公开(公告)号：US09051203B2

公开(公告)日：2015-06-09

申请号：US13614398

申请日：2012-09-13

申请人： Hiroyuki Watanabe ,  Takayuki Imaizumi ,  Tatsuhiro Sato

发明人： Hiroyuki Watanabe ,  Takayuki Imaizumi ,  Tatsuhiro Sato

IPC分类号： B32B17/06 ,  C03B20/00 ,  C03C17/04 ,  C03C4/02 ,  C03C3/06 ,  C03C4/08 ,  C03B19/14

CPC分类号： C03B20/00 ,  C03B19/1453 ,  C03B19/1469 ,  C03C3/06 ,  C03C4/02 ,  C03C4/08 ,  C03C17/04 ,  C03C2203/44

摘要： Provided in a facile manner are a black synthetic quartz glass with a transparent layer, which meets demands for various shapes, has a black portion satisfying required light shield property and emissivity in an infrared region, keeps a purity equivalent to that of a synthetic quartz glass in terms of metal impurities, has a high-temperature viscosity characteristic comparable to that of a natural quartz glass, can be subjected to high-temperature processing such as welding, does not release carbon from its surface, and is free of bubbles and foreign matter in the transparent layer and the black quartz glass, and at an interface between the transparent layer and the black quartz glass, and a production method therefor.

摘要翻译： 以简单的方式提供了具有透明层的黑色合成石英玻璃，其满足各种形状的要求，具有满足所需遮光性的黑色部分和红外区域中的发射率，保持与合成石英玻璃相当的纯度 在金属杂质方面，具有与天然石英玻璃相当的高温粘度特性，可以进行诸如焊接的高温加工，不会从其表面释放碳，并且没有气泡和异物 在透明层和黑色石英玻璃中，以及在透明层和黑色石英玻璃之间的界面处，及其制造方法。

公开(公告)号：US20140072811A1

公开(公告)日：2014-03-13

申请号：US13614398

申请日：2012-09-13

申请人： Hiroyuki WATANABE ,  Takayuki Imaizumi ,  Tatsuhiro Sato

发明人： Hiroyuki WATANABE ,  Takayuki Imaizumi ,  Tatsuhiro Sato

IPC分类号： C03B20/00 ,  C03C4/02 ,  C03C3/06 ,  C03C17/04

CPC分类号： C03B20/00 ,  C03B19/1453 ,  C03B19/1469 ,  C03C3/06 ,  C03C4/02 ,  C03C4/08 ,  C03C17/04 ,  C03C2203/44

摘要： Provided in a facile manner are a black synthetic quartz glass with a transparent layer, which meets demands for various shapes, has a black portion satisfying required light shield property and emissivity in an infrared region, keeps a purity equivalent to that of a synthetic quartz glass in terms of metal impurities, has a high-temperature viscosity characteristic comparable to that of a natural quartz glass, can be subjected to high-temperature processing such as welding, does not release carbon from its surface, and is free of bubbles and foreign matter in the transparent layer and the black quartz glass, and at an interface between the transparent layer and the black quartz glass, and a production method therefor.

摘要翻译： 以简单的方式提供了具有透明层的黑色合成石英玻璃，其满足各种形状的要求，具有满足所需遮光性的黑色部分和红外区域中的发射率，保持与合成石英玻璃相当的纯度 在金属杂质方面，具有与天然石英玻璃相当的高温粘度特性，可以进行诸如焊接的高温加工，不会从其表面释放碳，并且没有气泡和异物 在透明层和黑色石英玻璃中，以及在透明层和黑色石英玻璃之间的界面处，及其制造方法。

公开(公告)号：US5885071A

公开(公告)日：1999-03-23

申请号：US812843

申请日：1997-03-06

申请人： Hiroyuki Watanabe ,  Tatsuhiro Sato

发明人： Hiroyuki Watanabe ,  Tatsuhiro Sato

IPC分类号： C03B20/00 ,  C03B19/09 ,  C03C17/34 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  F27B14/10 ,  B29D22/00

