Plasma-induced, in-situ generation, transport and use or collection of
reactive precursors
    1.
    发明授权
    Plasma-induced, in-situ generation, transport and use or collection of reactive precursors 失效
    血浆诱导的,原位产生,运输和使用或收集活性前体

    公开(公告)号:US5085885A

    公开(公告)日:1992-02-04

    申请号:US579772

    申请日:1990-09-10

    摘要: A beam or flow of a reactive or metastable precursor such as a hydride or organometallic compound is created, and this beam or flow is used to treat (e.g. dope or coat or otherwise modify) a substrate, e.g. an advanced material such as a semiconductor layer, a photovoltaic cell, or a solar cell. The beam or flow can also be directed into a storage zone so that the precursor or precursors can be collected for future use. The beam or flow is created in an apparatus comprising at least three zones. Zone 1 is irradiated with microwave energy to generate a reactive gas rich in free radicals (e.g. rich in H.sup.., CH.sub.3.sup.., etc.) zone 2 (downstream from zone 1) is substantially free of microwave energy and contains a target which is impinged upon by the free radicals and becomes a source of the precursor; zone 3 (downstream from zone 2) is where the precursors are either collected for storage or are used to treat the substrate. In a typical apparatus of this invention, a feed gas such as H.sub.2 or CH.sub.4 is introduced into an elongated tube 50 which communicates with a microwave cavity 57 containing a microwave plasma. A reactive gas containing free radicals (and perhaps some ions) flows from cavity (57 to target 61, where the free radicals react with the target to form the precursor (e.g. a hydride such as silane). When the precursor enters zone 3 it can treat an advanced material 73, e.g. by decomposing into Si+2H.sub.2. The Si is deposited on substrate 73 and the liberated H.sub.2 is pumped away. The pumping system also keeps the interior of the apparatus under subatmospheric pressure, e.g. 0.1 to 10 torr.

    摘要翻译: 产生反应性或亚稳态前体(例如氢化物或有机金属化合物)的束或流,并且该束或流被用于处理(例如,掺杂或涂覆或以其他方式修饰)底物,例如, 诸如半导体层,光伏电池或太阳能电池的高级材料。 梁或流动还可以被引导到储存区域中,使得前体或前体可以被收集以备将来使用。 梁或流在包括至少三个区域的装置中产生。 区域1用微波能量照射以产生富含自由基(例如富含H.,CH3等)的区域2(区域1的下游)的反应性气体基本上不含微波能量并且包含撞击的靶 通过自由基,成为前体的来源; 区域3(区域2的下游)是前体被收集用于储存或用于处理底物的地方。 在本发明的典型装置中,将诸如H 2或CH 4的进料气体引入到与包含微波等离子体的微波空腔57连通的细长管50中。 含有自由基(或许一些离子)的活性气体从空腔(57)流向靶61,其中自由基与靶反应形成前体(例如氢化物如硅烷),当前体进入区3时, 处理高级材料73,例如通过分解成Si + 2H2,Si沉积在基板73上,释放的H2被泵出,泵送系统还将设备的内部保持在低于大气压的压力下,例如0.1至10托。

    Device for indicating the proper installation of fittings
    2.
    发明授权
    Device for indicating the proper installation of fittings 失效
    用于指示配件正确安装的装置

    公开(公告)号:US5280967A

    公开(公告)日:1994-01-25

    申请号:US858666

    申请日:1992-03-27

    IPC分类号: F16B31/02 F16L19/02 F16L35/00

    摘要: The mechanical stress indicator includes two stress indicating rings disposed between engagable fasteners. The stress indicating rings can assume three distinct cooperative positions, corresponding to a less than optimally tight condition of the fastener, an optimum tightness condition and an overtight condition. When the fastener arrangement is in the less than optimally tight condition the mos visually predominant surfaces are of a first code, which can be a first color. When the fastener arrangement is tightened to an optimum tightness condition the stress indicator is deflected and the most visually predominant surfaces, which differ from those of the less than optimally tight condition, are of a second code, which can be a second color that corresponds with the optimum torque condition. When the fastener arrangement is tightened to an overtight condition the stress indicating rings are deflected to a third position wherein the most visually predominant surfaces are of a third code, which can be a third color corresponding to the overtight condition. The stress indicator can include a fixed non-deflectable base ring that is also coded with a color to cooperate with the deflectable rings. A deflector stub can be formed on one of the fastener members to facilitate deflection of the stress indicator rings from an optimum tightness condition to an overtight condition.

