Heat stable photocurable resin composition for dry film resist
    1.
    发明申请
    Heat stable photocurable resin composition for dry film resist 失效
    用于干膜抗蚀剂的热稳定的光固化树脂组合物

    公开(公告)号:US20050260520A1

    公开(公告)日:2005-11-24

    申请号:US10520701

    申请日:2003-07-01

    摘要: The invention relates to a process for preparing a dry film resist by forming a photocurable resin composition onto a support film with a thickness of 1 to 50 μm and optionally laminate a protective film onto the photocursable composition layer to obtain a dry film resist; whereby the photocurable resin is formed from a homogeneous mixture comprising (a) from 20-90 wt % of an alkaline soluble binder oligomer or polymer; (b) from 5 to 60 wt % of one or more photopolymerizable monomers which are compatible with the oligomers and polymers of component (a); (c) from 0.01 to 20% by weight of one or more photoinitiators; (d) from 0 to 20% by weight of additives and/or assistants; and (e) from 0.1 to 10% by weight of a leuco triphenylmethane dye of the formula (I), wherein R1 is a residue selected from (II), R2 is C1-C12 alkyl or phenyl which may be mono-, di- or tri-substituted by C1-C6 alkyl, trifluoromethyl, C1-6 alkoxy, C1-6 alkylthio, halogen and nitro; R3 is hydrogen or C1-C12 alkyl; R4 to R9 independently of one another are hydrogen or C1-C12 alkyl; X is O, S, NH or N—C1-C12-alkyl; (a) to (e) being 100% by weight. The above composition is useful to avoid unfavourable colour generation during the heat lamination.

    摘要翻译: 本发明涉及一种通过将光固化树脂组合物形成在厚度为1-50μm的支撑膜上制备干膜抗蚀剂的方法,并且任选地将保护膜层压到可光固化组合物层上以获得干膜抗蚀剂; 由此可光固化树脂由包含(a)20-90重量%的碱溶性粘合剂低聚物或聚合物的均匀混合物形成; (b)5至60重量%的与组分(a)的低聚物和聚合物相容的一种或多种可光聚合单体; (c)0.01至20重量%的一种或多种光引发剂; (d)0至20重量%的添加剂和/或助剂; 和(e)0.1至10重量%的式(I)的无色三苯甲烷染料,其中R 1是选自(II),R 2 O / 是C 1 -C 12烷基或可以被C 1 -C 1亚烷基取代的苯基, C 1-6烷基,三氟甲基,C 1-6烷氧基,C 1-6烷基硫基,卤素和硝基; R 3是氢或C 1 -C 12烷基; R 3是氢或C 1 -C 12烷基; R 9与R 9彼此独立地是氢或C 1 -C 12烷基; X是O,S,NH或N-C 1 -C 12 - 烷基; (a)至(e)为100重量%。 上述组合物可用于在热层压期间避免不利的颜色产生。

    Photopolymerizable thermosetting resin compositions
    3.
    发明授权
    Photopolymerizable thermosetting resin compositions 有权
    光聚合性热固性树脂组合物

    公开(公告)号:US06485885B1

    公开(公告)日:2002-11-26

    申请号:US09720441

    申请日:2000-12-22

    IPC分类号: G03F7004

    CPC分类号: G03F7/031 G03F7/038

    摘要: Compositions comprising (A) an oligomer or polymer containing at least one carboxylic acid group in the molecule; (B) at least one compound of formulas (I, II, III, IV, V or VI), wherein R1 inter alia is phenyl or alkyl; R2 is for example C2-C12alkonoyl which is unsubstituted or substituted or is benzoyl; R3, R4, R5, R6 and R7 independently of one another are for instance hydrogen, C1-C12alkyl, cyclohexyl or phenyl which is unsubstituted or substituted, or are benzyl, benzoyl, C2-C12alkanoyl or phenoxycarbonyl; R8 is for example hydrogen or C1-C12alkyl or a group (B); M is for example C1-C12alkylene, cyclohexylene or phenylene; M1 inter alia is a direct bond or C1-C12alkylenoxy; and Ar is a 5- or 6-membered aromatic heterocyclic ring; (C) a photopolymerizable reactive or unreactive diluent; and (D) as a thermosetting component an epoxy compound containing at least two epoxy groups in one molecule; are highly suitable as resists which are alkaline developable.

