Wafer defect measuring method and apparatus
    1.
    发明授权
    Wafer defect measuring method and apparatus 有权
    晶圆缺陷测量方法和装置

    公开(公告)号:US06734960B1

    公开(公告)日:2004-05-11

    申请号:US09589087

    申请日:2000-06-08

    IPC分类号: G01N2100

    摘要: The depth and a relative dimensional factor of a defect present in the interior of a silicon wafer are measured, and the number of such defects is calculated. A laser beam having a larger energy than the band gap of silicon is radiated obliquely to the semiconductor wafer and a scattered beam from a defect present in a subsurface layer of the wafer is detected by an image pick-up device. The temperature of the wafer is changed to at least two temperatures of T1 and T2 or to any one of plural temperatures by means of a heater and the intensity of a scattered beam is measured. It is taken into account that the light absorbance of silicon and the penetration depth of light in silicon vary depending on temperature, to determine the depth and a relative dimensional factor of an internal defect which causes scattering of light, as well as the number of such crystal defects.

    摘要翻译: 测量存在于硅晶片内部的缺陷的深度和相对尺寸因子,并计算出这些缺陷的数量。 具有比硅的带隙大的能量的激光束被倾斜地辐射到半导体晶片,并且由图像拾取装置检测来自晶片的地下层中存在的缺陷的散射光束。 通过加热器将晶片的温度改变为T1和T2的至少两个温度或多个温度中的任何一个,并测量散射光束的强度。 考虑到硅的吸光度和硅中的光的穿透深度根据温度而变化,以确定导致光散射的内部缺陷的深度和相对尺寸因子,以及其数量 晶体缺陷。

    Process for producing ceramic fine particles, and ceramic fine particle producing apparatus used therein
    2.
    发明授权
    Process for producing ceramic fine particles, and ceramic fine particle producing apparatus used therein 有权
    陶瓷微粒的制造方法,陶瓷微粒的制造装置

    公开(公告)号:US08206623B2

    公开(公告)日:2012-06-26

    申请号:US12438249

    申请日:2008-08-27

    IPC分类号: B29B9/00

    摘要: Provided are a ceramic-fine-particle producing process making it possible to produce, with ease, ceramic fine particles which have a spherical shape close to a complete round and an excellent mono-dispersibility, and are made only of a solid component of a simple ceramic material without making a fine channel structure complicated, and an apparatus used therein for producing ceramic fine particles. The process includes the step (S100) of feeding a dispersion phase made of an aqueous liquid containing a gelling agent to act upon cooling and a ceramic material into a continuous phase made of an oily liquid containing a surfactant, thereby producing fine droplets; the step (S110) of collecting and cooling the produced fine droplets; the step (S120) of washing the cooled fine droplets; the step (S130) of drying the washed fine droplets; and the step (S140) of firing the dried fine droplets.

    摘要翻译: 提供一种陶瓷微粒生产方法,可以容易地制造具有接近整圆的球形形状和优异的单分散性的陶瓷细颗粒,并且仅由简单的固体成分制成 不使细孔结构复杂的陶瓷材料,以及用于制造陶瓷微粒的装置。 该方法包括将由含有胶凝剂的水性液体制成的分散相进行冷却的步骤(S100),将陶瓷材料进料到含有表面活性剂的油性液体的连续相中,由此产生微细的液滴; 收集并冷却所产生的微小液滴的步骤(S110) 洗涤被冷却的微细液滴的步骤(S120) 干燥洗涤后的微细液滴的步骤(S130) 以及烧制干燥的细小液滴的步骤(S140)。

    Nonvolatile memory system
    4.
    发明授权
    Nonvolatile memory system 有权
    非易失性存储器系统

    公开(公告)号:US08103899B2

    公开(公告)日:2012-01-24

    申请号:US12245203

    申请日:2008-10-03

    IPC分类号: G06F11/00

    CPC分类号: G11C16/349

    摘要: A memory system permitting a number of alternative memory blocks to be made ready in order to extend the rewritable life and thereby contributing to enhanced reliability of information storage is to be provided. The memory system is provided with a nonvolatile memory having a plurality of data blocks in predetermined physical address units and a controller for controlling the nonvolatile memory in response to an access request from outside. Each of the data blocks has areas for holding a rewrite count and error check information regarding each data area. The controller, in a read operation on the nonvolatile memory, checks for any error in the area subject to the read according to error check information and, when there is any error, if the rewrite count is greater than a predetermined value, will replace the pertinent data block with another data block or if it is not greater, correct data in the data block pertaining to the error.