    摘要翻译: 机械应力指示器包括设置在可接合的紧固件之间的两个应力指示环。 应力指示环可以呈现三个不同的协调位置,对应于紧固件的不太优选的紧密状态,最佳的紧密状态和过度的状态。 当紧固件装置处于不太好的紧密状态时,mos视觉上主要的表面是第一代码,其可以是第一种颜色。 当紧固件装置被紧固到最佳紧密度状态时,应力指示器被偏转,并且与视觉上最差的最表面(其不同于最不严格的条件不同)是第二代码,其可以是对应于 最佳扭矩条件。 当紧固件装置被紧固到过度的状态时,应力指示环被偏转到第三位置,其中最视觉上最主要的表面是第三代码,其可以是对应于过度紧张状态的第三种颜色。 应力指示器可以包括固定的不可偏转的基环,其也用彩色编码以与可偏转环协作。 可以在一个紧固件构件上形成导流器短截线,以便使应力指示器环从最佳密封条件偏转到过大的状态。

    Scale conditioning agents and treatment method
    4.
    发明授权
    Scale conditioning agents and treatment method 有权
    规模调理剂及处理方法

    公开(公告)号:US07857911B2

    公开(公告)日:2010-12-28

    申请号:US11095671

    申请日:2005-04-01

    IPC分类号: B08B9/04

    摘要: An improved scale conditioning composition and method is disclosed that results in improved dissolution and disruption of tube scale, hardened sludge and other deposits composed primarily of highly densified magnetite such as those found in heat exchange vessels, particularly steam generators. After treatment with the advanced scale conditioning composition, these magnetite rich deposits are more easily removed using known and commercially available high pressure hydro-mechanical cleaning techniques. The present invention further provides effective cleaning in a short period of time and at relatively low temperatures, while reducing the amount of waste produced and reducing the resulting corrosion of carbon and low alloy steel components within the steam generator during the cleaning process.

    摘要翻译: 公开了一种改进的尺寸调节组合物和方法,其导致管鳞,硬化污泥和主要由高度致密化的磁铁矿组成的其它沉积物的溶解和破坏,例如在热交换容器,特别是蒸汽发生器中发现的那些。 在使用高级水垢调理组合物处理之后,使用已知和市售的高压水力机械清洁技术更容易地除去富含富铁的沉积物。 本发明进一步提供了在较短的时间和相对低的温度下的有效清洁,同时减少了在清洁过程中产生的废物的量并减少了蒸汽发生器内的碳和低合金钢组分的腐蚀。

    Sludge removal system
    5.
    发明授权
    Sludge removal system 失效
    污泥清除系统

    公开(公告)号:US5913320A

    公开(公告)日:1999-06-22

    申请号:US419942

    申请日:1995-04-11

    IPC分类号: B08B9/093 F22B37/48 B08B3/02

    CPC分类号: B08B9/093 F22B37/483

    摘要: An improved remotely-operated high-pressure water-jet sludge lancing system for removing sludge from the secondary side of steam generators, the system including an end effector and a deployment system. The end effector includes two diametrically opposed articulated nozzle heads having water jet nozzles attached thereto. The nozzle heads are pivotally mounted to respective pneumatic extension arm actuators that are accommodated in respective arms. The arms are attached in a collinear relation to opposing sides of a centrally located drive means, which allows for the rotational positioning of the nozzle heads. The deployment system for delivering and supporting the end effector includes a self-erecting load-bearing chain and a segmented support rail having a straight section and a curved section. The chain is suspended from the support rail by hangers and cylinder rollers.

