公开(公告)号：US20110254178A1

公开(公告)日：2011-10-20

申请号：US13142057

申请日：2009-12-16

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Yukihiko Yamashita ,  Ken Nanaumi ,  Akitoshi Tanimoto

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Yukihiko Yamashita ,  Ken Nanaumi ,  Akitoshi Tanimoto

IPC分类号： H01L23/28 ,  G03F7/20 ,  G03F7/004

CPC分类号： H01L21/312 ,  G03F7/0233 ,  G03F7/0236 ,  G03F7/40 ,  H01L21/02118 ,  H01L21/02282 ,  H01L21/563 ,  H01L21/76801 ,  H01L21/76802 ,  H01L23/293 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/13 ,  H01L2224/10126 ,  H01L2224/73104 ,  H01L2224/73203 ,  H01L2924/01004 ,  H01L2924/01009 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01016 ,  H01L2924/01019 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/10253 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/00

摘要： The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.

摘要翻译： 本发明的正性感光性组合物包括具有酚羟基的碱溶性树脂，通过光产生酸的化合物，热交联剂和丙烯酸树脂。 可以提供可以用碱性水溶液显影的正色调感光组合物，具有足够高的灵敏度和分辨率，并且可以形成具有优异的粘合性和耐热冲击性的抗蚀剂图案。

公开(公告)号：US08426985B2

公开(公告)日：2013-04-23

申请号：US13060763

申请日：2009-09-02

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

IPC分类号： H01L23/52 ,  H01L23/48 ,  H01L29/40

CPC分类号： G03F7/0233 ,  G03F7/0045 ,  G03F7/40 ,  H01L2224/13

摘要： A positive tone photosensitive composition comprising: (A) an alkali-soluble resin having a phenolic hydroxyl group; (B) a phenol resin modified by a compound having an unsaturated hydrocarbon group containing 4 to 100 carbon atoms; (C) a compound that generates an acid by the action of light; (D) a thermal cross-linker that crosslinks the ingredient (A) and the ingredient (B) by heating; and (E) a solvent.

摘要翻译： 一种正性感光性组合物，其含有：（A）具有酚性羟基的碱溶性树脂; （B）由具有4〜100个碳原子的不饱和烃基的化合物改性的酚醛树脂; （C）通过光的作用产生酸的化合物; （D）通过加热交联成分（A）和成分（B）的热交联剂; 和（E）溶剂。

公开(公告)号：US08461699B2

公开(公告)日：2013-06-11

申请号：US13142057

申请日：2009-12-16

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Yukihiko Yamashita ,  Ken Nanaumi ,  Akitoshi Tanimoto

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Yukihiko Yamashita ,  Ken Nanaumi ,  Akitoshi Tanimoto

IPC分类号： H01L23/29 ,  G03C1/00

CPC分类号： H01L21/312 ,  G03F7/0233 ,  G03F7/0236 ,  G03F7/40 ,  H01L21/02118 ,  H01L21/02282 ,  H01L21/563 ,  H01L21/76801 ,  H01L21/76802 ,  H01L23/293 ,  H01L23/525 ,  H01L23/5329 ,  H01L24/13 ,  H01L2224/10126 ,  H01L2224/73104 ,  H01L2224/73203 ,  H01L2924/01004 ,  H01L2924/01009 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01016 ,  H01L2924/01019 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/10253 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/00

摘要： The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.

