Method for manufacturing semiconductor device having trench filled with polysilicon
    1.
    发明授权
    Method for manufacturing semiconductor device having trench filled with polysilicon 失效
    制造具有填充有多晶硅的沟槽的半导体器件的方法

    公开(公告)号:US06624044B2

    公开(公告)日:2003-09-23

    申请号:US09852690

    申请日:2001-05-11

    IPC分类号: H01L2176

    摘要: First, a trench of a semiconductor substrate is filled with a polysilicon film deposited on the surface of the semiconductor substrate. A selective thin film having etching selectivity with respect to the polysilicon film is formed on the polysilicon film. Then, the selective thin film is etched (etched back) so that a part of the selective thin film remains in a depression of the polysilicon film, as a self-aligning mask. The polysilicon film is further etched with the self-aligning mask, thereby forming a polysilicon embedded layer in the trench with a flat surface.

    摘要翻译: 首先,半导体衬底的沟槽填充有沉积在半导体衬底的表面上的多晶硅膜。 在多晶硅膜上形成具有相对于多晶硅膜的蚀刻选择性的选择性薄膜。 然后,作为自对准掩模,选择性薄膜被蚀刻(回蚀刻),使得一部分选择性薄膜保持在多晶硅膜的凹陷中。 用自对准掩模进一步蚀刻多晶硅膜,从而在沟槽中形成具有平坦表面的多晶硅嵌入层。

    Manufacturing method of semiconductor device
    2.
    发明授权
    Manufacturing method of semiconductor device 失效
    半导体器件的制造方法

    公开(公告)号:US07037788B2

    公开(公告)日:2006-05-02

    申请号:US10786107

    申请日:2004-02-26

    IPC分类号: H01L21/336

    摘要: By improving profile of impurity concentration in a channel portion of an FET or an IGBT of a trench gate type, variation of threshold value is lessened, and a destruction caused by current concentration is prevented while suppressing deterioration of cut-off characteristics. An island of a base region of p-type is formed in a semiconductor substrate of n-type by carrying out high acceleration ion implantation twice followed by annealing, so that the impurity concentration profile in a channel portion changes gradually in a depth direction. Accordingly, it is possible to lessen variation of the threshold value and to reduce pinch resistance while at the same time improving sub-threshold voltage coefficient and conductance characteristics.

    摘要翻译: 通过改善FET或沟槽栅极型IGBT的沟道部分中的杂质浓度分布,可以减小阈值的变化,同时抑制截止特性劣化的电流集中的破坏。 通过进行高加速度离子注入两次然后退火,在n型半导体衬底中形成p型基区的岛,使得沟道部分中的杂质浓度分布在深度方向上逐渐变化。 因此,可以减小阈值的变化并减小钳位电阻,同时提高次阈值电压系数和电导特性。

    Manufacturing method of semiconductor device
    3.
    发明授权
    Manufacturing method of semiconductor device 有权
    半导体器件的制造方法

    公开(公告)号:US06448139B2

    公开(公告)日:2002-09-10

    申请号:US09875026

    申请日:2001-06-07

    IPC分类号: H01L21336

    摘要: A semiconductor substrate has a trench for forming a gate insulation film and a gate electrode therein, or an insulated isolation isolating a semiconductor element like a transistor from other elements. The trench is formed by anisotropic dry etching. After that, a shape of the trench is improved so that a bottom portion and an opening portion are rounded or tapered by a wet process using a mixed solution containing hydrofluoric acid and nitric acid. By modifying the shape of the trench, electrical characteristics of the trench are improved. For example, an oxide film formed in the trench has high quality, whereby a gate withstanding voltage is improved.