    摘要翻译: 一种改进的远程操作的高压水射流污泥切割系统,用于从蒸汽发生器的二次侧除去污泥,该系统包括末端执行器和展开系统。 端部执行器包括两个直径相对的铰接喷嘴头,其具有连接到其上的喷水嘴。 喷嘴头枢转地安装到相应的气动延伸臂致动器上,该致动器容纳在相应的臂中。 臂以与中心定位的驱动装置的相对侧的共线关系附接,这允许喷嘴头的旋转定位。 用于输送和支撑末端执行器的展开系统包括自立式承重链条和具有直线部分和弯曲部分的分段支撑轨道。 链条通过吊架和滚筒辊从支撑轨悬挂。

    Chemical cleaning method and system with steam injection

    公开(公告)号:US08459277B2

    公开(公告)日:2013-06-11

    申请号:US12630729

    申请日:2009-12-03

    摘要: Disclosed are methods and apparatus for cleaning heat exchangers and similar vessels by introducing chemical cleaning solutions and/or solvents while maintaining a target temperature range by direct steam injection into the cleaning solution. The steam may be injected directly into the heat exchanger or into a temporary side stream loop for recirculating the cleaning solution or admixed with fluids being injected to the heat exchanger. The disclosed methods are suitable for removing metallic oxides from a heat exchanger under chemically reducing conditions or metallic species such as copper under chemically oxidizing conditions. In order to further enhance the heat transfer efficiency of heating cleaning solvents by direct steam injection, mixing on the secondary side of the heat exchanger can be enhanced by gas sparging or by transferring liquid between heat exchangers when more than one heat exchanger is being cleaned at the same time.

    Ultrasonic cleaning method
    7.
    发明授权
    Ultrasonic cleaning method 有权
    超声波清洗方法

    公开(公告)号:US06572709B1

    公开(公告)日:2003-06-03

    申请号:US09567722

    申请日:2000-05-10

    IPC分类号: B08B702

    CPC分类号: F22B37/483 B08B7/028 B08B9/08

    摘要: An ultrasonic cleaning method for cleaning the film, scale and sludge from internal surfaces of tubes, tubesheets, tube support plates and channel heads of steam generators previously exposed to water or steam at temperatures of more than 200° C. introduces an ultrasonic transducer or transducer array into the steam generator and submerges the ultrasonic transducer and the surface to be cleaned in water or aqueous solution. Ultrasonic energy is introduced into the water at a power level of 20 watts/gallon or more and at frequencies of from 10 to 200 KHz. An array of transducers is employed to introduce 20 to 60 watts/gallon of water or more into the steam generator. In one practice, the transducer or transducer array is suspended in the steam generator. An array of transducers can be assembled (and later disassembled) in situ where individual transducers or small transducer subassemblies must introduced into the steam generator through small hand holes or other small diameter nozzles. In another practice, the ultrasonic transducer is moved through the water while introducing the ultrasonic energy into the water. Large amounts of ultrasonic energy can be introduced into the water and the energy nodes moved through the water so that the energy can efficiently penetrate into the interior rows of tubes and other internal structures.

    摘要翻译: 一种超声波清洗方法,用于从先前暴露于水或蒸气的蒸汽发生器的管,管支架板和管道头的内表面清洗膜,垢和污泥,其温度大于200℃。引入超声波换能器或换能器 排列到蒸汽发生器中,并将超声波换能器和要清洁的表面浸没在水或水溶液中。 超声能量以20瓦特/加仑或更高的功率水平和10至200KHz的频率被引入水中。 使用一组换能器将20至60瓦/加仑的水或更多的水引入蒸汽发生器。 在一种实践中,换能器或换能器阵列悬挂在蒸汽发生器中。 传感器阵列可以在原位组装(并随后拆卸),其中各个换能器或小型换能器组件必须通过小手孔或其他小直径喷嘴引入蒸汽发生器。 在另一个实践中,超声波换能器通过水移动,同时将超声能量引入水中。 可以将大量的超声波能量引入水中,并且能量节点移动通过水,使得能量能够有效地渗透到管和其他内部结构的内部行中。

