公开(公告)号：US08615350B2

公开(公告)日：2013-12-24

申请号：US12828522

申请日：2010-07-01

申请人： Hirohiko Goto ,  Toshiaki Niwa

发明人： Hirohiko Goto ,  Toshiaki Niwa

IPC分类号： G06F19/00 ,  G06F7/70 ,  B60K1/00 ,  B60Q1/00

CPC分类号： B60W20/13 ,  B60K2350/1092 ,  B60L7/18 ,  B60L7/26 ,  B60L11/14 ,  B60L2240/12 ,  B60L2240/622 ,  B60L2240/80 ,  B60L2250/16 ,  B60L2250/26 ,  B60T1/10 ,  B60T7/042 ,  B60T2270/604 ,  B60W10/08 ,  B60W10/18 ,  B60W10/184 ,  B60W20/00 ,  B60W30/18127 ,  B60W2510/244 ,  B60W2520/10 ,  B60W2520/28 ,  B60W2540/12 ,  B60W2550/402 ,  B60W2710/188 ,  B60W2720/106 ,  B60Y2200/90 ,  Y02T10/70 ,  Y02T10/7077 ,  Y02T10/7291 ,  Y02T10/84 ,  Y02T90/16 ,  Y02T90/162

摘要： Guidance devices, methods, and programs acquire a current speed of a vehicle and calculate a regeneration upper limit operation amount of the regenerative brake based on the current speed of the vehicle. The devices, methods, and programs acquire a deceleration target speed, acquire a deceleration target position, calculate a distance to the deceleration target position, and calculate a deceleration required operation amount of the brake pedal required for reducing the current speed of the vehicle to the deceleration target speed at the deceleration target position based on the acquired current speed of the vehicle, the acquired deceleration target speed, and the calculated distance to the deceleration target position. The devices, methods, and programs communicate guidance regarding the operation amount of the brake pedal based on the calculated regeneration upper limit operation amount and the calculated deceleration required operation amount.

摘要翻译： 引导装置，方法和程序获取车辆的当前速度，并基于车辆的当前速度计算再生制动的再生上限操作量。 装置，方法和程序获取减速目标速度，获取减速目标位置，计算到减速目标位置的距离，并计算将车辆的当前速度降低到所需的制动踏板的减速所需的操作量 基于获取的车辆当前速度，所获取的减速目标速度和到减速目标位置的计算距离，减速目标位置处的减速目标速度。 设备，方法和程序基于计算出的再生上限操作量和计算出的减速要求操作量来传达关于制动踏板的操作量的指导。

公开(公告)号：US09368381B2

公开(公告)日：2016-06-14

申请号：US13997366

申请日：2011-12-15

申请人： Hirohiko Goto

发明人： Hirohiko Goto

IPC分类号： H01L21/677 ,  B25J15/00

CPC分类号： H01L21/677 ,  B25J15/0014 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781

摘要： A transfer robot is equipped with a first hand and a second hand. The first and the second hands, each have two blades, for holding respective substrates. In addition, the transfer robot includes a rotation unit, a first extension and retraction unit, a second extension and retraction unit and an up-down unit, and by these four units, the first and the second hands can be moved to a substrate transfer relay device where substrates are placed, and to four process chambers.

摘要翻译： 传送机器人配备了第一只手和第二只手。 第一只和第二只手，每个都有两个刀片，用于保持各自的底板。 此外，传送机器人包括旋转单元，第一延伸和缩回单元，第二延伸和缩回单元和升降单元，并且通过这四个单元，第一和第二手可以移动到基板传送 继电器装置，其中放置基板，以及四个处理室。

公开(公告)号：US20140003890A1

公开(公告)日：2014-01-02

申请号：US13997366

申请日：2011-12-15

申请人： Hirohiko Goto

发明人： Hirohiko Goto

IPC分类号： H01L21/677 ,  B25J15/00

CPC分类号： H01L21/677 ,  B25J15/0014 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781

摘要： A transfer robot is equipped with a first hand and a second hand. The first and the second hands, each have two blades, for holding respective substrates. In addition, the transfer robot includes a rotation unit, a first extension and retraction unit, a second extension and retraction unit and an up-down unit, and by these four units, the first and the second hands can be moved to a substrate transfer relay device where substrates are placed, and to four process chambers.

