (4) for moving the mask in a direction perpendicular to an optical axis (L) of the imaging lens (5), a workpiece moving mechanism for moving the workpiece in a direction perpendicular to the optical axis (L) of the imaging lens (5), a imaging magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit (9) which is comprised of an actual imaging magnification arithmetic module (91) for determining an actual imaging magnification value (M') in terms of a ratio between the copied pattern image and a predetermined pattern, a magnification decision module (92) for making decision whether or not a difference between the actual imaging magnification value and a desired imaging magnification value is smaller than a permissible value, an optical-axis displacement control module (93) responsive to indication that the difference exceeds a permissible value (.delta.) to thereby arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual imaging magnification value (M') becomes equal to the desired imaging magnification value (M) for controlling thereby the imaging magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically determined distance, and a displacement control module for controlling the mask moving mechanism and the workpiece moving mechanism.

    Excimer laser beam irradiation apparatus for optically processing
workpiece
    2.
    发明授权
    Excimer laser beam irradiation apparatus for optically processing workpiece 失效
    用于光学处理工件的准分子激光束照射装置

    公开(公告)号:US5661744A

    公开(公告)日:1997-08-26

    申请号:US512710

    申请日:1995-08-08

    CPC分类号: B23K26/083 B23K26/066

    摘要: An excimer laser beam irradiation apparatus capable of processing a workpiece optimally with an excimer irradiation beam even when intensity distribution of the excimer laser beam undergone multiple reflections is non-uniform. A patterning mask has light-transmissive portions for allowing the excimer laser beam to pass through and a reflecting layer for reflecting it. A high reflectivity mirror disposed in opposition to the reflecting layer reflects the excimer laser beam reflected from the reflecting layer toward the patterning mask. An imaging lens images a pattern of the excimer laser beam transmitted through the patterning mask onto a workpiece for irradiation thereof. A workpiece moving mechanism and a mask moving mechanism move the workpiece and the mask moving mechanism, respectively. A control unit controls the workpiece moving mechanism and the mask moving mechanism such that the patterning mask and the workpiece are displaced along a same axis synchronously with each other in a scan moving direction which coincides with a direction in which the excimer laser beam shifts positionally while being reflected between the patterning mask and the reflecting means, for thereby allowing the workpiece to be scanned with the excimer laser beam. The workpiece can be processed uniformly and stably in accordance with a pattern of the patterning mask with high accuracy and reliability.

    摘要翻译: 即使准分子激光束的强度分布发生多次反射也能够用准分子照射光束最佳地处理工件的准分子激光束照射装置是不均匀的。 图形掩模具有用于允许准分子激光束通过的透光部分和用于反射它的反射层。 与反射层相对设置的高反射率反射镜将从反射层反射的准分子激光束朝向图案掩模反射。 成像透镜将通过图案化掩模透射的准分子激光束的图案成像到工件上以进行照射。 工件移动机构和掩模移动机构分别移动工件和掩模移动机构。 控制单元控制工件移动机构和掩模移动机构,使得图案掩模和工件沿着与准分子激光束在位置上移动的方向一致的扫描移动方向沿同一轴线同步地移位,同时 在图案掩模和反射装置之间被反射,从而允许用准分子激光束扫描工件。 可以以高精度和可靠性根据图案化掩模的图案均匀且稳定地加工工件。

    Laser machining apparatus
    3.
    发明授权
    Laser machining apparatus 失效
    激光加工设备

    公开(公告)号:US5310986A

    公开(公告)日:1994-05-10

    申请号:US52897

    申请日:1993-04-26

    摘要: A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. The laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using small apertured mask. Another type of laser machining apparatus comprises a mask and a platform and an imaging optical system. The mask and the work are puts in the same plane of the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area at low price and high accuracy.

    摘要翻译: 激光加工装置包括掩模,反射镜和成像光学系统。 由掩模和反射镜反射的激光通过掩模和工件上的图像进行加工。 激光加工设备包括用于使所述面罩与所述工件并行移动以便加工工件的装置。 该激光加工装置能够使用小孔径掩模加工具有大表面的工件。 另一种类型的激光加工设备包括掩模和平台以及成像光学系统。 掩模和工作放在平台的同一平面上并被驱动,使得掩模的图像经由成像光学系统映射到工件上。 激光加工设备能够以低价格和高精度加工大面积。

    Optical processing apparatus
    4.
    发明授权
    Optical processing apparatus 失效
    光学加工设备

    公开(公告)号:US5355194A

    公开(公告)日:1994-10-11

    申请号:US888782

    申请日:1992-05-27

    摘要: An optical processing apparatus utilizing multiple reflections of a light beam between a mask and a reflector has improved uniformity in the distribution of the light beam over a surface of the mask. In one form, the reflector is disposed in a face-to-face relation with respect to the mask with an angle of inclination relative thereto. In another form, the reflector has a flat or curved taper surface for decreasing an angle of reflection of the light beam at the mask surface at an initial stage, and a flat surface disposed in parallel with the mask surface. In a further form, the reflector is curved in a direction of transmission of the light beam. In a yet further form, an angle of incidence of the light beam is properly adjusted such that a portion of the light beam, which is first reflected from the mask and escapes outwardly from the reflector, is minimized.

