公开(公告)号：US08711460B2

公开(公告)日：2014-04-29

申请号：US13001217

申请日：2009-06-24

申请人： Hideki Ueda ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hiroaki Tachibana

发明人： Hideki Ueda ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hiroaki Tachibana

IPC分类号： G02B26/08 ,  E05F1/08

CPC分类号： G02B26/0841 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  H04N1/1017 ,  H04N1/193

摘要： In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

摘要翻译： 在移动结构中，通过增强张力刚度或弯曲刚度，同时抑制铰链单元的扭转刚度，增加移动板的摆动运动的稳定性。 具有蜂巢部分的梯形铰链单元由双支撑杆和跨接在双支撑杆之间的横梁形成，以便可旋转地支撑移动板。 在铰链单元的蜂窝部分限制铰链单元的扭转刚性的同时增加张力刚度或抗弯刚度。

公开(公告)号：US20110188104A1

公开(公告)日：2011-08-04

申请号：US13001197

申请日：2009-06-25

申请人： Hiroaki Tachibana ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hideki Ueda

发明人： Hiroaki Tachibana ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hideki Ueda

IPC分类号： G02B26/10 ,  H02N1/00 ,  F16C11/04

CPC分类号： B81B3/0051 ,  B81B2201/042 ,  B81C2201/112 ,  B81C2203/0118 ,  B81C2203/031 ,  G02B26/0841 ,  H02N1/006 ,  Y10T403/32557

摘要： In a semiconductor mechanical structure, hinges may not be broken even when a mechanical shock is applied from outside, and thus, crashworthy is enhanced. A light scanning mirror includes a moving plate, a twin hinges constituting an axis of swing motion of the moving plate wherein an end of each hinge is connected to both ends of the moving plate, a stationary frame which is disposed to surround peripheries of the moving plate and supports another end of each of the twin hinges, and stoppers formed on the stationary frame. When the moving plate displaces in a lateral direction, the stopper contacts a side end portion of a recess of the moving plate, so that the displacement of the moving plate in the lateral direction is restrained. Thereby, the breakage of the hinges is prevented even when the mechanical shock is applied from outside.

摘要翻译： 在半导体机械结构中，即使当从外部施加机械冲击时，铰链也不会断裂，因此提高了耐撞击性。 光扫描镜包括移动板，构成移动板的摆动轴线的双铰链，其中每个铰链的端部连接到移动板的两端;固定框架，设置成围绕移动板的周边 并且支撑每个双铰链的另一端，以及形成在固定框架上的止动件。 当移动板在横向方向上移动时，止动件接触移动板的凹部的侧端部，从而抑制移动板在横向方向上的位移。 因此，即使从外部施加机械冲击，也能够防止铰链的破损。

公开(公告)号：US20110170157A1

公开(公告)日：2011-07-14

申请号：US13001217

申请日：2009-06-24

申请人： Hideki Ueda ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hiroaki Tachibana

发明人： Hideki Ueda ,  Hiroshi Noge ,  Kiyohiko Kawano ,  Hiroaki Tachibana

IPC分类号： G02B26/10 ,  E05D3/10

CPC分类号： G02B26/0841 ,  B81B3/007 ,  B81B2201/042 ,  B81B2203/0109 ,  H04N1/1017 ,  H04N1/193

摘要： In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.

摘要翻译： 在移动结构中，通过增强张力刚度或弯曲刚度，同时抑制铰链单元的扭转刚度，增加移动板的摆动运动的稳定性。 具有蜂巢部分的梯形铰链单元由双支撑杆和跨接在双支撑杆之间的横梁形成，以便可旋转地支撑移动板。 在铰链单元的蜂窝部分限制铰链单元的扭转刚性的同时增加张力刚度或抗弯刚度。

