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    Stage device
    1.
    发明授权
    Stage device 有权
    舞台装置

    公开(公告)号：US08823309B2

    公开(公告)日：2014-09-02

    申请号：US13391962

    申请日：2010-09-17

    申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

    发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

    IPC分类号： G03B27/42 ,  H01L21/027

    CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

    摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

    摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

    Stage Device
    2.
    发明申请
    Stage Device 有权
    舞台装置

    公开(公告)号：US20120145920A1

    公开(公告)日：2012-06-14

    申请号：US13391962

    申请日：2010-09-17

    申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

    发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

    IPC分类号： G21K5/10 ,  H02K41/02

    CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

    摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

    摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

    Specimen stage apparatus and specimen stage positioning control method
    3.
    发明授权
    Specimen stage apparatus and specimen stage positioning control method 有权
    试样台装置和试样台定位控制方法

    公开(公告)号：US08076651B2

    公开(公告)日：2011-12-13

    申请号：US12415720

    申请日：2009-03-31

    申请人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

    发明人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

    摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

    摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

    SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD
    4.
    发明申请
    SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD 有权
    样本级设备和样本定位控制方法

    公开(公告)号：US20090250625A1

    公开(公告)日：2009-10-08

    申请号：US12415720

    申请日：2009-03-31

    申请人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

    发明人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

    IPC分类号： G21K5/10

    CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

    摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

    摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

    Paper-leaves conveying apparatus
    6.
    发明授权
    Paper-leaves conveying apparatus 失效

    公开(公告)号：US06629691B2

    公开(公告)日：2003-10-07

    申请号：US09822464

    申请日：2001-04-02

    申请人： Yuichi Niiyama ,  Akira Shimasaki ,  Akihiko Nakamoto ,  Nobuo Shibata

    发明人： Yuichi Niiyama ,  Akira Shimasaki ,  Akihiko Nakamoto ,  Nobuo Shibata

    IPC分类号： B65H102

    CPC分类号： B65H1/025 ,  B65H2404/311 ,  B65H2701/1916 ,  B65H2801/21

    摘要： In a paper-leaves conveying means for conveying a plurality of paper leaves, set together in a bundle in a depositing section, toward a paper-leaves feeding position where a separating/supplying belt exists, an arm is provided which is designed to be moved toward the paper-leaves feeding position in a protruding condition into the interior of the depositing section for supporting side surfaces of the paper leaves, and further to be retreated instantaneously from the interior of the depositing section immediately before the last paper leaf existing between the arm and the separating/supplying belt is handed over to the separating/supplying belt side. Thus, the arm can support the paper leaves until immediately before they are handed over to the separating/supplying belt, which eliminates the occurrence of the falling-down of the paper leaves at the paper-leaves feeding position. In addition, the feeding control of the paper leaves are accurately implemented by the over-press detection of the paper leaves or the thickness detection of the paper leaves.

    Paper-leaves separating/supplying method and apparatus
    7.
    发明授权
    Paper-leaves separating/supplying method and apparatus 失效
    纸叶分离/供给方法和装置

    公开(公告)号：US06702275B2

    公开(公告)日：2004-03-09

    申请号：US09824235

    申请日：2001-04-03

    申请人： Yuichi Niiyama ,  Akira Shimasaki ,  Akihiko Nakamoto ,  Nobuo Shibata

    发明人： Yuichi Niiyama ,  Akira Shimasaki ,  Akihiko Nakamoto ,  Nobuo Shibata

    IPC分类号： B65H314

    CPC分类号： B65H1/025 ,  B65H3/124 ,  B65H3/48 ,  B65H31/3072 ,  B65H2301/42265 ,  B65H2301/51212 ,  B65H2404/311 ,  B65H2701/1916

    摘要： In a paper-leaves separating/supplying apparatus comprising a rotary separating/supplying belt, a vacuum suction device and a separating/supplying device, the vacuum suction device takes up one by one a plurality of paper leaves set together and conveyed as far as a position at which they come into contact with a belt surface of the separating/supplying belt so that the paper leaf is attached onto the belt surface and is fed toward the downstream side in accordance with the rotary motion of the separating/supplying belt. The belt surface of the separating/supplying belt is placed in a state perpendicular to a traveling plane of the paper leaves or in a state inclined toward the paper leaves. With this construction, when the paper leaves are fed successively, the preceding paper leaf coming previously into contact with the belt surface is attracted and held on the separating/supplying belt in a state parallel with or inclined toward the succeeding paper leaf so that the weight of the succeeding paper leaf hardly fall on the preceding paper leaf. This minimizes the contact pressure between the preceding paper leaf and the succeeding paper leaf, thus achieving smooth feeding of the paper leaves.

    摘要翻译： 在包括旋转分离/供给带，真空抽吸装置和分离/供给装置的纸叶分离/供给装置中，真空吸附装置一个接一个地将多个纸叶一起收起并输送到一个 它们与分离/供给带的带表面接触的位置，使得纸叶被附着到带表面上，并且根据分离/供给带的旋转运动被输送到下游侧。 分离/供给带的带表面被放置在垂直于纸叶的行进平面的状态中或者以朝向纸叶倾斜的状态。 利用这种结构，当连续供给纸张时，预先与带表面接触的前一个纸叶以与后面的纸张平行或倾斜的状态被吸引并保持在分离/供给带上，使得重量 的后续纸叶几乎不在前面的纸叶上。 这样可以最小化前一纸张与后一纸张的接触压力，从而实现纸张的顺利进纸。

    Welding position detecting apparatus
    9.
    发明授权
    Welding position detecting apparatus 失效
    焊接位置检测装置

    公开(公告)号：US4667082A

    公开(公告)日：1987-05-19

    申请号：US812844

    申请日：1985-12-23

    申请人： Nobuo Shibata ,  Akira Hirai ,  Jun Nakajima ,  Kenji Mori ,  Toshio Akatsu

    发明人： Nobuo Shibata ,  Akira Hirai ,  Jun Nakajima ,  Kenji Mori ,  Toshio Akatsu

    IPC分类号： B23K9/12 ,  B23K9/127 ,  B23Q35/128 ,  G01B11/00 ,  B23K9/10

    CPC分类号： B23K9/1274 ,  B23Q35/128 ,  G05B2219/45135 ,  G05B2219/4701

    摘要： A welding position detecting apparatus provided on a welding torch which forms an arc between a welding wire and a groove face on a work piece. The apparatus has an optical system for irradiating the groove face with a converging ray at a point in advance of the point of the arc so as to form a groove face crossing image, and an observing optical system which introduces this groove face crossing image and an arc image into its field of view and by which the groove face crossing image and the arc image are detected at the same time.

    摘要翻译： 一种焊接位置检测装置，其设置在焊炬上，焊炬在工件上的焊丝与槽面之间形成电弧。 该装置具有光学系统，用于在弧的点之前的点处以会聚光照射槽面，以形成沟面交叉图像;以及观察光学系统，其将该沟面交叉图像和 将弧形图像转换成其视野并同时检测凹槽面交叉图像和圆弧图像。