摘要翻译： 传送机器人配备了第一只手和第二只手。 第一只和第二只手，每个都有两个刀片，用于保持各自的底板。 此外，传送机器人包括旋转单元，第一延伸和缩回单元，第二延伸和缩回单元和升降单元，并且通过这四个单元，第一和第二手可以移动到基板传送 继电器装置，其中放置基板，以及四个处理室。

公开(公告)号：US08504269B2

公开(公告)日：2013-08-06

申请号：US12884765

申请日：2010-09-17

申请人： Hirohiko Goto ,  Takashi Hayashi

发明人： Hirohiko Goto ,  Takashi Hayashi

IPC分类号： B60T8/17

CPC分类号： B60T1/10 ,  B60K2350/1092 ,  B60T7/18 ,  B60T7/22 ,  B60T2201/02 ,  B60T2210/32 ,  B60T2270/604 ,  B60W30/18127 ,  B60W50/14 ,  Y02T10/84

摘要： Systems, methods and programs are provided for a vehicle that performs braking by a regeneration brake and a friction brake. The systems, methods, and programs determine that braking by the friction brake has been performed, acquire information indicating a situation in the vicinity of the vehicle, and determine a necessary braking force required for responding to the situation in the vicinity of the vehicle. When it is determined that the braking by the friction brake has been performed in a condition where the necessary braking force is less than or equal to a maximum braking force of the regeneration brake, the systems, methods, and programs, determine energy consumed by the friction brake and communicate notification information indicating the consumed energy to a driver.

摘要翻译： 为通过再生制动器和摩擦制动器执行制动的车辆提供系统，方法和程序。 系统，方法和程序确定已经执行了摩擦制动器的制动，获取指示车辆附近的情况的信息，并且确定响应车辆附近所需的必要的制动力。 当确定在必要的制动力小于或等于再生制动器的最大制动力的条件下已经执行了摩擦制动器的制动时，系统，方法和程序确定了由 摩擦制动，并向驾驶员传达指示消耗的能量的通知信息。

公开(公告)号：US20070229015A1

公开(公告)日：2007-10-04

申请号：US11727368

申请日：2007-03-26

申请人： Masaya Yoshida ,  Hirohiko Goto

发明人： Masaya Yoshida ,  Hirohiko Goto

IPC分类号： B25J5/00 ,  G06F19/00

CPC分类号： B25J9/1676 ,  G05B19/4061 ,  G05B2219/49155

摘要： A driving mechanism controller and a driving mechanism control method reduce damage to members caused by a collision. A command producing unit produces, upon the perception of the collision of a hand with an obstacle, a reversing signal for reversing a moving direction in which the hand is being moved by a motor and a position maintaining command requesting maintaining the hand at a position with respect to a direction perpendicular to the moving direction to which the hand has been displaced by the collision. After the detection of the collision of the hand with the obstacle, the hand is retracted maintaining the hand at the position to which the hand has been dislocated by the collision to separate the hand from the obstacle. Thus a pushing force exerted by the hand on the obstacle in the direction perpendicular to the moving direction is suppressed while the hand is separated from the obstacle.

摘要翻译： 驱动机构控制器和驱动机构控制方法减少由碰撞造成的对构件的损坏。 指令生成单元根据手与障碍物的碰撞感觉产生用于反转手由马达移动的移动方向的反转信号和请求将手保持在位置的位置维持命令 相对于与移动方向垂直的方向，手由于碰撞而被移位。 在检测到手与障碍物的碰撞之后，手缩回，将手保持在手由于碰撞而脱位的位置，以将手与障碍物分开。 因此，在手与障碍物分离的同时，抑制由手施加在障碍物上的与移动方向垂直的方向的推力。

公开(公告)号：US07260448B2

公开(公告)日：2007-08-21

申请号：US10959163

申请日：2004-10-07

申请人： Hirohiko Goto ,  Shiro Oda

发明人： Hirohiko Goto ,  Shiro Oda

IPC分类号： G06F7/00

CPC分类号： H01L21/67259 ,  H01L21/67781 ,  H01L21/681 ,  H01L21/68707 ,  Y10S414/137

摘要： A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.