    摘要翻译: 提供允许许多替代存储器块准备好以延长可重写寿命并由此有助于提高信息存储的可靠性的存储器系统。 该存储器系统具有非易失性存储器,该非易失性存储器具有预定物理地址单元中的多个数据块,以及用于响应于来自外部的访问请求来控制该非易失性存储器的控制器。 每个数据块具有用于保存关于每个数据区的重写计数和错误检查信息的区域。 控制器在非易失性存储器中的读取操作中,根据错误检查信息检查受读取区域的任何错误,并且当存在任何错误时,如果重写计数大于预定值,则将替换 与另一个数据块相关的数据块,或者如果不大于数据块,则与错误相关的数据块中的数据正确。

    NONVOLATILE MEMORY SYSTEM
    5.
    发明申请
    NONVOLATILE MEMORY SYSTEM 有权
    非易失性存储系统

    公开(公告)号:US20090037767A1

    公开(公告)日:2009-02-05

    申请号:US12245203

    申请日:2008-10-03

    IPC分类号: G06F11/00

    CPC分类号: G11C16/349

    摘要: A memory system permitting a number of alternative memory blocks to be made ready in order to extend the rewritable life and thereby contributing to enhanced reliability of information storage is to be provided. The memory system is provided with a nonvolatile memory having a plurality of data blocks in predetermined physical address units and a controller for controlling the nonvolatile memory in response to an access request from outside. Each of the data blocks has areas for holding a rewrite count and error check information regarding each data area. The controller, in a read operation on the nonvolatile memory, checks for any error in the area subject to the read according to error check information and, when there is any error, if the rewrite count is greater than a predetermined value, will replace the pertinent data block with another data block or if it is not greater, correct data in the data block pertaining to the error.

    摘要翻译: 提供允许许多替代存储器块准备好以延长可重写寿命并由此有助于提高信息存储的可靠性的存储器系统。 该存储器系统具有非易失性存储器,该非易失性存储器具有预定物理地址单元中的多个数据块,以及用于响应于来自外部的访问请求来控制该非易失性存储器的控制器。 每个数据块具有用于保存关于每个数据区的重写计数和错误检查信息的区域。 控制器在非易失性存储器中的读取操作中,根据错误检查信息检查受读取区域的任何错误,并且当存在任何错误时,如果重写计数大于预定值,则将替换 与另一个数据块相关的数据块,或者如果不大于数据块,则与错误相关的数据块中的数据正确。

    Memory storage device having a nonvolatile memory and memory controller with error check operation mode
    6.
    发明授权
    Memory storage device having a nonvolatile memory and memory controller with error check operation mode 失效
    具有非易失性存储器和具有错误检查操作模式的存储器控​​制器的存储器存储设备

    公开(公告)号:US07392457B2

    公开(公告)日:2008-06-24

    申请号:US11180538

    申请日:2005-07-14

    IPC分类号: G11C29/00

    CPC分类号: G06F11/1068

    摘要: A memory card includes a non-volatile memory, a memory controller for controlling the operation of the memory card. The memory controller is capable of providing an interface with outside according to a predetermined protocol, and performs error detection and correction of the memory information at regular time intervals or at the timing of connection of electric power supply, independently of reading out the memory information according to external access request. Therefore, it is possible to improve reliability of data retention in the non-volatile memory without the host device reading out the memory information from the non-volatile memory of the memory card.

    摘要翻译: 存储卡包括非易失性存储器,用于控制存储卡的操作的存储器控​​制器。 存储器控制器能够根据预定协议向外部提供接口,并且以规定的时间间隔或在电力供应连接的定时执行存储器信息的错误检测和校正,而不依赖于读出存储器信息 到外部访问请求。 因此,无需主机装置从存储卡的非易失性存储器中读出存储器信息,可以提高非易失性存储器中的数据保持的可靠性。

    Nonvolatile memory apparatus and data processing system
    7.
    发明授权
    Nonvolatile memory apparatus and data processing system 有权
    非易失性存储器和数据处理系统

    公开(公告)号:US07231580B2

    公开(公告)日:2007-06-12

    申请号:US10714982

    申请日:2003-11-18

    IPC分类号: G11C29/42 G11C29/52 H03M13/29

    摘要: The reliability of data is significantly increased without considerably increasing costs by performing minor data corrections within an information storage device and performing major error corrections in an information processing device. When a request to transfer user data for reading is issued from an information processing device, a control circuit transfers the user data and management data to an error detection circuit, which checks the user data for errors. If the user data contains no error, the control circuit notifies the information processing device that the user data can be transferred, and transfers it to the information processing device. If the user data contains errors, an X count error position and correction data calculation circuit uses the user data and the management data to calculate correction locations and correction data, and judges whether the correction locations are correctable. If uncorrectable (there are more correction locations than X locations), the control circuit notifies the information processing device that the user data is uncorrectable, and then transfers the user data and the management data to the information processing device.

    摘要翻译: 通过在信息存储设备内进行小数据校正并且在信息处理设备中执行主要错误校正,数据的可靠性显着增加,而不会显着增加成本。 当从信息处理装置发出用于传送用于读取的用户数据的请求时,控制电路将用户数据和管理数据传送到检错用户数据的错误检测电路。 如果用户数据不包含错误,则控制电路通知信息处理装置可以传送用户数据,并将其传送到信息处理装置。 如果用户数据包含错误,X计数错误位置和校正数据计算电路使用用户数据和管理数据来计算校正位置和校正数据,并且判断校正位置是否可校正。 如果不可校正(比X位置更多的校正位置),则控制电路向信息处理设备通知用户数据是不可校正的,然后将用户数据和管理数据传送到信息处理设备。