    摘要翻译: 包含(A)在分子中含有至少一个羧酸基团的低聚物或聚合物的组合物; (B)至少一种式(I,II,III,IV,V或VI)化合物,其中R 1特别是苯基或烷基; R2是例如未取代或取代的C 2 -C 12烷氧基或苯甲酰基; R 3,R 4,R 5,R 6和R 7彼此独立地是例如氢,C 1 -C 12烷基,环己基或未取代或取代的苯基,或者是苄基,苯甲酰基,C 2 -C 12烷酰基或苯氧基羰基; R8是例如氢或C1-C12烷基或基团(B); M为例如C 1 -C 12亚烷基,亚环己基或亚苯基; M1特别是直接键或C1-C12亚烷基氧基; 且Ar为5-或6-元芳族杂环; (C)可光聚合反应性或非活性稀释剂; 和(D)作为热固性组分在一个分子中含有至少两个环氧基团的环氧化合物; 非常适合作为碱性显影的抗蚀剂。

    Oxime ester photoinitiators
    4.
    发明授权
    Oxime ester photoinitiators 有权
    肟酯光引发剂

    公开(公告)号:US07759043B2

    公开(公告)日:2010-07-20

    申请号:US11660346

    申请日:2005-08-08

    摘要: Compounds of the formula (I), wherein R1, R2 and R10 independently of one another are C1-C20alkyl, phenyl, C1-C12alkylphenyl or phenyl-C1-C6alkyl; R3 and R4 independently of one another are hydrogen, C1-C20alkyl, NR6R7 or SR8, provided that at least one of R3 or R4 is NR6R7 or SR8; R5 is hydrogen or C1-C20alkyl; R6 and R7 independently of one another are C1-C20alkyl, or R6 and R7 together with the N-atom to which they are attached form a 5 or 6 membered ring, which optionally is interrupted by O, S or NR9 and which optionally additionally is substituted by one or more C1-C4alkyl; R8 is phenyl, biphenylyl, naphthyl, anthryl or phenanthryl, all of which optionally are substituted by one or more C1-C4alkyl; and R9 is hydrogen, C1-C20alkyl, C2-C4hydroxyalkyl or phenyl; exhibit an unexpectedly good performance in photopolymerization reactions.

    摘要翻译: 式(I)化合物,其中R 1,R 2和R 10彼此独立地是C 1 -C 20烷基,苯基,C 1 -C 12烷基苯基或苯基-C 1 -C 6烷基; R 3和R 4彼此独立地是氢,C 1 -C 20烷基,NR 6 R 7或SR 8,条件是R 3或R 4中的至少一个是NR 6 R 7或SR 8; R5是氢或C1-C20烷基; R 6和R 7彼此独立地是C 1 -C 20烷基,或者R 6和R 7与它们所连接的N原子一起形成5或6元环,其任选地被O,S或NR 9中断,并且任选地另外是 被一个或多个C 1 -C 4烷基取代; R8是苯基,联苯基,萘基,蒽基或菲基,它们全部被一个或多个C 1 -C 4烷基取代; 且R 9为氢,C 1 -C 20烷基,C 2 -C 4羟烷基或苯基; 在光聚合反应中表现出出人意料的良好性能。

    O-acyloxime photoinitiators
    6.
    发明授权
    O-acyloxime photoinitiators 有权
    O-酰基肟光引发剂

    公开(公告)号:US06596445B1

    公开(公告)日:2003-07-22

    申请号:US09338152

    申请日:1999-06-23

    IPC分类号: C07C25164

    摘要: Oximeester compounds of the formulae I, II, III and IV wherein R1 is phenyl, C1-C20alkyl or C2-C20alkyl optionally interrupted by —O—, C2-C20alkanoyl or benzoyl, or R1 is C2-C12alkoxycarbonyl or phenoxycarbonyl; R1′ is C2-C12alkoxycarbonyl, or R1′ is phenoxycarbonyl, or R1′ is —CONR10R11 or CN; R2 is C2-C12alkanoyl, C4-C6alkenoyl, benzoyl, C2-C6alkoxycarbonyl or phenoxycarbonyl; R3, R4, R5, R6 and R7 are hydrogen, halogen, C1-C12alkyl, cyclopentyl, cyclohexyl, phenyl, benzyl, benzoyl, C2-C12alkanoyl, C2-C12alkoxycarbonyl, phenoxycarbonyl or a group OR8, SR9, SOR9, SO2R9 or NR10R11; R4′, R5′ and R6′ are hydrogen, halogen, C1-C12alkyl, cyclopentyl, cyclohexyl, phenyl, benzyl, benzoyl, C2-C12-alkanoyl, C2-C12alkoxycarbonyl, phenoxycarbonyl, or are a group OR8, SR9, SOR9, SO2R9, NR10R11; provided that at least one of R3, R4, R5, R6, R7, R′4, R′5 and R′6 is OR8, SR9 or NR10R11; R8, R9, R10 and R11 are for example hydrogen, C1-C12alkyl, phenyl; are suitable as initiators for the photopolymerization of radically polymerizable compounds.

