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公开(公告)号：US08076651B2
公开(公告)日：2011-12-13
申请号：US12415720
申请日：2009-03-31
申请人： Masahiro Koyama , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
发明人： Masahiro Koyama , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/202 , H01J2237/2485 , H01L21/68
摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.
摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。
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公开(公告)号：US20090250625A1
公开(公告)日：2009-10-08
申请号：US12415720
申请日：2009-03-31
申请人： Masahiro KOYAMA , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
发明人： Masahiro KOYAMA , Hironori Ogawa , Nobuo Shibata , Masaru Matsushima , Toshinori Kobayashi , Shuichi Nakagawa
IPC分类号： G21K5/10
CPC分类号： H01J37/20 , H01J37/28 , H01J2237/0216 , H01J2237/202 , H01J2237/2485 , H01L21/68
摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.
摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。
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公开(公告)号：US5092729A
公开(公告)日：1992-03-03
申请号：US602679
申请日：1990-10-24
IPC分类号： H01J37/20 , H01J37/252 , H01J37/30 , H01J37/317 , H01L21/027 , H01L21/66 , H01L21/677 , H01L21/683
CPC分类号： H01L21/67748 , H01L21/6831
摘要： A wafer transporting apparatus comprising at least one carrier for supporting a substantially circular thin wafer having a flat plane, the carrier including a supporting base for supporting the wafer thereon, and a electrostatic chuck provided in the supporting base and having a contacting surface which face-wise contacts the flat plane of the wafer supported on the supporting base. The electrostatic chuck attracts the wafer so that the flat plane of the wafer contacts the contacting surface of the electrostatic chuck when the electrostatic chuck is energized. A holder holds the wafer at a position which has a predetermined positional relationship with respect to the supporting base. The carrier is selectively transported between a plurality of stations including a work station, fixing device for fixing the carrier transported to the work station at a predetermined position in the work station, and an arrangement for energizing the electrostatic chuck when the carrier is fixed at the predetermined position in the work station and deenergizing the electrostatic chuck when the carrier is apart from the predetermined position.
摘要翻译： 一种晶片输送装置，包括至少一个载体，用于支撑具有平坦平面的基本上圆形的薄晶片，所述载体包括用于在其上支撑晶片的支撑基座和设置在所述支撑基座中并具有接触表面的静电卡盘， 明智地接触支撑在支撑基座上的晶片的平面。 当静电卡盘通电时，静电卡盘吸引晶片，使得晶片的平面与静电卡盘的接触表面接触。 保持器将晶片保持在相对于支撑基座具有预定位置关系的位置。 载体在包括工作站的多个站之间选择性地传送，用于固定在工作站中的预定位置处传送到工作站的载体的固定装置，以及当载体固定在工作站时使静电卡盘通电的装置 在工作站中的预定位置，并且当托架离开预定位置时静电卡盘断电。
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公开(公告)号：US07136088B2
公开(公告)日：2006-11-14
申请号：US10847457
申请日：2004-05-18
申请人： Yasutoshi Yoshida , Takahiko Kitano , Yutaka Higurashi , Takashi Ueda , Toshinori Kobayashi , Toshiyuki Takatsu , Nozomu Oishi
发明人： Yasutoshi Yoshida , Takahiko Kitano , Yutaka Higurashi , Takashi Ueda , Toshinori Kobayashi , Toshiyuki Takatsu , Nozomu Oishi
IPC分类号： B41J27/00
CPC分类号： G03G15/04072
摘要： A support apparatus is configured to ease the series of work operations for adjusting the height of laser scan unit. The support apparatus supports a laser scan unit which is utilized within an image forming apparatus. The support apparatus see has a mounting plate which has laser scan unit mounted thereon. The laser scan unit cooperates with a photo conductor when the laser scan unit is mounted on mounting plate. The support apparatus has a support wall which supports the mounting plate within a cabinet. The support wall extends vertically within the image forming apparatus. An adjustment mechanism is positioned along the vertical extent of the support wall and adjusts a height of an end of the mounting plate.
摘要翻译： 支撑装置被配置为简化用于调整激光扫描单元的高度的一系列工作操作。 支撑装置支撑在图像形成装置内使用的激光扫描单元。 支撑装置具有安装有激光扫描单元的安装板。 当激光扫描单元安装在安装板上时，激光扫描单元与光导体协作。 支撑装置具有将安装板支撑在机壳内的支撑壁。 支撑壁在图像形成装置内垂直延伸。 调节机构沿着支撑壁的垂直方向定位并调节安装板的端部的高度。
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公开(公告)号：US06659441B2
公开(公告)日：2003-12-09
申请号：US10206343
申请日：2002-07-29
IPC分类号： G02B718
CPC分类号： H01L21/68 , B23Q1/58 , B23Q1/621 , B23Q17/2495
摘要： In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.
