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    Laser gas replenishment method
    3.
    发明授权
    Laser gas replenishment method 有权
    激光加气方式

    公开(公告)号：US06965624B2

    公开(公告)日：2005-11-15

    申请号：US10338779

    申请日：2003-01-06

    申请人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

    发明人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

    IPC分类号： G02B5/18 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H01S3/00 ,  H01S3/09 ,  H01S3/097 ,  H01S3/22

    CPC分类号： G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

    摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

    摘要翻译： 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％ 在激光室内。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    5.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06466599B1

    公开(公告)日：2002-10-15

    申请号：US09453670

    申请日：1999-12-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S3225

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Excimer or molecular laser with optimized spectral purity
    6.
    发明授权
    Excimer or molecular laser with optimized spectral purity 失效
    准分子激光或具有优化光谱纯度的分子激光

    公开(公告)号：US06785316B1

    公开(公告)日：2004-08-31

    申请号：US09640595

    申请日：2000-08-17

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

    IPC分类号： H01S3097

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  H01S3/0971 ,  H01S3/225

    摘要： A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.

    摘要翻译： 用于准分子或分子氟光刻激光系统的脉冲压缩电路的最终级电容由通过第一电感连接到电极的一组峰化电容器提供，并且一组维持电容器通过大体上更大的第二电感连接到电极 比第一个电感。 通过放电的电流脉冲相对于具有其最终级电容的系统的电流脉冲在时间上延长，该最终级电容仅由通过第一电感连接到电极的一组峰值电容器提供。 激光脉冲中的放大自发发射（ASE）水平降低，从而增强其光谱纯度。

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    7.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06414978B1

    公开(公告)日：2002-07-02

    申请号：US09826296

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Corona preionization assembly for a gas laser
    8.
    发明授权
    Corona preionization assembly for a gas laser 失效
    用于气体激光器的电晕放电组件

    公开(公告)号：US06757315B1

    公开(公告)日：2004-06-29

    申请号：US09692265

    申请日：2000-10-19

    申请人： Igor Bragin ,  Vadim Berger ,  Ivan Tassy-Julien ,  Uwe Stamm

    发明人： Igor Bragin ,  Vadim Berger ,  Ivan Tassy-Julien ,  Uwe Stamm

    IPC分类号： H01S322

    CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

    摘要： A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal electrode connects to advantageous electrical circuitry, preferably external to the discharge chamber via a conductive feedthrough. The circuitry reduces the voltage across the dielectric tube of the preionization unit to reduce over-flashing at tube ends and oscillations due to residual energies stored in the dielectric. A semi-transparent mesh electrode between the preionization unit and the discharge area prevents field distortions and discharge instabilities.

    摘要翻译： 用于气体激光器的预电离装置包括内部预电离电极，其具有围绕其的介电壳体，使得所述预电离装置是电晕型的。 内部电极通过导电馈通连接到有利的电路，优选地在放电室的外部。 该电路降低了预电离单元的电介质管两端的电压，以减少由于存储在电介质中的剩余能量引起的管末端过度闪烁和振荡。 在预电离单元和放电区之间的半透明网状电极防止场失真和放电不稳定。

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    9.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06556609B2

    公开(公告)日：2003-04-29

    申请号：US09826301

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    10.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06430205B2

    公开(公告)日：2002-08-06

    申请号：US09826372

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.