    摘要翻译: 式I,II,III和IV其中R 1的肟酯化合物是苯基,任选被-O - ,C 2 -C 20烷酰基或苯甲酰基中断的C 1 -C 20烷基或C 2 -C 20烷基,或者R 1是C 2 -C 12烷氧基羰基或苯氧基羰基; R1'是C2-C12烷氧基羰基,或R1'是苯氧基羰基,或R1'是-CONR10R11或CN; R2是C2-C12烷酰基,C4-C6链烯酰基,苯甲酰基,C2-C6烷氧基羰基或苯氧基羰基; R3,R4,R5,R6和R7是氢,卤素,C1-C12烷基,环戊基,环己基,苯基,苄基,苯甲酰基,C2-C12烷酰基,C2-C12烷氧基羰基,苯氧基羰基或OR8,SR9,SOR9,SO2R9或NR10R11; R4',R5'和R6'为氢,卤素,C1-C12烷基,环戊基,环己基,苯基,苄基,苯甲酰基,C2-C12-烷酰基,C2-C12烷氧基羰基,苯氧基羰基,或为OR8,SR9,SOR9,SO2R9 ,NR10R11; 条件是R3,R4,R5,R6,R7,R'4,R'5和R'6中的至少一个是OR8,SR9或NR10R

    Photosensitive resin composition
    8.
    发明授权
    Photosensitive resin composition 有权
    感光树脂组合物

    公开(公告)号:US07829257B2

    公开(公告)日:2010-11-09

    申请号:US09734635

    申请日:2000-12-12

    IPC分类号: G03C1/00

    CPC分类号: C08F2/50 G03F7/031

    摘要: Photosensitive compositions comprising (A) an alkali soluble compound; (B) at least one compound, of formula I or II wherein R1 inter alia is C4-C9cycloalkanoyl, C3-C12alkenoyl, or benzoyl which is unsubstituted or substituted; Ar1 is either C6-C20aryl or C6-C20aryloyl each of which is unsubstituted or substituted; x is 2 or 3; M1 when x is 2, inter alia is a group phenylene or naphthylene, each of which optionally is substituted i.a. by OR3, SR4 or NR5R6; or M1, when x is 3, is a trivalent group, optionally substituted; R3 is for example hydrogen or C1-C12alkyl; C2-C6alkyl which is for example substituted by —OH, —SH, —CN, C3-C6alkenoxy, or —OCH2CH2CN; R4 is for example hydrogen, C1-C12alkyl, C3-C12alkenyl, cyclohexyl, or phenyl which is unsubstituted or substituted; R5 and R6 independently of each other inter alia are hydrogen, C1-C12alkyl, C2-C4hydroxyalkyl, C2-C10alkoxyalkyl, C3-C5alkenyl, C3-C8cycloalkyl, phenyl-C1-C3alkyl, C1-C4alkanoyl, C3-C6alkenoyl, benzoyl or phenyl which is unsubstituted or substituted; and (C) a photopolymerizable compound; exhibit an unexpectedly good performance, in particular in photoresist technology.

    摘要翻译: 光敏组合物,其包含(A)碱溶性化合物; (B)至少一种式I或II的化合物,其中R 1特别是C 4 -C 9环烷酰基,C 3 -C 12烯酰基或未取代或取代的苯甲酰基; Ar 1是C 6 -C 20芳基或C 6 -C 20芳酰基,其各自为未取代或取代的; x为2或3; M1当x为2时,特别是亚苯基或亚萘基,其各自任选被取代。 由OR3,SR4或NR5R6; 或M1,当x为3时,为任选取代的三价基团; R3是例如氢或C1-C12烷基; 例如被-OH,-SH,-CN,C 3 -C 6烯氧基或-OCH 2 CH 2 CN取代的C 2 -C 6烷基; R4是例如氢,C1-C12烷基,C3-C12链烯基,环己基或未取代或取代的苯基; R 5和R 6彼此独立地尤其是氢,C 1 -C 12烷基,C 2 -C 4羟烷基,C 2 -C 10烷氧基烷基,C 3 -C 5烯基,C 3 -C 8环烷基,苯基-C 1 -C 3烷基,C 1 -C 4烷酰基,C 3 -C 6烯酰基,苯甲酰基或苯基 未取代或取代; 和(C)可光聚合化合物; 表现出意想不到的良好性能,特别是在光刻胶技术中。

