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    Electrostatically driven latchable actuator system
    1.
    发明授权
    Electrostatically driven latchable actuator system 失效
    静电驱动的可锁定致动器系统

    公开(公告)号：US07468571B2

    公开(公告)日：2008-12-23

    申请号：US10569101

    申请日：2004-08-25

    申请人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

    发明人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

    IPC分类号： G02B26/08 ,  H02N1/00

    CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3596 ,  G02B26/02 ,  H01H59/0009 ,  H01H2001/0047

    摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.

    摘要翻译： 静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。 致动器被弹性地支撑到基板上，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。 提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。 副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。 两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。 运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置， 再次被锁在那里。

    Process for fabricating a micro-electro-mechanical system with movable components
    3.
    发明申请
    Process for fabricating a micro-electro-mechanical system with movable components 有权
    用于制造具有可移动部件的微电机系统的工艺

    公开(公告)号：US20070128831A1

    公开(公告)日：2007-06-07

    申请号：US10572554

    申请日：2004-09-12

    申请人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

    发明人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

    IPC分类号： H01L21/30

    CPC分类号： G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

    摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

    摘要翻译： 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。

    Process for fabricating a micro-electro-mechanical system with movable components
    6.
    发明授权
    Process for fabricating a micro-electro-mechanical system with movable components 有权
    用于制造具有可移动部件的微机电系统的工艺

    公开(公告)号：US07422928B2

    公开(公告)日：2008-09-09

    申请号：US10572554

    申请日：2004-09-12

    申请人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

    发明人： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

    IPC分类号： H01L21/00 ,  H02N1/00

    CPC分类号： G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

    摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

    摘要翻译： 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。

    Electrostatically driven latchable actuator system
    8.
    发明申请
    Electrostatically driven latchable actuator system 失效
    静电驱动的可锁定致动器系统

    公开(公告)号：US20060261702A1

    公开(公告)日：2006-11-23

    申请号：US10569101

    申请日：2004-08-25

    申请人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

    发明人： Hiroshi Harada ,  Naomasa Oka ,  Yuji Suzuki ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Jun Ogihara ,  Kiyohiko Kawano

    IPC分类号： G02B6/26 ,  G02B26/00 ,  H02N1/00

    CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3596 ,  G02B26/02 ,  H01H59/0009 ,  H01H2001/0047

    摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.

    摘要翻译： 静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。 致动器被弹性地支撑到基板上，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。 提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。 副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。 两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。 运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置， 再次被锁在那里。