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公开(公告)号：US06446950B2
公开(公告)日：2002-09-10
申请号：US09793941
申请日：2001-02-27
IPC分类号： G02B718
CPC分类号： H01L21/68 , B23Q1/58 , B23Q1/621 , B23Q17/2495
摘要： In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables aid are linked with each other by an elastic body.
摘要翻译： 一种行进工作台装置，包括：引导单元，用于引导行进台。 在保持滚子引导件的刚性的同时，防止与引导单元的精度相关的样品台的变形，例如轨道安装的精度偏差和辊的精度。 这样可以在样品台上的条形镜单元和样品之间保持一定的距离。 为此，现有技术的Y台（上表）被细分为行进台以保持滚子引导件和样品台以将样品安装在其上。 这些表由一个销固定，该销可以比通过弹性体彼此连接的工作台更容易变形。
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公开(公告)号：US20050168565A1
公开(公告)日：2005-08-04
申请号：US10847457
申请日：2004-05-18
申请人： Yasutoshi Yoshida , Takahiko Kitano , Yutaka Higurashi , Takashi Ueda , Toshinori Kobayashi , Toshiyuki Takatsu , Nozomu Oishi
发明人： Yasutoshi Yoshida , Takahiko Kitano , Yutaka Higurashi , Takashi Ueda , Toshinori Kobayashi , Toshiyuki Takatsu , Nozomu Oishi
CPC分类号： G03G15/04072
摘要： A support apparatus is configured to ease the series of work operations for adjusting the height of laser scan unit. The support apparatus support laser scan unit which is utilized within an image forming apparatus. The support apparatus comprises mounting plate which has laser scan unit mounted thereon. Laser scan unit cooperates with a photo conductor when laser scan unit is mounted on mounting plate. The support apparatus comprises support wall which supports mounting plate within cabinet. Support wall extends vertically within the image forming apparatus. Adjustment mechanism is positioned along the vertical extent of the support wall and adjusts a height of an end of mounting plate.
摘要翻译： 支撑装置被配置为简化用于调整激光扫描单元的高度的一系列工作操作。 支持装置支持在图像形成装置内使用的激光扫描单元。 支撑装置包括安装有激光扫描单元的安装板。 当激光扫描装置安装在安装板上时，激光扫描装置与光导体配合使用。 支撑装置包括支撑壁，其支撑机柜内的安装板。 支撑壁在图像形成装置内垂直延伸。 调整机构沿着支撑壁的垂直方向定位，并调节安装板端部的高度。
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公开(公告)号：US5142791A
公开(公告)日：1992-09-01
申请号：US709317
申请日：1991-06-03
CPC分类号： G03F7/70716 , B23Q1/34 , B23Q1/36 , B23Q1/621 , B23Q5/408 , B23Q5/50 , Y10T74/20207
摘要： An apparatus for positioning a sample comprises a fine adjustment stage and a coarse adjustment stage. The fine adjustment stage is held by three Z axis fine adjustment driving structures above the first base. The fine adjustment stage has a number of through holes. The fine adjustment stage is provided X and Y axes fine adjustment driving structures other than the Z axis fine adjustment driving structures. The coarse adjustment stage comprises the second base which is provided above the first base and a number of protrusions which are provided dispersively on the second base. The coarse adjustment stage is connected to X and Y axes coarse adjustment driving structures through flexible and elastic members. The sectional areas of the protrusions are selected to a size which is movable freely within the through holes, respectively. By adjusting the Z axis fine adjustment driving structures, a sample hold base is held either the coarse adjustment stage or the fine adjustment stage.
摘要翻译： 用于定位样品的装置包括微调台和粗调阶段。 微调阶段由位于第一基座上方的三个Z轴微调驱动结构保持。 微调阶段有多个通孔。 在微调阶段中，设置除了Z轴微调驱动结构之外的X轴和Y轴微调驱动结构。 粗调阶段包括设置在第一基座上方的第二基座和分散地设置在第二基座上的多个突起。 粗调阶段通过柔性和弹性构件连接到X和Y轴粗调驱动结构。 突起的截面积分别选择为在通孔内可自由移动的尺寸。 通过调整Z轴微调驱动结构，可以将样本保持基座保持在粗调阶段或微调阶段。
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