CPC分类号： C03C17/3411 ,  C03B19/095 ,  C30B15/10 ,  C30B35/002 ,  Y10T428/13

摘要： In order to reduce concentrations of impurities in an inner layer of a quartz crucible for pulling a silicon single crystal which comprises an outer layer made of quartz glass and an inner layer formed on the inner surface of the outer layer, a migration-preventing layer is formed between the outer and inner layers, wherein the migration-preventing layer prevents migration of the impurities such as alkaline metals included in the natural quartz glass in the outer layer to the synthetic quartz glass in the inner layer. The method of producing a crucible using a mold with an upper opening comprises the steps of: feeding a first quartz powder into the mold along an inner surface of the mold to pile up the first quartz powder in a layered structure and form a preform of the first quartz powder; melting a part of the preform by heat radiated from inside the preform; cooling the preform to solidify and form a crucible substrate of an opaque quartz glass layer; generating a high temperature gas atmosphere inside the substrate during or after formation of the substrate; feeding a second quartz powder containing aluminum or in combination with an aluminum-containing component into the gas atmosphere and melting it in the gas atmosphere; settling the second quartz powder melt flying from the gas atmosphere on an inner surface of the substrate to form an aluminum-containing intermediate quartz glass layer; feeding a third quartz powder into the gas atmosphere and melting it in the gas atmosphere; and it as settling the third quartz powder melt flying from the gas atmosphere on the inner surface of the aluminum-containing quartz glass layer to form a transparent quartz glass layer with high purity.

摘要翻译： 为了降低石英坩埚的内层中的杂质浓度，用于拉制包含由石英玻璃制成的外层和形成在外层的内表面上的内层的硅单晶，防迁移层为 形成在外层和内层之间，其中防迁移层防止包含在外层中的天然石英玻璃中的杂质如内层中的合成石英玻璃的迁移。 使用具有上部开口的模具制造坩埚的方法包括以下步骤：沿着模具的内表面将第一石英粉末进料到模具中，以堆叠结构堆积第一石英粉末，并形成预成型体 第一石英粉; 通过从预制件内部辐射的热量来熔化预成型件的一部分; 冷却预成型件以固化并形成不透明石英玻璃层的坩埚基底; 在基板形成期间或之后在基板内产生高温气体气氛; 将含有铝的第二石英粉末或与含铝组分组合进入气体气氛中并在气体气氛中熔融; 将从气体气氛中飞散的第二石英粉末熔融在基板的内表面上，形成含铝的中间石英玻璃层; 将第三石英粉放入气体气氛中并在气体气氛中熔化; 并将其沉淀在含铝石英玻璃层的内表面上从气体气氛中飞散的第三石英粉末熔融物，以形成高纯度的透明石英玻璃层。

公开(公告)号：US6136092A

公开(公告)日：2000-10-24

申请号：US377103

申请日：1999-08-19

申请人： Tatsuhiro Sato ,  Shigeo Mizuno ,  Mitsuo Matsumura ,  Hiroyuki Watanabe

发明人： Tatsuhiro Sato ,  Shigeo Mizuno ,  Mitsuo Matsumura ,  Hiroyuki Watanabe

IPC分类号： C03B20/00 ,  C03B19/09 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  C30B23/00

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B35/002 ,  Y10T428/1317

摘要： A crucible with 22 inches or more in inner diameter, which has a small deformation of the body under exposure to abundant heat radiation during pulling a single crystal, and which has no practical problem, and a method of producing the same are disclosed. The method comprises the steps of: feeding first silicon dioxide powder along an inner surface of a rotating mold having a gas permeable wall to form a piled up layer of the first silicon dioxide powder; heating the piled up layer from the inside space of the mold to have the first silicon dioxide powder molten to provide the opaque outer layer as a substrate, while vacuum suction is effected through the wall; generating a high temperature gas atmosphere in an inside space of the substrate during or after the formation of the opaque outer layer; feeding second silicon dioxide powder into the high temperature gas atmosphere to have the second silicon dioxide powder molten at least partly; and directing the second silicon dioxide powder in an at least partly molten form toward an inner surface of the substrate to have the second silicon dioxide powder deposited on the inner surface of the substrate to thereby form the transparent inner layer thereon, the transparent inner layer being of a predetermined thickness and substantially free of bubbles.

