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    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    1.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06466599B1

    公开(公告)日：2002-10-15

    申请号：US09453670

    申请日：1999-12-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S3225

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    2.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06414978B1

    公开(公告)日：2002-07-02

    申请号：US09826296

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    3.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06556609B2

    公开(公告)日：2003-04-29

    申请号：US09826301

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Discharge unit for a high repetition rate excimer or molecular fluorine laser
    4.
    发明授权
    Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权

    公开(公告)号：US06430205B2

    公开(公告)日：2002-08-06

    申请号：US09826372

    申请日：2001-04-03

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

    IPC分类号： H01S322

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

    摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

    Preionization arrangement for a gas laser
    5.
    发明授权
    Preionization arrangement for a gas laser 失效
    气体激光器的预处理装置

    公开(公告)号：US06618422B2

    公开(公告)日：2003-09-09

    申请号：US09863931

    申请日：2001-05-22

    申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

    发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

    IPC分类号： H01S300

    CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

    摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

    摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

    Preionization arrangement for gas laser
    6.
    发明授权
    Preionization arrangement for gas laser 失效
    气体激光器的预处理装置

    公开(公告)号：US06650679B1

    公开(公告)日：2003-11-18

    申请号：US09247887

    申请日：1999-02-10

    申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

    发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

    IPC分类号： H01S3097

    CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

    摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

    摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

    Cooled electrodes for high repetition excimer or molecular fluorine lasers
    7.
    发明申请
    Cooled electrodes for high repetition excimer or molecular fluorine lasers 审中-公开
    用于高重复准分子或分子氟激光器的冷却电极

    公开(公告)号：US20050002427A1

    公开(公告)日：2005-01-06

    申请号：US10833455

    申请日：2004-04-28

    申请人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

    发明人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

    IPC分类号： H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

    CPC分类号： H01S3/0385 ,  H01S3/041 ,  H01S3/225

    摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.

    摘要翻译： 高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。 为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。 可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。 冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。 由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

    Excimer or molecular laser with optimized spectral purity
    9.
    发明授权
    Excimer or molecular laser with optimized spectral purity 失效
    准分子激光或具有优化光谱纯度的分子激光

    公开(公告)号：US06785316B1

    公开(公告)日：2004-08-31

    申请号：US09640595

    申请日：2000-08-17

    申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

    发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

    IPC分类号： H01S3097

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  H01S3/0971 ,  H01S3/225

    摘要： A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.

    摘要翻译： 用于准分子或分子氟光刻激光系统的脉冲压缩电路的最终级电容由通过第一电感连接到电极的一组峰化电容器提供，并且一组维持电容器通过大体上更大的第二电感连接到电极 比第一个电感。 通过放电的电流脉冲相对于具有其最终级电容的系统的电流脉冲在时间上延长，该最终级电容仅由通过第一电感连接到电极的一组峰值电容器提供。 激光脉冲中的放大自发发射（ASE）水平降低，从而增强其光谱纯度。