    Oxime ester photoinitiators with heteroaromatic groups
    9.
    发明授权
    Oxime ester photoinitiators with heteroaromatic groups 有权
    具有杂芳族基团的肟酯光引发剂

    公开(公告)号:US07648738B2

    公开(公告)日:2010-01-19

    申请号:US10535962

    申请日:2003-11-24

    IPC分类号: C07C251/60 G03F1/00 G03C1/73

    摘要: Compounds of the formulae (I), (II), (III) and (IV), wherein Ch1 is e.g. the formula (V) or (VI); Ch2 is the formula (VII) or (VIII); Het1 is for example furyl, thienyl, pyrrolyl, pyridyl, benzothienyl, quinolyl or bithienyl; each of which is optionally substituted; Het2 and Het2′ e.g. are furylene, thienylene, pyrrolylene, benzothienylene, quinolylene, furylenecarbonyl, thienylenecarbonyl, benzothienylenecarbonyl or bithienylenecarbonyl; each of which is optionally substituted; A1, and Ar1′ i.a. are phenyl, naphthyl, benzoyl or naphthoyl, each of which is optionally substituted; Ar2 is for example phenylene, optionally substituted; M i.a. is C1-C20alkylene; R1 is for example C1-C12alkyl or phenyl; R2 and R2′ for example are hydrogen or C1-C20 alkyl; exhibit an unexpectedly good performance in photopolymerization reactions.

    摘要翻译: 式(I),(II),(III)和(IV)的化合物,其中Ch1是例如。 式(Ⅴ)或(Ⅵ); Ch2是式(VII)或(VIII); Het1例如是呋喃基,噻吩基,吡咯基,吡啶基,苯并噻吩基,喹啉基或二噻吩基; 它们各自任选被取代; Het2和Het2' 呋喃基,噻吩乙烯基,吡咯基,苯并噻吩基,喹啉基,呋喃基羰基,噻吩羰基,苯并噻吩羰基或二噻吩羰基; 它们各自任选被取代; A1和Ar1'i.a. 是苯基,萘基,苯甲酰基或萘甲酰基,其各自任选被取代; Ar 2是例如亚苯基,任选被取代; 我是 是C 1 -C 20亚烷基; R1是例如C1-C12烷基或苯基; R2和R2'例如是氢或C1-C20烷基; 在光聚合反应中表现出出人意料的良好性能。

    Photosensitive resin composition
    10.
    发明授权
    Photosensitive resin composition 有权
    感光树脂组合物

    公开(公告)号:US07556843B2

    公开(公告)日:2009-07-07

    申请号:US11818073

    申请日:2007-06-13

    IPC分类号: G03F7/00 C08J3/28

    摘要: A photopolymerization process for producing pigmented and non-pigmented articles comprises irradiating with electromagnetic radiation in the range from 190 to 600 nm, or with electron beam or with X-rays a photosensitive composition which can be developed by alkali solution which composition comprises (A) a polymer containing at least one carboxylic acid group in the molecule and having a molecular weight of 200,000 or less, (B) selected α-aminoalkylphenone compounds as photoinitiators and (C) an ester of a polyol, wherein the polyol is partially or fully esterified with an ethylenically unsaturated carboxylic acid a monomeric, oligomeric or polymeric compound having at least one olefinic double bond.

    摘要翻译: 用于制备着色和非着色物品的光聚合方法包括用190-600nm范围内的电磁辐射或用电子束或X射线照射可由碱溶液显影的感光组合物,该组合物包含(A) 在分子中含有至少一个羧酸基并且分子量为200,000以下的聚合物,(B)作为光引发剂的选择的α-氨基烷基苯酮化合物和(C)多元醇的酯,其中所述多元醇部分或完全酯化 烯键式不饱和羧酸是具有至少一个烯属双键的单体,低聚物或聚合物。