    摘要翻译: 在掩模和反射器之间利用光束的多次反射的光学处理装置改善了光束在掩模表面上的分布的均匀性。 在一种形式中,反射器相对于掩模以相对于掩模的倾斜角度的面对面关系设置。 在另一种形式中,反射器具有平坦或弯曲的锥形表面,用于在初始阶段减小光掩模在掩模表面处的反射角度,以及与掩模表面平行设置的平坦表面。 在另一形式中,反射器在光束的透射方向上弯曲。 在另一种形式中,光束的入射角被适当调节,使得首先从掩模反射并从反射器向外逸出的光束的一部分被最小化。

    Airbag deployment controller and passenger protection device including the same
    7.
    发明授权
    Airbag deployment controller and passenger protection device including the same 有权
    安全气囊部署控制器和乘客保护装置包括相同

    公开(公告)号:US07896392B2

    公开(公告)日:2011-03-01

    申请号:US12318103

    申请日:2008-12-22

    IPC分类号: B60R21/16

    摘要: An airbag deployment controller and a passenger protection device including the same are provided to prevent erroneous (false) operation of an airbag due to noises and quickly deploy the airbag. The passenger protection device determines whether or not to drive an airbag unit, upon determining a detected value of a front acceleration sensor as being over a first collision threshold. Then, when determining to drive the airbag unit, the passenger protection device determines whether or not a detected value of a central acceleration sensor exceeds a second collision threshold. With the detected value being over the second threshold, it generates a driving signal and outputs it to the airbag unit in a final deployment control process. Thereby, the airbag unit operates an inflator to drive an airbag.

    摘要翻译: 提供一种安全气囊展开控制器和包括该气囊展开控制装置的乘客保护装置,以防止由于噪音而导致的气囊的错误(错误)操作并且迅速展开气囊。 当确定前加速度传感器的检测值超过第一碰撞阈值时,乘客保护装置确定是否驱动安全气囊单元。 然后,当确定驾驶安全气囊单元时,乘客保护装置确定中央加速度传感器的检测值是否超过第二碰撞阈值。 在检测值超过第二阈值的情况下,它产生一个驱动信号,并在最终部署控制过程中将其输出到安全气囊单元。 由此,气囊单元操作充气机来驱动气囊。

    Airbag deployment controller and passenger protection device including the same
    8.
    发明申请
    Airbag deployment controller and passenger protection device including the same 有权
    安全气囊部署控制器和乘客保护装置包括相同

    公开(公告)号:US20090167005A1

    公开(公告)日:2009-07-02

    申请号:US12318103

    申请日:2008-12-22

    IPC分类号: B60R21/16

    摘要: An airbag deployment controller and a passenger protection device including the same are provided to prevent erroneous operation of an airbag due to noises and quickly deploy the airbag. The passenger protection device determines whether or not to drive an airbag unit, upon determining a detected value of a front acceleration sensor as being over a first collision threshold. Then, when determining to drive the airbag unit, the passenger protection device determines whether or not a detected value of a central acceleration sensor exceeds a second collision threshold. With the detected value being over the second threshold, it generates a driving signal and outputs it to the airbag unit in a final deployment control process. Thereby, the airbag unit operates an inflator to drive an airbag.

    摘要翻译: 提供一种安全气囊展开控制器和包括该气囊展开控制器的乘客保护装置,以防止气囊由于噪音而错误地操作,并迅速展开气囊。 当确定前加速度传感器的检测值超过第一碰撞阈值时,乘客保护装置确定是否驱动安全气囊单元。 然后,当确定驾驶安全气囊单元时,乘客保护装置确定中央加速度传感器的检测值是否超过第二碰撞阈值。 在检测值超过第二阈值的情况下,它产生一个驱动信号,并在最终部署控制过程中将其输出到安全气囊单元。 由此,气囊单元操作充气机来驱动气囊。

    Vehicle passenger detecting device
    9.
    发明授权
    Vehicle passenger detecting device 失效
    车辆检测装置

    公开(公告)号:US07478699B2

    公开(公告)日:2009-01-20

    申请号:US11347365

    申请日:2006-02-06

    IPC分类号: B60R21/015

    CPC分类号: B60R21/01516

    摘要: A vehicle passenger detecting device includes a judging circuit (6), which judges whether a passenger seated on a seat (1) is a child or not based on a load acting on each of areas of a seat portion (1a) of the seat for a vehicle, and the judging circuit (6), with a fastened sate of a seat belt (5a), judges whether or not a total load acting on the entire area of the seat portion is within a predetermined range, and when the total load is within the predetermined range, if a front outer load acting on a front outer area is a first threshold or more and the ratio of the front outer load to a front inner load acting on a front inner area is a second threshold or more, or the ratio of both outer loads acting on both of outer areas to both inner loads acting on both of inner areas is a third threshold or more, the judging circuit judges (6) that a seated passenger is a child.

    摘要翻译: 车辆乘客检测装置包括判断电路(6),其判断坐在座椅(1)上的乘客是否基于作用在座椅的座位部分(1a)的每个区域上的负载,用于 车辆和具有安全带(5a)的紧固状态的判断电路(6)判断作用在座椅部分的整个区域上的总负载是否在预定范围内,并且当总负载 如果作用在前外侧区域上的前外侧负载为第一阈值以上,前外侧负载与作为前侧内侧区域的前方内侧负载的比例为第二阈值以上,则 作用于两个外部区域的两个外部载荷与作用在两个内部区域上的两个内部负载的两个外部载荷的比率是第三阈值以上,判断电路判断(6)坐着的乘客是小孩。