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公开(公告)号：US20080135779A1
公开(公告)日：2008-06-12
申请号：US12020150
申请日：2008-01-25
IPC分类号： G21K5/08
CPC分类号： H01J37/3056 , G01N1/32 , H01J27/10 , H01J37/09 , H01J2237/0458 , H01J2237/0835 , H01J2237/31745 , H01J2237/31749
摘要： An ion beam system includes a sample stage which holds a sample, an irradiation optical system which irradiates a sample held on the sample stage by an ion beam, and a charged particle beam observation system for observing a cross-section of the sample which is machined by the ion beam. The charged particle beam observation system includes a structure in which an axis along with an ion beam is extracted from the ion source and an axis along which the sample is irradiated are arranged so as to be at least transverse to one another.
摘要翻译： 离子束系统包括保持样品的样品台，通过离子束照射保持在样品台上的样品的照射光学系统和用于观察被加工的样品的横截面的带电粒子束观察系统 通过离子束。 带电粒子束观测系统包括其中从离子源提取轴和离子束的结构，并且将照射样品的轴布置成至少彼此横向。
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公开(公告)号：US07952083B2
公开(公告)日：2011-05-31
申请号：US12020150
申请日：2008-01-25
IPC分类号： G21K5/08
CPC分类号： H01J37/3056 , G01N1/32 , H01J27/10 , H01J37/09 , H01J2237/0458 , H01J2237/0835 , H01J2237/31745 , H01J2237/31749
摘要： An ion beam system includes a sample stage which holds a sample, an ion source which generates an ion beam so that the ion beam is extracted from the ion source along an extraction axis, an irradiation optical system having an irradiation axis along which the ion beam is irradiated toward the sample held on the sample stage, and a charged particle beam observation system for observing a surface of the sample which is machined by the irradiated ion beam. The extraction axis along which the ion beam is extracted from the ion source and the irradiation axis along which the sample is irradiated are inclined with respect to one another.
摘要翻译： 离子束系统包括保持样品的样品台，产生离子束的离子源，使得离子束沿着提取轴从离子源提取;照射光学系统，具有照射轴，沿着该离子束的离子束 照射到保持在样品台上的样品，以及带电粒子束观察系统，用于观察被照射的离子束加工的样品的表面。 离子束从离子源提取的提取轴和样品照射的照射轴相对于彼此倾斜。
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公开(公告)号：US07326942B2
公开(公告)日：2008-02-05
申请号：US11210732
申请日：2005-08-25
IPC分类号： H01J37/30 , H01J37/305 , H01J37/08
CPC分类号： H01J37/3056 , G01N1/32 , H01J27/10 , H01J37/09 , H01J2237/0458 , H01J2237/0835 , H01J2237/31745 , H01J2237/31749
摘要： There is a machining method which shortens a cross-section forming time by an ion beam, a machining method which shortens a machining time for separating a micro sample from a wafer, and an ion beam machining system. The ion beam machining system has a vacuum container containing a duoplasmatron, non-axially symmetric ion beam lens and stencil mask, wherein a micro sample is removed from a sample by an argon ion beam having a steep beam profile in a direction perpendicular to the cross-section. The cross-section observations for wafer inspection/defect analysis used in device manufacture can be obtained in a short time. Further, there is a inspection/analysis method which does not cause defects even if a sample is removed and a wafer is returned to the process.
摘要翻译： 存在通过离子束缩短截面形成时间的加工方法，缩短用于从晶片分离微型样品的加工时间的加工方法以及离子束加工系统。 离子束加工系统具有含有双质子，非轴对称的离子束透镜和模板掩模的真空容器，其中通过具有垂直于十字的方向的陡峭波束轮廓的氩离子束从样品中除去微量样品 -部分。 用于器件制造的晶圆检查/缺陷分析的横截面观察可以在短时间内获得。 此外，存在即使去除样品并且晶片返回到该过程也不会引起缺陷的检查/分析方法。
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公开(公告)号：US20060065854A1
公开(公告)日：2006-03-30
申请号：US11210732
申请日：2005-08-25
IPC分类号： H01J37/08
CPC分类号： H01J37/3056 , G01N1/32 , H01J27/10 , H01J37/09 , H01J2237/0458 , H01J2237/0835 , H01J2237/31745 , H01J2237/31749
摘要： There is a machining method which shortens a cross-section forming time by an ion beam, a machining method which shortens a machining time for separating a micro sample from a wafer, and an ion beam machining system. The ion beam machining system has a vacuum container containing a duoplasmatron, non-axially symmetric ion beam lens and stencil mask, wherein a micro sample is removed from a sample by an argon ion beam having a steep beam profile in a direction perpendicular to the cross-section. The cross-section observations for wafer inspection/defect analysis used in device manufacture can be obtained in a short time. Further, there is a inspection/analysis method which does not cause defects even if a sample is removed and a wafer is returned to the process.
