公开(公告)号：US06787817B2

公开(公告)日：2004-09-07

申请号：US10318244

申请日：2002-12-13

申请人： Hiroyuki Takazawa ,  Shinichiro Takatani ,  Masao Yamane ,  Masayoshi Kobayashi

发明人： Hiroyuki Takazawa ,  Shinichiro Takatani ,  Masao Yamane ,  Masayoshi Kobayashi

IPC分类号： H01L310328

CPC分类号： H01L29/66462 ,  H01L29/0657 ,  H01L29/7783

摘要： The present invention provides a semiconductor device for high frequency application having a high breakdown voltage and the method of manufacturing thereof. A region including a first conductivity type high impurity concentration semiconductor and a region including a first conductivity type low impurity concentration semiconductor are provided from an ohmic layer side at the side far from a semiconductor substrate of the end surface of a barrier layer opposite the semiconductor substrate and between the ohmic layer and a gate electrode. The sheet impurity concentration of the region including a first conductivity type low impurity concentration semiconductor is set to be lower than that between the bottom surface of the gate electrode at the side of the semiconductor substrate and the end surface of the channel layer opposite the semiconductor substrate. The sheet impurity concentration of the region including a first conductivity type high impurity concentration semiconductor is set to be higher than that of the region including a first conductivity type low impurity concentration semiconductor.

摘要翻译： 本发明提供一种具有高击穿电压的高频应用的半导体器件及其制造方法。 包括第一导电型高杂质浓度半导体的区域和包括第一导电型低杂质浓度半导体的区域从远离半导体衬底的阻挡层的端面的半导体衬底的一侧的欧姆层侧提供 并且在欧姆层和栅电极之间。 包括第一导电型低杂质浓度半导体的区域的片状杂质浓度被设定为低于半导体衬底侧的栅电极的底表面和与半导体衬底相对的沟道层的端面之间的片状杂质浓度 。 将包括第一导电型高杂质浓度半导体的区域的片状杂质浓度设定为高于包含第一导电型低杂质浓度半导体的区域的片状杂质浓度。

公开(公告)号：US5373191A

公开(公告)日：1994-12-13

申请号：US998856

申请日：1992-12-30

申请人： Toshiyuki Usagawa ,  Yoshinori Imamura ,  Hidekazu Okuhira ,  Shigeo Goto ,  Masayoshi Kobayashi ,  Shinichiro Takatani

发明人： Toshiyuki Usagawa ,  Yoshinori Imamura ,  Hidekazu Okuhira ,  Shigeo Goto ,  Masayoshi Kobayashi ,  Shinichiro Takatani

IPC分类号： H01L21/285 ,  H01L21/331 ,  H01L21/335 ,  H01L21/337 ,  H01L21/338 ,  H01L21/60 ,  H01L21/8252 ,  H01L23/485 ,  H01L29/812 ,  H01L29/80 ,  H01L23/48 ,  H01L29/06 ,  H01L29/48

CPC分类号： H01L21/76897 ,  H01L21/28587 ,  H01L21/8252 ,  H01L23/485 ,  H01L29/66318 ,  H01L29/66462 ,  H01L29/66863 ,  H01L29/66871 ,  H01L29/66924 ,  H01L29/8128 ,  H01L2924/0002

摘要： Source and drain electrode metals of a field effect transistor having a recessed gate electrode metal are directly connected to a high impurity concentration semiconductor layer which faces the gate electrode metal through an insulator film which defines the side wall of the recess. The source and drain electrode metals may be disposed so as to face the gate electrode metal through the side insulator film. With this arrangement, it is possible to lower the parasitic resistance between the gate electrode and another electrode of the field effect transistor, to lower the contact resistance between a semiconductor layer and the source and drain electrodes, to reduce the capacitance of the recess gate electrode and to increase the source-gate breakdown voltage, advantageously. The above-described arrangement is particularly suitable for a transistor employing a compound semiconductor, and can also be applied to semiconductor devices other than field effect transistors. Such semiconductor devices can readily be produced by forming a gate electrode metal with a self-alignment process using the lift-off method.