公开(公告)号：US08390586B2

公开(公告)日：2013-03-05

申请号：US12702595

申请日：2010-02-09

申请人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

发明人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

IPC分类号： G06F3/041 ,  G06F3/042

CPC分类号： G09G3/02 ,  G02B5/189 ,  G06F3/0425 ,  G09G2320/02 ,  G09G2340/0407 ,  G09G2340/0464

摘要： An image display apparatus includes an LD for emitting and modulating visible light, an optical scanning device for two-dimensionally scanning the light from the Ld on a screen in synchronism with the LD, an imaging device for picturizing an image of the image displayed on the screen, and an image processor for judging presence or absence of the pointing element such as a finger or fingers which is/are used to point out an optional position on the image based on temporal change of the image picturized by the imaging device. Even when the finger or fingers of a person is/are used as the pointing element, it is possible to judge the presence or absence of the pointing out of the image by the finger or fingers. Thereby, a number of components can be reduced. In addition, in comparison with an image display apparatus that emits invisible light detects a position of a pointing element corresponding to a photoreception timing of the invisible light reflected by the pointing element, a complex detection circuit having a high time-resolution becomes unnecessary, and it enables to simplify the configuration and to reduce manufacturing cost.

摘要翻译： 图像显示装置包括用于发射和调制可见光的LD，用于与LD同步地从屏幕上的Ld二维地扫描光的光学扫描装置，用于对显示在所述LD上的图像显示的图像进行摄像的成像装置 屏幕和图像处理器，用于基于由成像装置拍摄的图像的时间变化来判断是否用于指示图像上的可选位置的诸如手指或手指的指示元素的存在或不存在。 即使当使用人的手指或手指作为指示元件时，也可以通过手指或手指来判断图像的指示的存在或不存在。 因此，可以减少多个部件。 此外，与发出不可见光的图像显示装置相比，检测与由指示元件反射的不可见光的光接收定时对应的指示元素的位置，不需要具有高时间分辨率的复检测电路，并且 它能够简化配置并降低制造成本。

公开(公告)号：US20100171744A1

公开(公告)日：2010-07-08

申请号：US12600916

申请日：2008-05-23

申请人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

发明人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

IPC分类号： G09G5/22 ,  H03L1/00 ,  G02B26/10

CPC分类号： G02B26/0841 ,  H02N1/006

摘要： Provided is an oscillating device, which can adjust the oscillation angle and the phase of a movable plate easily with a simple constitution. A light scanning device acting as the oscillating device comprises a mirror element for oscillating the movable plate having a mirror film, a control circuit having a duty ratio adjusting unit and a function to change the duty ratio of the pulse voltage, so that it applies the pulse voltage thereby to drive a vertical comb of the mirror element, and an oscillation detecting unit for detecting the oscillations of the movable plate. On the bases of the movable plate oscillations detected by the oscillation detecting unit, the control circuit controls the duty ratio adjusting unit thereby to change the duty ratio of the pulse voltage. When the pulse voltage having the changed duty ratio is applied to the mirror element, the period of applying the voltage to the vertical comb at the oscillating time of the movable plate changes so that the phase and the oscillation angle of the oscillations of the movable plate change. By the feed-back control of the duty ratio according to the oscillations of the movable plate, the movable plate can be controlled to oscillate in the proper phase and at the proper oscillation angle.

摘要翻译： 提供了一种振荡装置，其可以以简单的结构容易地调节可动板的摆动角度和相位。 用作振荡装置的光扫描装置包括用于使具有镜面膜的可动板振荡的反射镜元件，具有占空比调节单元的控制电路和改变脉冲电压的占空比的功能， 脉冲电压，从而驱动镜元件的垂直梳齿;以及振动检测单元，用于检测可动板的振荡。 在由振荡检测单元检测到的可动板振荡的基础上，控制电路控制占空比调节单元，从而改变脉冲电压的占空比。 当具有改变的占空比的脉冲电压被施加到反射镜元件时，在可移动板的振荡时间施加到垂直梳的电压的周期改变，使得可动板的振荡的相位和振荡角 更改。 通过根据可动板的振荡的占空比的反馈控制，能够使可动板以适当的相位和适当的摆动角度进行摆动。