摘要翻译： 存在通过离子束缩短截面形成时间的加工方法，缩短用于从晶片分离微型样品的加工时间的加工方法以及离子束加工系统。 离子束加工系统具有含有双质子，非轴对称的离子束透镜和模板掩模的真空容器，其中通过具有垂直于十字的方向的陡峭波束轮廓的氩离子束从样品中除去微量样品 -部分。 用于器件制造的晶圆检查/缺陷分析的横截面观察可以在短时间内获得。 此外，存在即使去除样品并且晶片返回到该过程也不会引起缺陷的检查/分析方法。
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公开(公告)号：US20110204225A1
公开(公告)日：2011-08-25
申请号：US13099670
申请日：2011-05-03
IPC分类号： H01J3/14 , H01J37/285 , H01J37/20
CPC分类号： H01J37/3056 , G01N1/32 , H01J27/10 , H01J37/09 , H01J2237/0458 , H01J2237/0835 , H01J2237/31745 , H01J2237/31749
摘要： An ion beam machining system which performs a predetermined machining of a sample by irradiating the sample with an ion beam includes a beam spot former which forms a beam spot shape of the ion beam to be non-axially symmetric in a perpendicular plane with respect to an irradiation axis of the ion beam, and an axis orientator which orients one axis of the beam spot at the ion beam irradiation position on the sample in a predetermined direction.
摘要翻译： 通过用离子束照射样品来对样品进行预定加工的离子束加工系统包括：束斑成形器，其形成离子束的束斑形状，以相对于垂直方向垂直的平面不对称 离子束的照射轴，以及定向在样品上的离子束照射位置上的束斑的一个轴在预定方向上的轴定向器。
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6.发明授权Negative electrode for lithium secondary battery, and lithium secondary battery including the same 失效锂二次电池用负极和包含锂二次电池的锂二次电池公开(公告)号：US08399129B2
公开(公告)日：2013-03-19
申请号：US12297836
申请日：2007-10-02
申请人： Masaya Ugaji , Masaki Hasegawa , Taisuke Yamamoto , Keisuke Ohara , Yasutaka Kogetsu , Takuhiro Nishimura
发明人： Masaya Ugaji , Masaki Hasegawa , Taisuke Yamamoto , Keisuke Ohara , Yasutaka Kogetsu , Takuhiro Nishimura
CPC分类号： H01M10/052 , H01M4/134 , H01M4/661 , H01M4/70
摘要： A negative electrode for a lithium secondary battery of the present invention includes a current collector and a negative electrode active material layer carried on the current collector. The negative electrode active material layer includes a plurality of columnar particles. The current collector has a surface including a depression and a plurality of projected regions defined by the depression. The projected regions carry the columnar particles. Further, the present invention relates to a lithium secondary battery using the foregoing negative electrode. According to the present invention, it is possible to provide a high-capacity negative electrode excellent mainly in cycle characteristics for a lithium secondary battery, and a lithium secondary battery including the same.
摘要翻译： 本发明的锂二次电池用负极包括在集电体上承载的集电体和负极活性物质层。 负极活性物质层包含多个柱状粒子。 集电器具有包括凹陷的表面和由凹陷限定的多个投影区域。 投影区域带有柱状颗粒。 此外，本发明涉及使用上述负极的锂二次电池。 根据本发明，可以提供主要在锂二次电池的循环特性和包括该锂二次电池的锂二次电池中优异的高容量负极。
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7.发明申请NEGATIVE ELECTRODE ACTIVE MATERIAL FOR LITHIUM ION SECONDARY BATTERY AND METHOD FOR PRODUCING THE SAME 审中-公开用于锂离子二次电池的负极电极活性材料及其制造方法公开(公告)号：US20120214067A1
公开(公告)日：2012-08-23
申请号：US13371009
申请日：2012-02-10
申请人： Natsumi GOTO , Takashi Takeuchi , Masaki Hasegawa
发明人： Natsumi GOTO , Takashi Takeuchi , Masaki Hasegawa
CPC分类号： H01M4/485 , C01G23/005 , C01G49/009 , C01P2002/54 , C01P2002/72 , C01P2004/45 , C01P2004/61 , C01P2006/11 , C01P2006/40 , H01M4/131
摘要： A negative electrode active material for a lithium ion secondary battery contains a lithium titanium complex oxide having a composition expressed as Li4Ti5-x-yFexVyO12 (where 0≦x≦0.3, 0≦y≦0.05) or Li4Ti5-x-zFexBzO12 (where 0≦x≦0.3, 0≦z≦0.3).
