Process for Preparing Acylphosphanes and Derivatives Thereof

    公开(公告)号:US20080004464A1

    公开(公告)日:2008-01-03

    申请号:US11667780

    申请日:2005-11-14

    IPC分类号: C07F9/50 C07C69/66

    摘要: The invention relates to a process for the preparation of (bis)acylphosphanes of formula I, wherein n and m are each independently of the other 1 or 2; R1 if n=1, is e.g. unsubstituted or substituted C1-C18alkyl or C2-C18alkenyl, or phenyl, R1 if n=2, is e.g. a divalent radical of the monovalent radical defined above; R2 is e.g. C1-C18alkyl, C3-C12cycloalkyl, C2-C18alkenyl, mesityl, phenyl, naphthyl; R3 is one of the radicals defined under R1; the process comprises the steps a) contacting e.g. elemental phosphorous [P]∞, P(Hal)3 with a reducing metal optionally in the presence of a catalyst or an activator in a solvent to obtain metal phosphides Me3P or Me′3P2, wherein Me is an alkali metal and Me′ is an earth alkali metal or to obtain metal polyphosphides b) optionally adding a proton source, optionally in the presence of a catalyst or an activator to obtain metal dihydrogen phosphides MePH2; c) subsequent acylation reaction with m acid halides of formula III or m carboxylic acid esters of formula IV or, in case that in formula I m=1, with one carboxylic ester of formula IV followed by one acid halide of formula III or vice versa, wherein R is the residue of an alcohol and R2 is as defined above; d) alkylation reaction subsequent reaction with an electrophilic agent R1Hal or other electrophilic agents to obtain the compounds of formula I. An oxidation step may follow to obtain mono- and bisacylphosphane oxides or mono- and bisacylphosphane sulfides, which are used as photoinitiators.

    O-acyloxime photoinitiators
    4.
    发明授权
    O-acyloxime photoinitiators 有权
    O-酰基肟光引发剂

    公开(公告)号:US06596445B1

    公开(公告)日:2003-07-22

    申请号:US09338152

    申请日:1999-06-23

    IPC分类号: C07C25164

    摘要: Oximeester compounds of the formulae I, II, III and IV wherein R1 is phenyl, C1-C20alkyl or C2-C20alkyl optionally interrupted by —O—, C2-C20alkanoyl or benzoyl, or R1 is C2-C12alkoxycarbonyl or phenoxycarbonyl; R1′ is C2-C12alkoxycarbonyl, or R1′ is phenoxycarbonyl, or R1′ is —CONR10R11 or CN; R2 is C2-C12alkanoyl, C4-C6alkenoyl, benzoyl, C2-C6alkoxycarbonyl or phenoxycarbonyl; R3, R4, R5, R6 and R7 are hydrogen, halogen, C1-C12alkyl, cyclopentyl, cyclohexyl, phenyl, benzyl, benzoyl, C2-C12alkanoyl, C2-C12alkoxycarbonyl, phenoxycarbonyl or a group OR8, SR9, SOR9, SO2R9 or NR10R11; R4′, R5′ and R6′ are hydrogen, halogen, C1-C12alkyl, cyclopentyl, cyclohexyl, phenyl, benzyl, benzoyl, C2-C12-alkanoyl, C2-C12alkoxycarbonyl, phenoxycarbonyl, or are a group OR8, SR9, SOR9, SO2R9, NR10R11; provided that at least one of R3, R4, R5, R6, R7, R′4, R′5 and R′6 is OR8, SR9 or NR10R11; R8, R9, R10 and R11 are for example hydrogen, C1-C12alkyl, phenyl; are suitable as initiators for the photopolymerization of radically polymerizable compounds.

    摘要翻译: 式I,II,III和IV其中R 1的肟酯化合物是苯基,任选被-O - ,C 2 -C 20烷酰基或苯甲酰基中断的C 1 -C 20烷基或C 2 -C 20烷基,或者R 1是C 2 -C 12烷氧基羰基或苯氧基羰基; R1'是C2-C12烷氧基羰基,或R1'是苯氧基羰基,或R1'是-CONR10R11或CN; R2是C2-C12烷酰基,C4-C6链烯酰基,苯甲酰基,C2-C6烷氧基羰基或苯氧基羰基; R3,R4,R5,R6和R7是氢,卤素,C1-C12烷基,环戊基,环己基,苯基,苄基,苯甲酰基,C2-C12烷酰基,C2-C12烷氧基羰基,苯氧基羰基或OR8,SR9,SOR9,SO2R9或NR10R11; R4',R5'和R6'为氢,卤素,C1-C12烷基,环戊基,环己基,苯基,苄基,苯甲酰基,C2-C12-烷酰基,C2-C12烷氧基羰基,苯氧基羰基,或为OR8,SR9,SOR9,SO2R9 ,NR10R11; 条件是R3,R4,R5,R6,R7,R'4,R'5和R'6中的至少一个是OR8,SR9或NR10R

    Process for preparing acylphosphanes and derivatives thereof
    6.
    发明授权
    Process for preparing acylphosphanes and derivatives thereof 有权
    制备酰基磷烷及其衍生物的方法

