公开(公告)号：US07489145B2

公开(公告)日：2009-02-10

申请号：US11636389

申请日：2006-12-08

申请人： Hiroshi Matoba ,  Ryohei Tanaka ,  Shuji Omae ,  Shigeki Amadatsu

发明人： Hiroshi Matoba ,  Ryohei Tanaka ,  Shuji Omae ,  Shigeki Amadatsu

IPC分类号： G01R27/08

CPC分类号： H05H1/46 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/32935

摘要： A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.

摘要翻译： 高频测量单元包括用于检测高频信号的信号检测器和用于存储校准系数Cmin和Cmax的校准系数存储器，用于校准在最低限频率fmin处检测到的值A a和 分别为适当的测量值Asmin和适当的测量值Asmax的最上限频率fmax。 高频测量单元还包括用于检测高频信号的频率fm的频率检测单元，用于计算频率fm的校准系数Cm的校准系数计算单元和用于校准检测到的值Am的校准单元 通过使用由校准系数计算单元计算出的校准系数Cm，通过信号检测器到适当的测量值Asm。

公开(公告)号：US20070152678A1

公开(公告)日：2007-07-05

申请号：US11636389

申请日：2006-12-08

申请人： Hiroshi Matoba ,  Ryohei Tanaka ,  Shuji Omae ,  Shigeki Amadatsu

发明人： Hiroshi Matoba ,  Ryohei Tanaka ,  Shuji Omae ,  Shigeki Amadatsu

IPC分类号： G01R35/00

CPC分类号： H05H1/46 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/32935

摘要： A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.

摘要翻译： 高频测量单元包括用于检测高频信号的信号检测器和用于存储校准系数Cmin和Cmax的校准系数存储器，用于校准在最低限频率fmin处检测到的值A a和 分别为适当的测量值Asmin和适当的测量值Asmax的最上限频率fmax。 高频测量单元还包括用于检测高频信号的频率fm的频率检测单元，用于计算频率fm的校准系数Cm的校准系数计算单元和用于校准检测到的值Am的校准单元 通过使用由校准系数计算单元计算出的校准系数Cm，通过信号检测器到适当的测量值Asm。

公开(公告)号：US08203859B2

公开(公告)日：2012-06-19

申请号：US11954436

申请日：2007-12-12

申请人： Shuji Omae ,  Kosuke Maeda ,  Ryohei Tanaka ,  Hideo Ito

发明人： Shuji Omae ,  Kosuke Maeda ,  Ryohei Tanaka ,  Hideo Ito

IPC分类号： H02M5/00 ,  H02P11/00

CPC分类号： H01J37/32174 ,  H01J37/32091 ,  H01J37/32183 ,  H03H7/40

摘要： A high frequency device for supplying a high frequency power to a load, the high frequency device includes: an oscillating unit that can vary an oscillation frequency; a high frequency power supplying unit that serves as a power source by amplifying an oscillation signal output from the oscillating unit for supplying the high frequency power to the load; a reflected-wave information calculating unit that calculates reflected wave information on a reflected wave power, and outputs the reflected wave information; a frequency control unit that controls the oscillation frequency of the oscillating unit so as to lower the reflected wave information; an impedance adjusting unit that is disposed at a downstream of the high frequency power supplying unit in a power supplying direction, and that has at least one variable reactance element which can be controlled; and an element control unit that controls the variable reactance element of the impedance adjusting unit so as to lower the reflected wave information.

摘要翻译： 一种用于向负载提供高频电力的高频装置，所述高频装置包括：可改变振荡频率的振荡单元; 高频供电单元，通过放大从所述振荡单元输出的用于向所述负载提供高频功率的振荡信号，作为电源; 反射波信息计算单元，其计算反射波功率的反射波信息，并输出反射波信息; 频率控制单元，其控制所述振荡单元的振荡频率以降低所述反射波信息; 阻抗调整单元，其设置在所述高频供电单元的供电方向的下游，并且具有可控制的至少一个可变电抗元件; 以及元件控制单元，其控制阻抗调节单元的可变电抗元件，以便降低反射波信息。

公开(公告)号：US20060220656A1

公开(公告)日：2006-10-05

申请号：US11391115

申请日：2006-03-28

申请人： Ryohei Tanaka ,  Hiroshi Matoba

发明人： Ryohei Tanaka ,  Hiroshi Matoba

IPC分类号： G01R27/00

CPC分类号： H05H1/46 ,  H01J37/32082 ,  H01J37/32174 ,  H01J37/32935 ,  H03H7/40

摘要： A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.

