利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

31 条记录 (耗时 0.028 秒)

    Catalyst enhanced chemical vapor deposition apparatus and deposition method using the same
    1.
    发明申请
    Catalyst enhanced chemical vapor deposition apparatus and deposition method using the same 有权
    催化剂增强化学气相沉积装置及其沉积方法

    公开(公告)号：US20060254513A1

    公开(公告)日：2006-11-16

    申请号：US11405552

    申请日：2006-04-18

    申请人： Hee-Cheol Kang ,  Kazuo Furuno ,  Han-Ki Kim ,  Myoung-Soo Kim

    发明人： Hee-Cheol Kang ,  Kazuo Furuno ,  Han-Ki Kim ,  Myoung-Soo Kim

    IPC分类号： C23C16/00

    CPC分类号： C23C16/44 ,  C23C16/46

    摘要： A catalyst-enhanced chemical vapor deposition (CECVD) apparatus and a deposition method, in which tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated. The CECVD apparatus may be constructed with a process chamber, a showerhead to introduce process gas into process chamber, a tensile catalyst wire structure provided in the process chamber to decompose the gas introduced from the showerhead, and a substrate on which the gas decomposed by the catalyst wire structure is deposited, so that the tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated, thereby eliminating occurrences of non-uniform temperatures of a substrate and non-uniform film growth, and concomitantly enhancing the durability of the catalyst wire.

    摘要翻译： 催化剂增强化学气相沉积（CECVD）装置和沉积方法，其中向催化剂丝施加张力以防止催化剂丝由于热变形而下垂，并且使用另外的气体来防止异物 生成。 CECVD装置可以构造有处理室，将工艺气体引入处理室的喷头，设置在处理室中的分解从喷头引入的气体的拉伸催化剂丝线结构以及由其分解的气体 催化剂丝线结构被沉积，使得张力被施加到催化剂丝上，以防止催化剂丝由于热变形而下垂，并且使用额外的气体来防止产生异物，从而消除不均匀的发生 底物的温度和不均匀的膜生长，并且伴随地提高催化剂丝的耐久性。

    Catalyst enhanced chemical vapor deposition apparatus and deposition method using the same
    2.
    发明授权
    Catalyst enhanced chemical vapor deposition apparatus and deposition method using the same 有权
    催化剂增强化学气相沉积装置及其沉积方法

    公开(公告)号：US08052795B2

    公开(公告)日：2011-11-08

    申请号：US11405552

    申请日：2006-04-18

    申请人： Hee-Cheol Kang ,  Kazuo Furuno ,  Han-Ki Kim ,  Myoung-Soo Kim

    发明人： Hee-Cheol Kang ,  Kazuo Furuno ,  Han-Ki Kim ,  Myoung-Soo Kim

    IPC分类号： C23C16/00

    CPC分类号： C23C16/44 ,  C23C16/46

    摘要： A catalyst-enhanced chemical vapor deposition (CECVD) apparatus and a deposition method, in which tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated. The CECVD apparatus may be constructed with a process chamber, a showerhead to introduce process gas into process chamber, a tensile catalyst wire structure provided in the process chamber to decompose the gas introduced from the showerhead, and a substrate on which the gas decomposed by the catalyst wire structure is deposited, so that the tension is applied to a catalyst wire in order to prevent the catalyst wire from sagging due to thermal deformation, and additional gas is used to prevent foreign material from being generated, thereby eliminating occurrences of non-uniform temperatures of a substrate and non-uniform film growth, and concomitantly enhancing the durability of the catalyst wire.

    摘要翻译： 催化剂增强化学气相沉积（CECVD）装置和沉积方法，其中向催化剂丝施加张力以防止催化剂丝由于热变形而下垂，并且使用另外的气体来防止异物 生成。 CECVD装置可以构造有处理室，将工艺气体引入处理室的喷头，设置在处理室中的分解从喷头引入的气体的拉伸催化剂丝线结构以及由其分解的气体 催化剂丝线结构被沉积，使得张力被施加到催化剂丝上，以防止催化剂丝由于热变形而下垂，并且使用额外的气体来防止产生异物，从而消除不均匀的发生 底物的温度和不均匀的膜生长，并且伴随地提高催化剂丝的耐久性。

    THIN FILM DEPOSITION APPARATUS
    4.
    发明申请
    THIN FILM DEPOSITION APPARATUS 审中-公开
    薄膜沉积装置

    公开(公告)号：US20110262625A1

    公开(公告)日：2011-10-27

    申请号：US13176701

    申请日：2011-07-05

    申请人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    发明人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    IPC分类号： B05D5/06 ,  B05C5/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/24

    摘要： A thin film deposition apparatus including a chamber; a deposition source accommodated in the chamber and configured to discharge a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet located opposite the deposition source nozzle unit inside the chamber and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction, the patterning slit sheet being spaced apart from the substrate, and the thin film deposition apparatus being configured to perform a deposition while at least one of the substrate or the thin film deposition apparatus moves relative to the other in the first direction.