摘要翻译： 具有凹陷栅电极金属的场效应晶体管的源电极和漏电极金属通过限定凹部的侧壁的绝缘膜直接连接到面向栅电极金属的高杂质浓度半导体层。 源电极和漏电极金属可以通过侧绝缘膜设置成面对栅电极金属。 通过这种布置，可以降低场效应晶体管的栅电极和另一电极之间的寄生电阻，以降低半导体层与源电极和漏电极之间的接触电阻，以减小凹陷栅电极的电容 并且有利地增加源极栅极击穿电压。 上述布置特别适用于采用化合物半导体的晶体管，并且还可以应用于场效应晶体管以外的半导体器件。 这种半导体器件可以容易地通过使用剥离法形成具有自对准工艺的栅电极金属来制造。

公开(公告)号：US5181087A

公开(公告)日：1993-01-19

申请号：US340471

申请日：1989-04-19

申请人： Toshiyuki Usagawa ,  Yoshinori Imamura ,  Hidekazu Okuhira ,  Shigeo Goto ,  Masayoshi Kobayashi ,  Shinichiro Takatani

发明人： Toshiyuki Usagawa ,  Yoshinori Imamura ,  Hidekazu Okuhira ,  Shigeo Goto ,  Masayoshi Kobayashi ,  Shinichiro Takatani

IPC分类号： H01L21/285 ,  H01L21/331 ,  H01L21/335 ,  H01L21/337 ,  H01L21/338 ,  H01L21/60 ,  H01L21/8252 ,  H01L23/485 ,  H01L29/812

CPC分类号： H01L21/76897 ,  H01L21/28587 ,  H01L21/8252 ,  H01L23/485 ,  H01L29/66318 ,  H01L29/66462 ,  H01L29/66863 ,  H01L29/66871 ,  H01L29/66924 ,  H01L29/8128 ,  H01L2924/0002

摘要： Source and drain electrode metals of a field effect transistor having a recessed gate electrode metal are directly connected to a high impurity concentration semiconductor layer which faces the gate electrode metal through an insulator film which defines the side wall of the recess. The source and drain electrode metals may be disposed so as to face the gate electrode metal through the side insulator film. With this arrangement, it is possible to lower the parasitic resistance between the gate electrode and another electrode of the field effect transistor, to lower the contact resistance between a semiconductor layer and the source and drain electrodes, to reduce the capacitance of the recess gate electrode and to increase the source-gate breakdown voltage, advantageously. The above-described arrangement is particularly suitable for a transistor employing a compound semiconductor, and can also be applied to semiconductor devices other than field effect transistors. Such semiconductor devices can readily be produced by forming a gate electrode metal with a self-alignment process using the lift-off method.

摘要翻译： 具有凹陷栅电极金属的场效应晶体管的源电极和漏电极金属通过限定凹部的侧壁的绝缘膜直接连接到面向栅电极金属的高杂质浓度半导体层。 源电极和漏电极金属可以通过侧绝缘膜设置成面对栅电极金属。 通过这种布置，可以降低场效应晶体管的栅电极和另一电极之间的寄生电阻，以降低半导体层与源电极和漏电极之间的接触电阻，以减小凹陷栅电极的电容 并且有利地增加源极栅极击穿电压。 上述布置特别适用于采用化合物半导体的晶体管，并且还可以应用于场效应晶体管以外的半导体器件。 这种半导体器件可以容易地通过使用剥离法形成具有自对准工艺的栅电极金属来制造。

公开(公告)号：US08499924B2

公开(公告)日：2013-08-06

申请号：US13174001

申请日：2011-06-30

申请人： Masayoshi Kobayashi ,  Toru Mizuno

发明人： Masayoshi Kobayashi ,  Toru Mizuno

IPC分类号： B65G29/00

CPC分类号： G01N21/95 ,  G01N21/8803 ,  G01R31/013

摘要： A method and a system for stabilizing the sight line of a chip component being carried on two discs, for stabilizing delivery of the chip component between the two discs, and improving and stabilizing the inspection accuracy in the visual check of the chip component. This is achieved by employing a mechanism for carrying the chip component while supporting it on the horizontal plane of the first rotary disc and then carrying the chip component while suction-holding it on the vertical plane of the second rotary disc. When the chip component is carried on the first rotary disc, the upper surface and one side face of the chip component are imaged by first and second cameras. When the chip component is carried on the second rotary disc, the lower surface and the other side face of the chip component are imaged by third and fourth cameras.