摘要翻译： 一种基板保持装置，包括：保持构件，其构造成保持基板，所述保持构件沿着预定排列方向布置并且可沿着所述布置方向移动; 互锁机构，联动所述保持构件，用于沿着所述排列方向同时坐标移动，以改变所述保持构件之间相对于所述排列方向的间隔; 用于驱动所述保持构件至少沿所述排列方向移动的驱动单元; 以及控制单元，用于根据关于沿着排列方向布置的基板的布置状况的映射信息，分别控制驱动单元将保持构件移动到基​​板取出位置，其中保持构件能够保持基板。

公开(公告)号：US07043335B2

公开(公告)日：2006-05-09

申请号：US10826356

申请日：2004-04-19

申请人： Tetsuya Yoshida ,  Hirohiko Goto

发明人： Tetsuya Yoshida ,  Hirohiko Goto

IPC分类号： G06F19/00

CPC分类号： H01L21/681 ,  H01L21/67265 ,  H01L21/68707

摘要： A regression mirror reflects light from a light projector in a reflecting direction opposite an incident direction. A light receiver combined with the light projector in a unitary unit receives the reflected light from the regression mirror. A detecting unit including an optical sensing unit having the light projector, the light receiver and the reflecting member is disposed so that a wafer is disposed in a moving path along which an optical path of the optical sensing unit moves relative to the wafer. An information-acquiring unit acquires position information of the detecting unit relative to the wafer, an arithmetic unit calculates mapping information about an arrangement of the wafer based on the position information and light-reception information provided by the light receiver.

摘要翻译： 回归镜反射来自与投影方向相反的反射方向的光投射器的光。 以单一单元与光投影仪组合的光接收器接收来自回归反射镜的反射光。 一种检测单元，包括具有光投射器的光学感测单元，光接收器和反射构件，使得晶片设置在光学传感单元的光路相对于晶片移动的移动路径中。 信息获取单元获取相对于晶片的检测单元的位置信息，运算单元基于由光接收器提供的位置信息和光接收信息来计算关于晶片布置的映射信息。

公开(公告)号：US08747049B2

公开(公告)日：2014-06-10

申请号：US13019624

申请日：2011-02-02

申请人： Hirohiko Goto

发明人： Hirohiko Goto

IPC分类号： B25J15/00 ,  B25J9/04 ,  B25J9/02 ,  B25J9/10

CPC分类号： H01L21/67742 ,  B25J9/043 ,  B25J11/0095

摘要： A transferring apparatus 1 includes a revolving base 13, two hand mechanisms 13 and 14, and two hand drive mechanisms 30 and 40. The hand mechanisms 13 and 14 are provided at a revolving base 13 so as to be rotatable about rotation axes L2 and L3, respectively. The hand mechanisms 13 and 14 are configured to be individually rotatable by hand drive mechanisms 30 and 40, respectively. Each of the hand mechanisms 13 and 14 includes an arm 20, a hand 21, and an interlock mechanism 26. The arms 21 are provided at the revolving link so as to be rotatable about the rotation axes L2 and L3, respectively. The hands 20 are respectively provided at the arms 21 so as to be rotatable about the hand axes L4 and L5, respectively. The interlock mechanism 26 is configured such that a reduction ratio of the hand 21 to the arm 20 is 1.55, and the arm 20 and the hand 21 operate in conjunction with each other.

摘要翻译： 传送装置1包括旋转基座13，两个手动机构13和14以及两个手动驱动机构30和40.手动机构13和14设置在旋转基座13上，以便能绕旋转轴线L2和L3旋转 ， 分别。 手动机构13和14分别被手动驱动机构30和40分别旋转。 每个手动机构13和14包括臂20，手21和互锁机构26.臂21设置在旋转连杆处，以分别围绕旋转轴线L2和L3旋转。 手20分别设置在臂21处，以分别围绕手轴L4和L5旋转。 互锁机构26被构造为使得手21与臂20的减速比为1.55，并且臂20和手21彼此结合操作。

公开(公告)号：US20050123383A1

公开(公告)日：2005-06-09

申请号：US10959163

申请日：2004-10-07

申请人： Hirohiko Goto ,  Shiro Oda

发明人： Hirohiko Goto ,  Shiro Oda

IPC分类号： B25J15/00 ,  B25J15/08 ,  B65B69/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/67259 ,  H01L21/67781 ,  H01L21/681 ,  H01L21/68707 ,  Y10S414/137

摘要： A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.

摘要翻译： 一种基板保持装置，包括：保持构件，其构造成保持基板，所述保持构件沿着预定排列方向布置并且可沿着所述布置方向移动; 互锁机构，联动所述保持构件，用于沿着所述排列方向同时坐标移动，以改变所述保持构件之间相对于所述排列方向的间隔; 用于驱动所述保持构件至少沿所述排列方向移动的驱动单元; 以及控制单元，用于根据关于沿着排列方向布置的基板的布置状况的映射信息，分别控制驱动单元将保持构件移动到基​​板取出位置，其中保持构件能够保持基板。