摘要翻译： 锂离子二次电池用负极活性物质含有具有以Li4Ti5-x-yFexVyO12表示的组成的锂钛复合氧化物（其中0＆lt; nlE; x＆nlE; 0.3,0＆nlE; y＆nlE; 0.05）或Li4Ti5-x-zFexBzO12（其中0＆ ; x＆nlE; 0.3,0和nlE; z＆nlE; 0.3）。
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8.发明授权公开(公告)号：US08211577B2
公开(公告)日：2012-07-03
申请号：US12468554
申请日：2009-05-19
申请人： Masaki Hasegawa , Takashi Takeuchi
发明人： Masaki Hasegawa , Takashi Takeuchi
IPC分类号： H01M6/16
CPC分类号： H01M10/0525 , H01G9/038 , H01G11/60 , H01M6/164 , H01M10/0569 , H01M10/4235 , H01M2300/0025 , H01M2300/0034 , H01M2300/0037 , Y02E60/13 , Y02T10/7011 , Y02T10/7022
摘要： A nonaqueous solvent for an electricity storage device according to the present invention comprises fluorine-containing cyclic saturated hydrocarbon having a structure which is represented by general formula (1) below and in which one or two substituents R are introduced into a cyclohexane ring (in general formula (1), R is represented by CnX2n+1, n is an integer of 1 or greater, at least one of (2n+1) pieces of X's is F, and the other X's are F or H).
摘要翻译： 本发明的蓄电装置用非水溶剂包含具有下述通式（1）表示的结构的含氟环状饱和烃，其中一个或两个取代基R被引入到环己烷环中 式（1）中，R由CnX2n + 1表示，n为1以上的整数，X（n + 1）个中的至少一个为F，另一个X为F或H。
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公开(公告)号：US20120130135A1
公开(公告)日：2012-05-24
申请号：US13296706
申请日：2011-11-15
IPC分类号： C07C22/00
CPC分类号： H01G11/60 , C07C22/00 , H01M10/052 , H01M10/0569 , H01M2300/0034 , Y02E60/13
摘要： Provided is a nonaqueous solvent for an electrical storage device, including a fluorine-containing, cyclic, saturated hydrocarbon represented by the following general formula (1) and having a structure obtained by introducing one or two substituents R into a cyclopentane ring: in the general formula (1), R is represented by CnX2n+1, n represents an integer of 1 or more, at least one of the 2n+1 X's represents F, and the other X's each represent H.
摘要翻译： 本发明提供一种蓄电装置的非水溶剂，其包含由以下通式（1）表示的含氟环状饱和烃，并具有通过将一个或两个取代基R引入环戊烷环而获得的结构：在一般情况下 式（1）中，R由CnX2n + 1表示，n表示1以上的整数，2n + 1 X中的至少一个表示F，另一个X表示H.
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公开(公告)号：US07566871B2
公开(公告)日：2009-07-28
申请号：US11698025
申请日：2007-01-26
CPC分类号： H01J37/265 , G06T7/0004 , G06T2207/10056 , G06T2207/30148 , H01J37/29 , H01J2237/22 , H01J2237/24592
摘要： Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image forming principles of the apparatus are different from those of conventional SEM type inspection apparatuses. In order to solve the above conventional problem, the present invention has made it possible for the user to examine such conditions as inspection speed, inspection sensitivity, etc. intuitively by displaying the relationship among the values of inspection speed S, inspection object digital signal image pixel size D, inspection object image size L, and image signal acquisition cycle P with use of a time delay integration method as a graph on an operation screen. The user can thus determine a set of values of a pixel size, an inspection image width, and a TDI sensor operation cycle easily with reference to the displayed graph.
摘要翻译： 由于用于获得具有镜电子的检查对象图像的镜像电子成像型检查装置难以优化检查条件，因为该装置的图像形成原理与常规SEM型检查装置的图像形成原理不同。 为了解决上述常规问题，本发明使得用户可以通过显示检查速度S，检查对象数字信号图像的值之间的关系来直观地检查诸如检查速度，检查灵敏度等条件 像素尺寸D，检查对象图像尺寸L和图像信号采集周期P，使用时间延迟积分方法作为操作画面上的图形。 因此，用户可以参照所显示的图形容易地确定像素尺寸，检查图像宽度和TDI传感器操作循环的一组值。
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