公开(公告)号：US08325407B2

公开(公告)日：2012-12-04

申请号：US12600916

申请日：2008-03-23

申请人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

发明人： Kiyohiko Kawano ,  Hiroshi Noge ,  Hideki Ueda

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  H02N1/006

摘要： Provided is an oscillating device, which can adjust the oscillation angle and the phase of a movable plate easily with a simple constitution. A light scanning device acting as the oscillating device comprises a mirror element for oscillating the movable plate having a mirror film, a control circuit having a duty ratio adjusting unit and a function to change the duty ratio of the pulse voltage, so that it applies the pulse voltage thereby to drive a vertical comb of the mirror element, and an oscillation detecting unit for detecting the oscillations of the movable plate. On the bases of the movable plate oscillations detected by the oscillation detecting unit, the control circuit controls the duty ratio adjusting unit thereby to change the duty ratio of the pulse voltage. When the pulse voltage having the changed duty ratio is applied to the mirror element, the period of applying the voltage to the vertical comb at the oscillating time of the movable plate changes so that the phase and the oscillation angle of the oscillations of the movable plate change. By the feed-back control of the duty ratio according to the oscillations of the movable plate, the movable plate can be controlled to oscillate in the proper phase and at the proper oscillation angle.

摘要翻译： 提供了一种振荡装置，其可以以简单的结构容易地调节可动板的摆动角度和相位。 用作振荡装置的光扫描装置包括用于使具有镜面膜的可动板振荡的反射镜元件，具有占空比调节单元的控制电路和改变脉冲电压占空比的功能， 脉冲电压，从而驱动镜元件的垂直梳齿;以及振动检测单元，用于检测可动板的振荡。 在由振荡检测单元检测到的可动板振荡的基础上，控制电路控制占空比调节单元，从而改变脉冲电压的占空比。 当具有改变的占空比的脉冲电压被施加到反射镜元件时，在可移动板的振荡时间施加到垂直梳的电压的周期改变，使得可动板的振荡的相位和振荡角 更改。 通过根据可动板的振荡的占空比的反馈控制，能够使可动板以适当的相位和适当的摆动角度进行摆动。

公开(公告)号：US07468571B2

公开(公告)日：2008-12-23

申请号：US10569101

申请日：2004-08-25

申请人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

发明人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

IPC分类号： G02B26/08 ,  H02N1/00

CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3596 ,  G02B26/02 ,  H01H59/0009 ,  H01H2001/0047

摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.

摘要翻译： 静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。 致动器被弹性地支撑到基板上，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。 提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。 副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。 两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。 运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置， 再次被锁在那里。

公开(公告)号：US20070128831A1

公开(公告)日：2007-06-07

申请号：US10572554

申请日：2004-09-12

申请人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

发明人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

IPC分类号： H01L21/30

CPC分类号： G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

摘要翻译： 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。

公开(公告)号：US08164812B2

公开(公告)日：2012-04-24

申请号：US12524375

申请日：2008-01-23

申请人： Yousuke Hagihara ,  Kiyohiko Kawano ,  Hiroshi Noge

发明人： Yousuke Hagihara ,  Kiyohiko Kawano ,  Hiroshi Noge

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G02B26/101 ,  H04N1/113

摘要： A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon layer. A moving unit, which is supported on a fixed frame through first hinges, is formed on the first silicon layer. The moving unit is divided into a plurality of regions by forming trenches (insulation structure). A supporting member formed of the oxide film and the second silicon layer is formed just below the trenches. The plurality of regions of the moving frame divided by the trenches are joined to the supporting member, so that the moving unit is swingable with the supporting member. Thereby, the supporting member is formed by simple etching processes, and thus, mechanical strength of the moving unit is ensured.

摘要翻译： 容易地制造在移动单元中设置有绝缘结构的半导体结构。 通过处理由第一硅层，氧化膜和第二硅层组成的SOI衬底来形成光学扫描镜（半导体结构）。 通过第一铰链支撑在固定框架上的移动单元形成在第一硅层上。 移动单元通过形成沟槽（绝缘结构）被分成多个区域。 由沟槽正下方形成由氧化膜和第二硅层构成的支撑构件。 由沟槽分隔的移动框架的多个区域与支撑构件接合，使得移动单元能够与支撑构件一起摆动。 因此，通过简单的蚀刻工艺形成支撑构件，因此确保了移动单元的机械强度。

公开(公告)号：US07422928B2

公开(公告)日：2008-09-09

申请号：US10572554

申请日：2004-09-12

申请人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

发明人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

IPC分类号： H01L21/00 ,  H02N1/00

CPC分类号： G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

摘要翻译： 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。