    摘要翻译: 半导体衬底具有用于在其中形成栅极绝缘膜和栅电极的沟槽,或者与其他元件隔离半导体元件如晶体管的绝缘隔离。 沟槽由各向异性干蚀刻形成。 之后,使用含有氢氟酸和硝酸的混合溶液,通过湿法将沟槽的形状改善,使得底部和开口部分成圆形或锥形。 通过改变沟槽的形状,改善了沟槽的电特性。 例如,形成在沟槽中的氧化膜具有高质量,从而提高了栅极耐压。

    Image formation apparatus capable of preventing access to improper USB memory, and control method for image formation apparatus
    5.
    发明授权
    Image formation apparatus capable of preventing access to improper USB memory, and control method for image formation apparatus 有权
    能够防止访问不正确的USB存储器的图像形成装置,以及用于图像形成装置的控制方法

    公开(公告)号:US08135875B2

    公开(公告)日:2012-03-13

    申请号:US12131658

    申请日:2008-06-02

    申请人: Hiroyasu Ito

    发明人: Hiroyasu Ito

    IPC分类号: G06F3/00

    摘要: Determination is made whether acceptance of a job on a USB memory is permitted or not. When in a USB memory job acceptance permitted state, a USB memory job selection display process is executed. When in a USB memory job acceptance prohibited state, a USB memory plural load prohibition display process is executed. When in a USB memory job acceptance prohibited state, the relevant display screen is continuously provided. Therefore, the user is provided with the relevant display screen to be prompted confirmation of the loading of a USB memory.

    摘要翻译: 确定是否允许在USB存储器上接受作业。 在USB存储器工作允许状态下,执行USB存储器作业选择显示处理。 当处于禁止USB存储器工作的状态时,执行USB存储器多重负载禁止显示处理。 当在USB存储器工作被接受禁止状态时,连续提供相关的显示屏幕。 因此,向用户提供相关的显示屏幕以提示确认USB存储器的加载。

    Semiconductor device having capacitor, transistor and diffusion resistor and manufacturing method thereof
    7.
    发明申请
    Semiconductor device having capacitor, transistor and diffusion resistor and manufacturing method thereof 有权
    具有电容器,晶体管和扩散电阻器的半导体器件及其制造方法

    公开(公告)号:US20090160017A1

    公开(公告)日:2009-06-25

    申请号:US12285577

    申请日:2008-10-09

    申请人: Hiroyasu Ito

    发明人: Hiroyasu Ito

    IPC分类号: H01L29/86 H01L21/20

    摘要: In manufacturing a semiconductor device including a substrate having a (111)-plane orientation and an off-set angle in a range between 3 degrees and 4 degrees, a capacitor, a transistor and a diffusion resistor are formed in the substrate, each of which are separated by a junction separation layer. A first silicon nitride film is formed by low pressure CVD over a surface of the substrate except a bottom portion of a contact hole and a portion over the junction separation layer, and a silicon oxide film is formed by low pressure CVD over the first silicon nitride film. A second silicon nitride film as a protecting film is formed by plasma CVD so as to cover the semiconductor device finally. Therefore, the semiconductor device having high reliability can be obtained.

    摘要翻译: 在制造包括具有(111)平面取向的基板和在3度和4度之间的范围内的偏移角的半导体器件时,在基板中形成电容器,晶体管和扩散电阻器,每个电容器 被连接分离层分离。 通过低压CVD在基板的表面上形成第一氮化硅膜,除了接触孔的底部和接合分离层之上的部分之外,并且通过低压CVD在第一氮化硅上形成氧化硅膜 电影。 通过等离子体CVD形成作为保护膜的第二氮化硅膜,以最终覆盖半导体器件。 因此,可以获得具有高可靠性的半导体器件。

    Apparatus for controlling acousto-optic tunable filter and method of selecting wavelength
    8.
    发明授权
    Apparatus for controlling acousto-optic tunable filter and method of selecting wavelength 有权
    用于控制声光可调滤波器的设备和选择波长的方法