摘要翻译： 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器，用于检测负载的功率和来自负载的功率的功率检测器，反射系数计算器，用于基于对负载的功率的检测来计算反射系数， 频率检测器，其使所述发电机在预定频率范围内以各种频率产生高频功率，以获得给出所计算的反射系数的最小值的频率;以及电源控制器，用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。

公开(公告)号：US07292047B2

公开(公告)日：2007-11-06

申请号：US11391115

申请日：2006-03-28

申请人： Ryohei Tanaka ,  Hiroshi Matoba

发明人： Ryohei Tanaka ,  Hiroshi Matoba

IPC分类号： G01R27/00

CPC分类号： H05H1/46 ,  H01J37/32082 ,  H01J37/32174 ,  H01J37/32935 ,  H03H7/40

摘要： A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.

摘要翻译： 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器，用于检测负载的功率和来自负载的功率的功率检测器，反射系数计算器，用于基于对负载的功率的检测来计算反射系数， 频率检测器，其使所述发电机在预定频率范围内以各种频率产生高频功率，以获得给出所计算的反射系数的最小值的频率;以及电源控制器，用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。

公开(公告)号：US20050069128A1

公开(公告)日：2005-03-31

申请号：US10966173

申请日：2004-09-29

申请人： Takeshi Inoue ,  Hiroshi Matoba ,  Ryohei Tanaka ,  Toyokazu Kitano

发明人： Takeshi Inoue ,  Hiroshi Matoba ,  Ryohei Tanaka ,  Toyokazu Kitano

IPC分类号： G06F7/00 ,  G06F21/00 ,  H01L21/82 ,  H03K19/173 ,  H04L9/00

CPC分类号： G06F21/34 ,  G06F21/10 ,  H04L9/00 ,  H04L2209/56

摘要： Configuration-wiring information is generated by a function-restricted netlist. A data-writing device writes the generated information to FPGAs. The restriction-lifting section lifts the restriction of the restricted configuration-wiring data. Then, a bit stream is generated based on the configuration-wiring data. The bit stream is encrypted in the encryption section and then decrypted in the decryption section. The decrypted data is written to the FPGA by the data writing section. A dongle stores permitted writing count information contracted with an IP vendor. A remaining writing count is calculated based on the writing count information every time the writing to the FPGA is performed. When the remaining writing count becomes zero, the functional restriction lifting and the decryption are prohibited, so that IP netlist cannot be written to the FPGA.

摘要翻译： 配置接线信息由功能受限制的网表生成。 数据写入设备将生成的信息写入FPGA。 限制提升部分提升了限制配置接线数据的限制。 然后，基于配置布线数据生成位流。 比特流在加密部分被加密，然后在解密部分解密。 解密的数据由数据写入部分写入FPGA。 加密狗商店允许与IP供应商签订的书面计数信息。 每次执行对FPGA的写入时，基于写入计数信息计算剩余写入计数。 当剩余写入次数为零时，禁止功能限制提升和解密，因此IP网表不能写入FPGA。

公开(公告)号：US07489206B2

公开(公告)日：2009-02-10

申请号：US11360491

申请日：2006-02-24

申请人： Hiroyuki Kotani ,  Hirotaka Takei ,  Ryohei Tanaka ,  Hiroshi Matoba

发明人： Hiroyuki Kotani ,  Hirotaka Takei ,  Ryohei Tanaka ,  Hiroshi Matoba

IPC分类号： H03B1/00

CPC分类号： H03H7/40

摘要： A high-frequency power device including: an oscillator; a high-frequency power supplier; a reflection coefficient calculator; a discharge signal output unit; and a frequency controller, wherein the frequency controller: instructs the oscillator to oscillate the oscillation signal at a first oscillation frequency for the period of time while a discharge signal is not in a state showing that the discharge has been commenced or in a state where the discharge is regarded as having been commenced; then instructs the oscillator to change the first oscillation frequency to a second oscillation frequency immediately after the discharge signal changes into the states; and then controls the oscillation frequency so that the absolute value is made small.