摘要翻译： 本发明的正性感光性组合物包括具有酚羟基的碱溶性树脂，通过光产生酸的化合物，热交联剂和丙烯酸树脂。 可以提供可以用碱性水溶液显影的正色调感光组合物，具有足够高的灵敏度和分辨率，并且可以形成具有优异的粘合性和耐热冲击性的抗蚀剂图案。

公开(公告)号：US20110204528A1

公开(公告)日：2011-08-25

申请号：US13060763

申请日：2009-09-02

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

IPC分类号： H01L23/28 ,  G03F7/004 ,  G03F7/20 ,  H01L23/58

CPC分类号： G03F7/0233 ,  G03F7/0045 ,  G03F7/40 ,  H01L2224/13

摘要： A positive tone photosensitive composition comprising: (A) an alkali-soluble resin having a phenolic hydroxyl group; (B) a phenol resin modified by a compound having an unsaturated hydrocarbon group containing 4 to 100 carbon atoms; (C) a compound that generates an acid by the action of light; (D) a thermal cross-linker that crosslinks the ingredient (A) and the ingredient (B) by heating; and (E) a solvent.

摘要翻译： 一种正性感光性组合物，其含有：（A）具有酚性羟基的碱溶性树脂; （B）由具有4〜100个碳原子的不饱和烃基的化合物改性的酚醛树脂; （C）通过光的作用产生酸的化合物; （D）通过加热交联成分（A）和成分（B）的热交联剂; 和（E）溶剂。

公开(公告)号：US09786576B2

公开(公告)日：2017-10-10

申请号：US12741854

申请日：2008-11-07

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

IPC分类号： B32B3/30 ,  G03F7/20 ,  G03F7/004 ,  H01L23/31 ,  G03F7/023 ,  G03F7/40 ,  H01L23/00

CPC分类号： H01L23/3171 ,  G03F7/0236 ,  G03F7/40 ,  H01L23/3114 ,  H01L24/13 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05024 ,  H01L2224/05124 ,  H01L2224/05572 ,  H01L2224/056 ,  H01L2924/10253 ,  H01L2924/15788 ,  H01L2924/181 ,  Y10T428/24479 ,  H01L2924/00 ,  H01L2924/00014

摘要： A positive-type photosensitive resin composition includes (A) a phenol resin modified by a compound having an unsaturated hydrocarbon group having 4 to 100 carbon atoms; (B) a compound that produces an acid by light; (C) a thermal crosslinking agent; and (D) a solvent. The positive-type photosensitive resin composition according to the present invention can be developed by an alkaline aqueous solution, and an effect thereof is that a resist pattern having sufficiently high sensitivity and resolution, excellent adhesion, and good thermal shock resistance can be formed.

公开(公告)号：US20110250396A1

公开(公告)日：2011-10-13

申请号：US12741854

申请日：2008-11-07

申请人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

发明人： Hiroshi Matsutani ,  Takumi Ueno ,  Alexandre Nicolas ,  Ken Nanaumi

IPC分类号： B32B3/30 ,  G03F7/20 ,  G03F7/004

CPC分类号： H01L23/3171 ,  G03F7/0236 ,  G03F7/40 ,  H01L23/3114 ,  H01L24/13 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05024 ,  H01L2224/05124 ,  H01L2224/05572 ,  H01L2224/056 ,  H01L2924/10253 ,  H01L2924/15788 ,  H01L2924/181 ,  Y10T428/24479 ,  H01L2924/00 ,  H01L2924/00014

摘要： A positive-type photosensitive resin composition includes (A) a phenol resin modified by a compound having an unsaturated hydrocarbon group having 4 to 100 carbon atoms; (B) a compound that produces an acid by light; (C) a thermal crosslinking agent; and (D) a solvent. The positive-type photosensitive resin composition according to the present invention can be developed by an alkaline aqueous solution, and an effect thereof is that a resist pattern having sufficiently high sensitivity and resolution, excellent adhesion, and good thermal shock resistance can be formed.

摘要翻译： 正型感光性树脂组合物包含（A）通过具有4〜100个碳原子的不饱和烃基的化合物改性的酚醛树脂; （B）通过光产生酸的化合物; （C）热交联剂; 和（D）溶剂。 根据本发明的正型感光性树脂组合物可以通过碱性水溶液显影，其效果是可以形成具有足够高的灵敏度和分辨率，优异的粘附性和良好的耐热冲击性的抗蚀剂图案。