    公开(公告)号:US07181094B2

    公开(公告)日:2007-02-20

    申请号:US11213955

    申请日:2005-08-30

    IPC分类号: G02F1/335 H04J14/02 H04B10/00

    CPC分类号: G02F1/113

    摘要: A radio-frequency-signal generator generates an RF signal. An optical monitor monitors a first intensity of a reference signal and a second intensity of a drop signal. A reference-frequency determining unit determines, based on the first intensity, a first frequency of an RF signal that causes the AOTF to output the reference signal. A temperature detecting unit detects a temperature of the AOTF. A frequency calculating unit calculates a second frequency of an RF signal that causes the AOTF to output a drop signal of a desired wavelength. A control unit controls the RF-signal generator to generate the RF signal of the second frequency calculated.

    摘要翻译: 射频信号发生器产生RF信号。 光学监视器监视参考信号的第一强度和下降信号的第二强度。 参考频率确定单元基于第一强度确定使AOTF输出参考信号的RF信号的第一频率。 温度检测单元检测AOTF的温度。 频率计算单元计算使AOTF输出所需波长的液滴信号的RF信号的第二频率。 控制单元控制RF信号发生器以产生所计算的第二频率的RF信号。

    Semiconductor device and method of manufacturing the same
    9.
    发明授权
    Semiconductor device and method of manufacturing the same 失效
    半导体装置及其制造方法

    公开(公告)号:US06960511B2

    公开(公告)日:2005-11-01

    申请号:US10642889

    申请日:2003-08-18

    摘要: A semiconductor device, which can prevent a current capability from deteriorating with time, is disclosed. A P-channel type LDMOS is formed in an N-type monocrystal silicon substrate. The P-channel type LDMOS includes: a P-type impurity diffusion layer formed in a well shape so as to reach a predetermined depth; a channel well layer formed by double-diffusing N-type impurities; a source diffusion layer; a potential fixing electrode; drain-contact electrode; a LOCOS oxide film; a gate electrode; a drain electrode; a source electrode; and so on. Especially, the gate electrode is formed so as to overlap onto the LOCOS oxide film, and its protrusion amount onto the LOCOS oxide film (gate overlap length O/L) is set to about 10 μm, which is substantially ½ of a width size of the LOCOS oxide film.

    摘要翻译: 公开了能够防止电流能力随时间劣化的半导体装置。 在N型单晶硅衬底中形成P沟道型LDMOS。 P沟道型LDMOS包括:形成为良好形状以便达到预定深度的P型杂质扩散层; 通过双扩散N型杂质形成的沟道阱层; 源极扩散层; 潜在的固定电极; 漏极接触电极; LOCOS氧化膜; 栅电极; 漏电极; 源电极; 等等。 特别地,栅电极被形成为与LOCOS氧化物膜重叠,并且其在LOCOS氧化物膜上的突出量(栅极重叠长度O / L)被设定为大约10μm,大约是宽度尺寸的1/2 LOCOS氧化膜。

    Image communicating apparatus
    10.
    发明授权
    Image communicating apparatus 失效
    图像通信装置

    公开(公告)号:US5414525A

    公开(公告)日:1995-05-09

    申请号:US139758

    申请日:1993-10-25

    申请人: Hiroyasu Ito

    发明人: Hiroyasu Ito

    摘要: An image communicating apparatus comprises:an input device to input image data;a dividing circuit to divide the input image data into a plurality of blocks each of which is constructed by a predetermined number of pixels, an encoder to encode the image data on a unit basis of the blocks divided by the dividing circuit;and a transmission unit for allocating the data divided and encoded by the dividing circuit and the encoder to an arbitrary channel among a plurality of information channels on a block unit basis.

    摘要翻译: 一种图像通信装置,包括:输入装置,输入图像数据; 分割电路,用于将输入图像数据划分成由预定数量的像素构成的多个块;编码器,用于以由分割电路划分的块为单位对单元进行编码; 以及传输单元,用于以块单位为基础,将由分割电路和编码器划分和编码的数据分配给多个信息信道中的任意信道。