    Apparatus for producing compound semiconductor thin films
    8.
    发明授权
    Apparatus for producing compound semiconductor thin films 失效
    用于制备化合物半导体薄膜的装置

    公开(公告)号:US5015503A

    公开(公告)日:1991-05-14

    申请号:US476179

    申请日:1990-02-07

    CPC分类号: C23C16/305 C23C16/448

    摘要: An apparatus for producing compound semiconductor thin films on substrates includes a reaction chamber wherein one or more constituents of semiconductor thin film is supplied as a gaseous species in a closed loop system. The apparatus includes hot and cold traps for isolating source materials from the reaction chamber and to provide for controlled delivery of the species. The hot and cold traps communicate with the reaction chamber through hot and cold legs to establish a closed loop recirculating flow. In a preferred embodiment, a thermosiphon provides the flow of gaseous species for formation of copper indium diselenide semiconductor thin films in a closed loop process.

    Chemical cleaning method and system with steam injection
    9.
    发明授权
    Chemical cleaning method and system with steam injection 有权
    化学清洗方法和蒸汽注射系统

    公开(公告)号:US08999072B2

    公开(公告)日:2015-04-07

    申请号:US13063443

    申请日:2009-12-03

    摘要: Disclosed are methods and apparatus for cleaning heat exchangers and similar vessels by introducing chemical cleaning solutions and/or solvents while maintaining a target temperature range by direct steam injection into the cleaning solution. The steam may be injected directly into the heat exchanger or into a temporary side stream loop for recirculating the cleaning solution or admixed with fluids being injected to the heat exchanger. The disclosed methods are suitable for removing metallic oxides from a heat exchanger under chemically reducing conditions or metallic species such as copper under chemically oxidizing conditions. In order to further enhance the heat transfer efficiency of heating cleaning solvents by direct steam injection, mixing on the secondary side of the heat exchanger can be enhanced by gas sparging or by transferring liquid between heat exchangers when more than one heat exchanger is being cleaned at the same time.

    摘要翻译: 公开了通过引入化学清洁溶液和/或溶剂来清洁热交换器和类似容器的方法和装置,同时通过直接蒸汽注入清洁溶液来保持目标温度范围。 蒸汽可以直接注入到热交换器中,或者直接注入到临时侧流回路中,用于再循环清洗溶液或与被注入到热交换器中的流体混合。 所公开的方法适用于在化学还原条件下从热交换器除去金属氧化物或在化学氧化条件下从金属物质例如铜中除去金属氧化物。 为了通过直接蒸汽喷射进一步提高加热清洗溶剂的传热效率,可以通过气体喷射或者当多个热交换器被清洁时在热交换器之间传送液体来增强热交换器的二次侧的混合 同一时间。

    Method and composition for removing deposits
    10.
    发明授权
    Method and composition for removing deposits 有权
    去除沉积物的方法和组成

    公开(公告)号:US08728246B2

    公开(公告)日:2014-05-20

    申请号:US13139173

    申请日:2010-01-26

    IPC分类号: B08B9/00

    摘要: The present invention provides methods and compositions useful for conditioning and removing solid deposits that have formed on or otherwise accumulated within one or more components including, for example, scale formed within a steam generating system. The aqueous cleaning compositions incorporate one or more quaternary ammonium hydroxides characterized by pKa values no less than about 13.5. These quaternary ammonium hydroxides may be used alone or in combination with one or more additives including, for example, chelating agents, reducing or oxidizing agents, pH adjustment agents, surfactants, corrosion inhibitors, complexing agents, dispersants and combinations thereof.

    摘要翻译: 本发明提供了用于调节和除去在一种或多种组分中形成或以其他方式积聚在其中的固体沉积物的方法和组合物,包括例如在蒸汽发生系统内形成的垢。 水性清洁组合物掺入一种或多种以不低于约13.5的pKa值表征的季铵氢氧化物。 这些季铵氢氧化物可以单独使用或与一种或多种添加剂组合使用,包括例如螯合剂,还原剂或氧化剂,pH调节剂,表面活性剂,腐蚀抑制剂,络合剂,分散剂及其组合。