摘要翻译： 一种用于稳定在两个盘上承载的芯片部件的瞄准线的方法和系统，用于稳定两个盘之间的芯片部件的传递，并且改善和稳定芯片部件的视觉检查中的检查精度。 这通过采用用于承载芯片部件的机构来实现，同时将其支撑在第一旋转盘的水平面上，然后在将其保持在第二旋转盘的垂直平面上的同时承载芯片部件。 当芯片部件承载在第一旋转盘上时，芯片部件的上表面和一个侧面由第一和第二相机成像。 当芯片部件承载在第二旋转盘上时，芯片部件的下表面和另一侧面由第三和第四相机成像。

公开(公告)号：US07987968B2

公开(公告)日：2011-08-02

申请号：US11578062

申请日：2004-09-07

申请人： Masayoshi Kobayashi ,  Toru Mizuno

发明人： Masayoshi Kobayashi ,  Toru Mizuno

IPC分类号： B65G29/00

CPC分类号： G01N21/95 ,  G01N21/8803 ,  G01R31/013

摘要： A method and a system for stabilizing the sight line of a chip component being carried on two discs, for stabilizing delivery of the chip component between the two discs, and improving and stabilizing the inspection accuracy in the visual check of the chip component. This is achieved by employing a mechanism for carrying the chip component while supporting it on the horizontal plane of the first rotary disc and then carrying the chip component while suction-holding it on the vertical plane of the second rotary disc. When the chip component is carried on the first rotary disc, the upper surface and one side face of the chip component are imaged by first and second cameras. When the chip component is carried on the second rotary disc, the lower surface and the other side face of the chip component are imaged by third and fourth cameras.

摘要翻译： 一种用于稳定在两个盘上承载的芯片部件的瞄准线的方法和系统，用于稳定两个盘之间的芯片部件的传递，并且改善和稳定芯片部件的视觉检查中的检查精度。 这通过采用用于承载芯片部件的机构来实现，同时将其支撑在第一旋转盘的水平面上，然后在将其保持在第二旋转盘的垂直平面上的同时承载芯片部件。 当芯片部件承载在第一旋转盘上时，芯片部件的上表面和一个侧面由第一和第二相机成像。 当芯片部件承载在第二旋转盘上时，芯片部件的下表面和另一侧面由第三和第四相机成像。

公开(公告)号：US20100269506A1

公开(公告)日：2010-10-28

申请号：US12662521

申请日：2010-04-21

申请人： Yoshiharu Nonaka ,  Masayoshi Kobayashi ,  Hideki Ogata

发明人： Yoshiharu Nonaka ,  Masayoshi Kobayashi ,  Hideki Ogata

IPC分类号： F02C7/22

CPC分类号： F23R3/283 ,  F23D11/386 ,  F23D2209/30 ,  F23D2214/00 ,  F23D2900/00008 ,  F23D2900/00018 ,  F23R3/10 ,  F23R3/343 ,  F23R3/50 ,  Y02T50/675

摘要： The present invention provides a fuel spray apparatus for a gas turbine engine, including: a pilot part configured to spray a fuel to be used for a diffusion combustion; a main part provided so as to surround the pilot part and configured to inject a pre-mixed gas only upon a high power operation; and a shield body constituting a purge air passage which is configured to take therein an air flowed on an upstream side relative to a fuel injection port of the main part as a purge air, and to blow off a fuel dripping from the fuel injection port toward a main air passage of the main part. The purge air passage is provided in a position opposite to a main fuel passage communicated with the fuel injection port across the shield body.