摘要翻译： 一种高频功率器件，包括：振荡器; 高频电源; 反射系数计算器 放电信号输出单元; 以及频率控制器，其中，所述频率控制器：指示所述振荡器在一段时间内以第一振荡频率振荡所述振荡信号，而放电信号不处于表示所述放电已经开始的状态，或者所述频率控制器 卸货被视为已经开始; 然后指示振荡器在放电信号变为状态之后立即将第一振荡频率改变为第二振荡频率; 然后控制振荡频率使绝对值变小。

公开(公告)号：US20060220573A1

公开(公告)日：2006-10-05

申请号：US11360491

申请日：2006-02-24

申请人： Hiroyuki Kotani ,  Hirotaka Takei ,  Ryohei Tanaka ,  Hiroshi Matoba

发明人： Hiroyuki Kotani ,  Hirotaka Takei ,  Ryohei Tanaka ,  Hiroshi Matoba

IPC分类号： H01J7/24

CPC分类号： H03H7/40

摘要： A high-frequency power device including: an oscillator; a high-frequency power supplier; a reflection coefficient calculator; a discharge signal output unit; and a frequency controller, wherein the frequency controller: instructs the oscillator to oscillate the oscillation signal at a first oscillation frequency for the period of time while a discharge signal is not in a state showing that the discharge has been commenced or in a state where the discharge is regarded as having been commenced; then instructs the oscillator to change the first oscillation frequency to a second oscillation frequency immediately after the discharge signal changes into the states; and then controls the oscillation frequency so that the absolute value is made small.

公开(公告)号：US08686711B2

公开(公告)日：2014-04-01

申请号：US13048104

申请日：2011-03-15

申请人： Ryohei Tanaka ,  Yoshifumi Ibuki

发明人： Ryohei Tanaka ,  Yoshifumi Ibuki

IPC分类号： G01R23/02

CPC分类号： H01J37/32183 ,  H01J37/32935

摘要： A method for calibrating a high frequency measuring device so as to accurately measure plasma processing parameters within a chamber. A calibration parameter is calculated from a first set of three reference loads measured by a high frequency measurement device. A second calibration parameter is calculated from S parameters measured between a connection point where the high-frequency measuring device is connected and the inside of the chamber of a plasma processing device. A second set of three reference loads, which include the impedance previously calculated and encompass a range narrower than that encompassed by the first set of three reference loads, is measured with the reference loads in the chamber. Another calibration parameter is calculated from the measured impedances of the second set of three reference loads measured by the high- frequency measuring device, and the true values of those impedances, and a detected voltage signal and a detected current signal are calibrated using the above calibration parameters.

摘要翻译： 一种用于校准高频测量装置以精确测量腔室内的等离子体处理参数的方法。 根据由高频测量装置测量的第一组三个参考载荷来计算校准参数。 从连接高频测量装置的连接点与等离子体处理装置的室内测量的S参数计算出第二校准参数。 使用腔室中的参考负载测量第二组三个参考负载，其包括先前计算的阻抗并且包含比由第一组三个参考负载包围的范围窄的范围。 从由高频测量装置测量的第二组三个参考载荷的测量阻抗计算出另一个校准参数，并且使用上述校准校准那些阻抗的真实值，检测到的电压信号和检测到的电流信号 参数。

公开(公告)号：US07492817B2

公开(公告)日：2009-02-17

申请号：US11056449

申请日：2005-02-11

申请人： Ryohei Tanaka ,  Toyokazu Kitano

发明人： Ryohei Tanaka ,  Toyokazu Kitano

IPC分类号： H03H7/30

CPC分类号： H03H21/0012

摘要： An adaptive digital filter includes a filtering circuit and a coefficient renewal circuit. The filtering circuit has a coefficient a defined by a fundamental formula: a[n+1]=a[n]+β·e[n]·q[n]/p[n]. β is a number greater than 0 and smaller than 2, e[n] is a difference between the input and the output of the filter, and q[n] and p[n] are formulas. The renewal circuit calculates a renewal value of the coefficient a. The coefficient renewal circuit calculates 2m (m is an integer) greater than p[n] in the fundamental formula, and also calculates the renewal value of the coefficient a in accordance with an execution formula: a[n+1]=a[n]+β·e[n]·q[n]/2m in place of the fundamental formula.

摘要翻译： 自适应数字滤波器包括滤波电路和系数更新电路。 滤波电路具有由基本公式a [n + 1] = a [n] + beta.e [n] .q [n] / p [n]定义的系数α。 β是大于0且小于2的数，e [n]是滤波器的输入和输出之间的差，q [n]和p [n]是公式。 更新电路计算系数a的更新值。 系数更新电路在基本公式中计算大于p [n]的2m（m是整数），并且还根据执行公式计算系数a的更新值：a [n + 1] = a [n ] + beta.e [n] .q [n] / 2m代替基本公式。