    公开(公告)号:US07687657B2

    公开(公告)日:2010-03-30

    申请号:US11667780

    申请日:2005-11-14

    IPC分类号: C07C69/76 C07C69/95

    摘要: The invention relates to a process for the preparation of (bis)acylphosphanes of formula I, wherein n and m are each independently of the other 1 or 2; R1 if n=1, is e.g. unsubstituted or substituted C1-C18alkyl or C2-C18alkenyl, or phenyl, R1 if n=2, is e.g. a divalent radical of the monovalent radical defined above; R2 is e.g. C1-C18alkyl, C3-C12cycloalkyl, C2-C18alkenyl, mesityl, phenyl, naphthyl; R3 is one of the radicals defined under R1; the process comprises the steps a) contacting e.g. elemental phosphorous [P]∞, P(Hal)3 with a reducing metal optionally in the presence of a catalyst or an activator in a solvent to obtain metal phosphides Me3P or Me′3P2, wherein Me is an alkali metal and Me′ is an earth alkali metal or to obtain metal polyphosphides b) optionally adding a proton source, optionally in the presence of a catalyst or an activator to obtain metal dihydrogen phosphides MePH2; c) subsequent acylation reaction with m acid halides of formula III or m carboxylic acid esters of formula IV or, in case that in formula I m=1, with one carboxylic ester of formula IV followed by one acid halide of formula III or vice versa, wherein R is the residue of an alcohol and R2 is as defined above; d) alkylation reaction subsequent reaction with an electrophilic agent R1Hal or other electrophilic agents to obtain the compounds of formula I. An oxidation step may follow to obtain mono- and bisacylphosphane oxides or mono- and bisacylphosphane sulfides, which are used as photoinitiators.

    摘要翻译: 本发明涉及制备式(I)的(双)酰基磷烷的方法,其中n和m各自独立地为1或2; 如果n = 1,则为R1。 未取代或取代的C1-C18烷基或C2-C18链烯基,或苯基,如果n = 2,则为R1。 上述定义的一价基团的二价基团; R2是例如 C 1 -C 18烷基,C 3 -C 12环烷基,C 2 -C 18烯基,三甲苯基,苯基,萘基; R3是R1下定义的基团之一; 该方法包括以下步骤:a) 元素磷[P]∞,P(Hal)3与还原金属,任选在催化剂或活化剂存在下在溶剂中,得到金属磷化物Me3P或Me'3P2,其中Me为碱金属,Me'为 碱土金属或获得金属多磷酸盐b)任选地在催化剂或活化剂存在下加入质子源以获得金属二磷化磷MePH2; c)随后与式III的酰基卤或式IV的羧酸酯的酰化反应,或在式I中m = 1的情况下,与一种式IV的羧酸酯接触,然后加入式III的酰卤,反之亦然 其中R是醇的残基,R 2如上所定义; d)烷基化反应随后与亲电子试剂R1Hal或其他亲电子试剂反应以获得式I化合物。随后可以进行氧化步骤以获得用作光引发剂的单酰基和双酰基膦烷氧化物或单酰基和双酰基磷烷硫化物。

    Alkylsulfonyloximes for high-resolution i-line photoresists of high sensitivity
    9.
    发明授权
    Alkylsulfonyloximes for high-resolution i-line photoresists of high sensitivity 有权
    用于高灵敏度的高分辨率i线光刻胶的烷基磺酰亚胺

    公开(公告)号:US06770420B2

    公开(公告)日:2004-08-03

    申请号:US10612800

    申请日:2003-07-02

    IPC分类号: G03F7004

    摘要: The invention describes the use of oxime alkyl sulfonate compounds of formula 1 R0 is either an R1—X group or R2; X is a direct bond, an oxygen atom or a sulfur atom; R1 is hydrogen, C1-C4alkyl or a phenyl group which is unsubstituted or substituted by a substituent selected from the group consisting of chloro, bromo, C1-C4alkyl and C1-C4-alkyloxy; R2 is hydrogen or C1-C4alkyl; and R3 is straight-chain or branched C1-C12alkyl which is unsubstituted or substituted by one or more than one halogen atom; as photosensitive add generator in a chemically amplified photoresist which is developable in alkaline medium and which is sensitive to radiation at a wavelength of 340 to 390 nanometers and correspondingly composed positive and negative photoresists for the above-mentioned wavelength range.

    摘要翻译: 本发明描述了式1RO的肟烷基磺酸酯化合物的使用是R1-X基团或R2; X是直接键合,氧原子或硫原子; R 1是氢,C 1 -C 4烷基或苯基, 未取代或被选自氯,溴,C 1 -C 4烷基和C 1 -C 4烷氧基的取代基取代; R 2为氢或C 1 -C 4烷基; R 3是未被取代或被一个或多于一个卤素原子取代的直链或支链C 1 -C 12烷基;作为在碱性介质中可显影并对波长340的辐射敏感的化学放大光致抗蚀剂中的感光加成发生剂 至390纳米,并且对应于上述波长范围的相应组合的正和负光致抗蚀剂。