摘要翻译： 本发明提供一种燃气轮机的燃料喷射装置，其特征在于，包括：喷射待扩散燃烧用燃料的先导部， 主要部分设置成围绕引导部分并且被配置为仅在高功率操作时喷射预混合气体; 以及构成净化空气通路的屏蔽体，其构成为将相对于主要部分的燃料喷射口的上游侧的流动的空气作为吹扫空气吸入，并且将从燃料喷射口喷出的燃料吹出， 主要空气通道的主要部分。 吹扫空气通道设置在与穿过屏蔽体的燃料喷射口连通的主燃料通道相对的位置。

公开(公告)号：US20070278567A1

公开(公告)日：2007-12-06

申请号：US11882626

申请日：2007-08-03

申请人： Sumito Numazawa ,  Yoshito Nakazawa ,  Masayoshi Kobayashi ,  Satoshi Kudo ,  Yasuo Imai ,  Sakae Kubo ,  Takashi Shigematsu ,  Akihiro Ohnishi ,  Kozo Uesawa ,  Kentaro Oishi

发明人： Sumito Numazawa ,  Yoshito Nakazawa ,  Masayoshi Kobayashi ,  Satoshi Kudo ,  Yasuo Imai ,  Sakae Kubo ,  Takashi Shigematsu ,  Akihiro Ohnishi ,  Kozo Uesawa ,  Kentaro Oishi

IPC分类号： H01L29/78

CPC分类号： H01L21/28114 ,  H01L21/28185 ,  H01L21/28194 ,  H01L21/28202 ,  H01L21/28211 ,  H01L29/0696 ,  H01L29/0869 ,  H01L29/4236 ,  H01L29/42376 ,  H01L29/4238 ,  H01L29/511 ,  H01L29/513 ,  H01L29/518 ,  H01L29/66666 ,  H01L29/66734 ,  H01L29/7813 ,  H01L29/7827

摘要： In a method of fabricating a semiconductor device having a MISFET of trench gate structure, a trench is formed from a major surface of a semiconductor layer of first conductivity type which serves as a drain region, in a depth direction of the semiconductor layer, a gate insulating film including a thermal oxide film and a deposited film is formed over the internal surface of the trench, and after a gate electrode has been formed in the trench, impurities are introduced into the semiconductor substrate of first conductivity type to form a semiconductor region of second conductivity type which serves as a channel forming region, and impurities are introduced into the semiconductor region of second conductivity type to form the semiconductor region of first conductivity type which serves as a source region.

公开(公告)号：US20070205084A1

公开(公告)日：2007-09-06

申请号：US11578062

申请日：2004-09-07

申请人： Masayoshi Kobayashi ,  Toru Mizuno

发明人： Masayoshi Kobayashi ,  Toru Mizuno

IPC分类号： B65G29/00

CPC分类号： G01N21/95 ,  G01N21/8803 ,  G01R31/013

摘要： A method and a system for stabilizing the sight line of a chip component being carried on two discs, for stabilizing delivery of the chip component between the two discs, and improving and stabilizing the inspection accuracy in the visual check of the chip component. This is achieved by employing a mechanism for carrying the chip component while supporting it on the horizontal plane of the first rotary disc and then carrying the chip component while suction-holding it on the vertical plane of the second rotary disc. When the chip component is carried on the first rotary disc, the upper surface and one side face of the chip component are imaged by first and second cameras. When the chip component is carried on the second rotary disc, the lower surface and the other side face of the chip component are imaged by third and fourth cameras.