    摘要翻译： 一种薄膜沉积设备，包括：室; 沉积源，其容纳在所述室中并且构造成排出沉积材料; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，其与所述腔室内的所述沉积源喷嘴单元相对，并且包括沿垂直于所述第一方向的第二方向布置的多个图案化狭缝，所述图案化缝隙片与所述衬底间隔开，并且所述薄膜沉积设备 被配置为在所述基板或所述薄膜沉积装置中的至少一个在所述第一方向上相对于另一个移动时执行沉积。

    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME
    5.
    发明申请
    THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME 有权
    薄膜沉积装置及使用其制造有机发光显示装置的方法

    公开(公告)号：US20110052791A1

    公开(公告)日：2011-03-03

    申请号：US12869830

    申请日：2010-08-27

    申请人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    发明人： Chang-Mog JO ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

    IPC分类号： C23C16/52 ,  B05C11/00 ,  B05D3/00 ,  B05D5/00

    CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

    摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

    Holder for fabricating organic light emitting display
    6.
    发明申请
    Holder for fabricating organic light emitting display 有权
    用于制造有机发光显示器的支架

    公开(公告)号：US20070023986A1

    公开(公告)日：2007-02-01

    申请号：US11483773

    申请日：2006-07-11

    申请人： Kyu-Sung Lee ,  Kwan-Seop Song ,  Hee-Cheol Kang ,  Do-Geun Kim

    发明人： Kyu-Sung Lee ,  Kwan-Seop Song ,  Hee-Cheol Kang ,  Do-Geun Kim

    IPC分类号： B23Q3/00

    CPC分类号： C23C14/50 ,  C23C14/042 ,  H01L51/56

    摘要： A holder for fabricating an organic light emitting display comprises: a holder main body; and a plurality of supporters provided on opposite sides of the holder main body; wherein each supporter has a ‘┐’-shape and comprises a side wall having a predetermined height, and a supporting plate bent from the side wall. The supporting plate is formed with a plurality of stepped parts to support a substrate, a film tray and a mask, to hold the substrate, the film tray and the mask while the substrate, the film tray and the mask are being transported, and to prevent a pattern from being distorted, thereby transporting and processing a substrate, a film tray and a mask in a single chamber at the same time.

    摘要翻译： 一种用于制造有机发光显示器的保持器，包括：保持器主体; 以及设置在保持器主体的相对侧上的多个支撑件; 其中每个支撑件具有“┐”形并且包括具有预定高度的侧壁和从侧壁弯曲的支撑板。 支撑板形成有多个阶梯部，以支撑基板，胶片托盘和掩模，以在基板，胶片托盘和面罩正在运送的同时保持基板，胶片托盘和掩模，并且 防止图案变形，从而同时在单个室中输送和处理基板，胶片托盘和掩模。

    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
    7.
    发明授权
    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
    薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置

    公开(公告)号：US08921831B2

    公开(公告)日：2014-12-30

    申请号：US12836760

    申请日：2010-07-15

    申请人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    发明人： Jong-Heon Kim ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Hee-Cheol Kang ,  Ji-Sook Oh

    IPC分类号： H01L51/05 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.

    摘要翻译： 一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。

    Mask frame and method of fixing mask on the mask frame
    9.
    发明授权
    Mask frame and method of fixing mask on the mask frame 有权
    掩模框和将掩模固定在掩模框上的方法

    公开(公告)号：US07718031B2

    公开(公告)日：2010-05-18

    申请号：US11325560

    申请日：2006-01-05

    申请人： Hee-Cheol Kang ,  Jin-Kyoo Kim

    发明人： Hee-Cheol Kang ,  Jin-Kyoo Kim

    IPC分类号： C23F1/00 ,  H01L21/306 ,  B29D11/00 ,  H01J9/12

    CPC分类号： C23C14/042 ,  H01L51/0011

    摘要： A mask frame on which a mask, having a pattern area and a mask edge defining the pattern area, is fixed comprises: a through opening corresponding to the pattern area; and a base corresponding to the mask edge. The base is provided with discharging holes formed therein, and a vacuum pump is coupled to the discharging holes so that the mask is fixed to the mask frame without damaging the pattern formed on the pattern area of the mask.

    摘要翻译： 其上具有限定图案区域的图案区域和掩模边缘的掩模固定在其上的掩模框包括：对应于图案区域的通孔; 和对应于掩模边缘的基座。 底座上形成有排放孔，真空泵联接到排放孔，使得掩模固定在掩模框架上，而不会损害形成在掩模图案区域上的图案。

    Method and apparatus for fabricating organic light emitting display device
    10.
    发明申请
    Method and apparatus for fabricating organic light emitting display device 审中-公开
    用于制造有机发光显示装置的方法和装置

    公开(公告)号：US20070065976A1

    公开(公告)日：2007-03-22

    申请号：US11503171

    申请日：2006-08-14

    申请人： Ji-Yong Lee ,  Won-Woong Jung ,  Hee-Cheol Kang

    发明人： Ji-Yong Lee ,  Won-Woong Jung ,  Hee-Cheol Kang

    IPC分类号： H01L51/40 ,  H01L29/08

    CPC分类号： H01L51/56 ,  H01L51/5246 ,  H01L51/5259

    摘要： A method and an apparatus for fabricating an organic light emitting display, in which a large-sized transmissible film is fabricated to be easily used in an affixing process for a large-sized substrate. The apparatus includes: a first chamber including a plurality of first through holes and having a first transmissible film sealing the plurality of first through holes, the first chamber adapted to affix a first substrate having an Organic Light Emitting Diode (OLED) to a second substrate having a desiccant agent; and a second chamber having a second through hole in a predetermined region and having a second transmissible film sealing the second through hole, the second chamber adapted to harden a sealant interposed between the first and second substrates to seal the first substrate to the second substrates.

    摘要翻译： 一种用于制造有机发光显示器的方法和装置，其中制造大尺寸透射膜以容易地用于大尺寸基板的固定工艺中。 该装置包括：第一室，包括多个第一通孔，并且具有密封多个第一通孔的第一可透膜，第一室适于将具有有机发光二极管（OLED）的第一衬底固定到第二衬底 具有干燥剂; 以及第二室，其具有在预定区域中的第二通孔，并且具有密封所述第二通孔的第二可透膜，所述第二室适于硬化插入在所述第一和第二基板之间的密封剂，以将所述第一基板密封到所述第二基板。