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    Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus
    1.
    发明授权
    Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus 有权
    用于通过电磁马达，平台装置和光刻设备定位物体的方法

    公开(公告)号：US08982327B2

    公开(公告)日：2015-03-17

    申请号：US13330161

    申请日：2011-12-19

    申请人： Henrikus Herman Marie Cox ,  Thomas Augustus Mattaar

    发明人： Henrikus Herman Marie Cox ,  Thomas Augustus Mattaar

    IPC分类号： G03B27/32 ,  G03B27/54 ,  G03F7/20

    CPC分类号： G03B27/32 ,  G03B27/54 ,  G03F7/70725 ,  G03F7/70758

    摘要： A method to enable positioning of an object by a positioning device that includes an electromagnetic motor to control the position of the object in a lithographic apparatus, the method including receiving desired motor signals at the electromagnetic motor to produce a plurality of primary forces and a pitch torque associated with the primary forces within a motor control cycle, wherein for the motor control cycle, the pitch torque is based on either the primary forces to be generated by the electromagnetic motor or the desired forces and torques for positioning the object; and in response to the desired motor signals, causing the electromagnetic motor to generate the primary forces, wherein prior to the primary forces are determined for a next motor control cycle, the desired forces and torques for positioning the object are modified using the pitch torque associated with a previous motor control cycle.

    摘要翻译： 一种能够通过包括电磁马达的定位装置来定位物体的方法，以控制物体在光刻设备中的位置，该方法包括在电磁马达处接收所需的马达信号以产生多个主力和俯仰 与电动机控制周期内的主力相关联的扭矩，其中对于电动机控制循环，俯仰转矩基于要由电磁电动机产生的主要力或用于定位物体的期望力和扭矩; 并且响应于期望的电动机信号，使得电磁电动机产生主力，其中在为下一个电动机控制循环确定主力之前，用于定位物体的期望力和转矩使用相关的俯仰转矩来修改 与以前的电机控制周期。

    Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus
    3.
    发明授权
    Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus 有权
    用于通过电磁马达，平台装置和光刻设备定位物体的方法

    公开(公告)号：US08102513B2

    公开(公告)日：2012-01-24

    申请号：US12243233

    申请日：2008-10-01

    申请人： Henrikus Herman Marie Cox ,  Thomas Augustus Mattaar

    发明人： Henrikus Herman Marie Cox ,  Thomas Augustus Mattaar

    IPC分类号： G03B27/58 ,  G03B27/62

    CPC分类号： G03B27/32 ,  G03B27/54 ,  G03F7/70725 ,  G03F7/70758

    摘要： A method for positioning an object by an electromagnetic motor which, in use, produces a plurality of primary forces and a pitch torque associated with the primary forces. The method includes a cycle which includes: determining the desired forces and torques for positioning the object, determining the primary forces to be generated by the motor, determine the pitch torque from either the primary forces or from the desired forces and torques, determine the desired signals for the motor to generate the primary forces. In a next cycle, prior to the determination of the primary forces, the desired forces and torques for positioning the object are modified using the pitch torque determined in the previous cycle of steps.

    摘要翻译： 一种用于通过电磁马达定位物体的方法，该电磁马达在使用中产生与主力相关联的多个主力和俯仰力矩。 该方法包括循环，其包括：确定用于定位物体的期望的力和扭矩，确定由马达产生的主力，从主力或从所需的力和扭矩确定俯仰扭矩，确定期望的 电机产生主力的信号。 在下一个循环中，在确定主力之前，使用在前一步骤循环中确定的俯仰扭矩修改用于定位物体的期望力和扭矩。

    Lithographic apparatus and device manufacturing method
    5.
    发明授权
    Lithographic apparatus and device manufacturing method 有权
    平版印刷设备和器件制造方法

    公开(公告)号：US07224428B2

    公开(公告)日：2007-05-29

    申请号：US10894366

    申请日：2004-07-20

    申请人： Robertus Johannes Marinus De Jongh ,  Petrus Marinus Christianus Maria Van Den Biggelaar ,  Thomas Augustus Mattaar ,  Jan Van De Ven

    发明人： Robertus Johannes Marinus De Jongh ,  Petrus Marinus Christianus Maria Van Den Biggelaar ,  Thomas Augustus Mattaar ,  Jan Van De Ven

    IPC分类号： G03B27/42 ,  G03B27/58 ,  G06F19/00

    CPC分类号： G03F7/70725

    摘要： A lithographic apparatus is presented that includes a controller having a series connection of at least two integrators and an integrator output circuit for deriving an output quantity of the series connection of integrators. The controller also includes an integrator saturator that is operatively coupled to the integrator output circuit and having an operating area for passing through the output quantity and a saturation area for saturating the output quantity. A saturation control mechanism for controlling saturation sets an output quantity of at least one of the series-connected integrators to a neutral value, when the integrator saturator is in the saturation area, except when the output quantity of or an input quantity of at least one of the series-connected integrators has a value such that it would tend to bring the integrator saturator from the saturation area to the operating area.

    摘要翻译： 提供了一种光刻设备，其包括具有至少两个积分器的串联连接的控制器和用于导出积分器的串联连接的输出量的积分器输出电路。 控制器还包括一个积分器饱和器，其可操作地耦合到积分器输出电路，并具有用于通过输出量的操作区域和用于饱和输出量的饱和区域。 当积分器饱和器处于饱和区域时，用于控制饱和的饱和度控制机构将串联连接的积分器中的至少一个的输出量设定为中性值，除了当输出量或至少一个的输入量 串联的积分器具有这样的值，使得它将趋于将积分器饱和器从饱和区域带到操作区域。

    System and method for moving an object employing piezo actuators
    6.
    发明授权
    System and method for moving an object employing piezo actuators 有权
    使用压电致动器移动物体的系统和方法

    公开(公告)号：US07173363B2

    公开(公告)日：2007-02-06

    申请号：US11012060

    申请日：2004-12-15

    申请人： Stefan Gertud Marie Hendriks ,  Thomas Augustus Mattaar ,  Gerardus Jacobus Cornelis Catharina Maria Leenheers

    发明人： Stefan Gertud Marie Hendriks ,  Thomas Augustus Mattaar ,  Gerardus Jacobus Cornelis Catharina Maria Leenheers

    IPC分类号： H01L41/08

    CPC分类号： G03F7/70825 ,  G03F7/70758 ,  H02N2/021

    摘要： A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence.

    摘要翻译： 本文介绍了一种压电致动器系统。 压电致动器系统包括可以延长和剪切的多个压电致动器。 使用延长和剪切，压电致动器系统分别响应于第一和第二控制信号来夹持并移动物体。 物体的可能位移受到压电致动器的最大剪切力的限制。 为了增加可能的位移，可以控制压电致动器以执行线性剪切序列或混洗序列。 在线性剪切序列期间，物体被移动; 在混洗序列期间，物体基本上是静止的，而压电致动器相对于物体重新定位，之后物体可以使用线性剪切序列进一步移动。