摘要翻译： 一种用于稳定在两个盘上承载的芯片部件的瞄准线的方法和系统，用于稳定两个盘之间的芯片部件的传递，并且改善和稳定芯片部件的视觉检查中的检查精度。 这通过采用用于承载芯片部件的机构来实现，同时将其支撑在第一旋转盘的水平面上，然后在将其保持在第二旋转盘的垂直平面上的同时承载芯片部件。 当芯片部件承载在第一旋转盘上时，芯片部件的上表面和一个侧面由第一和第二相机成像。 当芯片部件承载在第二旋转盘上时，芯片部件的下表面和另一侧面由第三和第四相机成像。

公开(公告)号：US5798892A

公开(公告)日：1998-08-25

申请号：US695416

申请日：1996-08-12

申请人： Masayoshi Kobayashi

发明人： Masayoshi Kobayashi

IPC分类号： G11B15/60 ,  G11B33/12 ,  G11B5/56

CPC分类号： G11B15/605 ,  G11B15/602

摘要： A magnetic tape apparatus for reading/writing data from/to a magnetic tape by magnetic heads. The magnetic tape apparatus includes a roller guide for guiding the magnetic tape, a magnetic head assembly having several magnetic heads, and a structure for aligning the magnetic tape to the magnetic heads, wherein the vertical position of the magnetic tape is determined by a lower flange of the roller guide. One feature of the present invention relates to the structure of the roller guide wherein the lower flange is separable from other members of the roller guide such that the vertical position of the magnetic head is the lower flange. Another feature of the present invention is a method for aligning the magnetic heads to a track of the magnetic tape wherein the vertical position of a keen edge formed on the lower flange assembled in the roller guide is detected by microscope.

摘要翻译： 一种用于通过磁头从/向磁带读/写数据的磁带装置。 该磁带装置包括用于引导磁带的滚子引导件，具有多个磁头的磁头组件和用于将磁带与磁头对准的结构，其中磁带的垂直位置由下凸缘 的滚子导轨。 本发明的一个特征涉及滚子导轨的结构，其中下凸缘可与滚子引导件的其它部件分离，使得磁头的垂直位置为下凸缘。 本发明的另一个特征是将磁头与磁带的磁道对准的方法，其中通过显微镜检测组装在滚子引导件中的形成在下凸缘上的锐边的垂直位置。

公开(公告)号：US5581419A

公开(公告)日：1996-12-03

申请号：US303442

申请日：1994-09-09

申请人： Masayoshi Kobayashi

发明人： Masayoshi Kobayashi

IPC分类号： G11B15/67 ,  G11B15/18 ,  G11B5/008 ,  G08B1/56

CPC分类号： G11B15/674

摘要： A magnetic tape drive for driving a magnetic tape stored in a cartridge for writing and reading data as an external storage device of a computer, etc., and equipped with a leader block at a distal end thereof, comprises a file reel having the cartridge fitted thereto, and a machine reel rotating in the same direction as the file reel while the leader block is fitted to a hub thereof, and taking up the magnetic tape, wherein data is written/read to and from the magnetic tape in a travelling path between the file reel and the machine reel. In this construction, the magnetic tape is wound at an initial tension lower than a normal tape tension at the start of winding of the magnetic tape by the machine reel until a predetermined number of turns of the magnetic tape is wound on the machine reel, and thereafter the tape is wound at a greater tension. As a result, the leader block can be correctly fixed to the hub of the machine reel, and even when a thin magnetic tape is used, read/write errors do not occur, and the apparatus can be made more compact.

摘要翻译： 一种用于驱动存储在盒中用于写入和读取数据的磁带的磁带驱动器，作为计算机的外部存储装置等，并且在其远端装备有引导块，包括：文件盘， 以及在引导块安装到其轮毂的同时沿与文件卷筒相同的方向旋转的机器卷轴，并且卷取磁带，其中数据被写入/读出磁带之间的行进路径， 文件卷轴和机器卷轴。 在这种结构中，磁带在初始张力下低于通过机器卷轴卷绕磁带的正常带张力，直到预定数量的磁带卷绕在机器卷轴上，并且 此后，磁带以更大的张力缠绕。 结果，引导块可以正确地固定到机器卷轴的轮毂上，并且即使当使用薄磁带时，也不会发生读/写错误，并且可以使装置更紧凑。