摘要翻译： 一种内径为22英寸或更大的坩埚，其在牵引单晶时在暴露于大量热辐射的同时具有较小的变形，并且没有实际的问题，并且公开了其制造方法。 该方法包括以下步骤：沿着具有透气壁的旋转模具的内表面供给第一二氧化硅粉末以形成第一二氧化硅粉末的堆积层; 从模具的内部空间加热堆叠层以使第一二氧化硅粉末熔融，以提供不透明外层作为基底，同时通过壁进行真空吸力; 在形成不透明外层期间或之后在基板的内部空间中产生高温气体气氛; 将第二二氧化硅粉末进料到高温气体气氛中以使第二二氧化硅粉末至少部分熔融; 并且将所述第二二氧化硅粉末以至少部分熔融的形式引导到所述基板的内表面，以使所述第二二氧化硅粉末沉积在所述基板的内表面上，从而在其上形成所述透明内层，所述透明内层为 具有预定厚度并且基本上没有气泡。

公开(公告)号：US6106610A

公开(公告)日：2000-08-22

申请号：US163255

申请日：1998-09-30

申请人： Hiroyuki Watanabe ,  Tatsuhiro Sato

发明人： Hiroyuki Watanabe ,  Tatsuhiro Sato

IPC分类号： C03B19/09 ,  C30B15/10 ,  C30B35/00 ,  C30B15/20

CPC分类号： C30B35/002 ,  C03B19/095 ,  C30B15/10 ,  Y02P40/57 ,  Y10S65/08

摘要： A method for producing an improved quartz glass crucible for pulling up silicon single crystals comprises forming a premolding by feeding powdered silicon dioxide into the mold and by then forming it into a layer along the inner surface of the mold; forming a crucible base body of a translucent quartz layer by heating the premolding from the inner side, thereby partially melting the powdered silicon dioxide, followed by cooling and solidifying the melt; forming a crystallization-promoter containing layer along the internal wall surface of the crucible body by scattering the crystallization promoter on the surface of the internal wall of the crucible body during or after forming the crucible base body; and forming a synthetic quartz glass inner layer by scattering and fusing a powder of silicon dioxide on the crystallization promoter-containing layer that is formed along the internal wall surface of the crucible base body.

摘要翻译： 制造用于提拉硅单晶的改进的石英玻璃坩埚的方法包括通过将粉末状二氧化硅进料到模具中，然后沿着模具的内表面将其成型为一层来形成预成型; 通过从内侧加热预成型形成半透明石英层的坩埚基体，从而部分熔化二氧化硅粉末，然后冷却和固化熔体; 通过在形成坩埚基体之前或之后将结晶促进剂散布在坩埚体的内壁表面上，沿着坩埚主体的内壁表面形成含结晶促进剂的层; 并通过在沿着坩埚基体的内壁面形成的含结晶促进剂的层上散射和熔融二氧化硅粉末来形成合成石英玻璃内层。

公开(公告)号：US5989021A

公开(公告)日：1999-11-23

申请号：US153066

申请日：1998-09-15

申请人： Tatsuhiro Sato ,  Shigeo Mizuno ,  Mitsuo Matsumura ,  Hiroyuki Watanabe

发明人： Tatsuhiro Sato ,  Shigeo Mizuno ,  Mitsuo Matsumura ,  Hiroyuki Watanabe

IPC分类号： C03B20/00 ,  C03B19/09 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00 ,  F27B14/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B35/002 ,  Y10T428/1317

摘要： A large diameter quartz crucible with an inner diameter of 22 inches or more comprises an opaque silica glass outer layer having bubbles of 10 .mu.m to 250 .mu.m in diameter and 5 mm to 20 mm in thickness and a transparent silica glass inner layer having 0.5% or less in a bubble content and 0.3 mm or more in thickness which is molten and integrated with an inner surface of the outer layer. The outer layer has an OH group concentration of 80 ppm or less and the gas pressure in a bubble in the outer layer is lower than atmospheric pressure so that a volume expansion ratio of the bubble is minimized when being heated in condition of pulling a single crystal.

摘要翻译： 内径为22英寸以上的大直径石英坩埚包括直径为10μm〜250μm，厚度为5mm〜20mm的不透明石英玻璃外层，透明石英玻璃内层为0.5 气泡含量的％以下，和熔融并与外层的内表面一体化的厚度为0.3mm以上。 外层的OH基浓度为80ppm以下，外层的气泡中的气体压力低于大气压，使得在拉拔单晶时加热时气泡的体积膨胀比最小化 。

公开(公告)号：US06280522B1

公开(公告)日：2001-08-28

申请号：US09508695

申请日：2000-03-29

申请人： Hiroyuki Watanabe ,  Hiroyuki Miyazawa ,  Tatsuhiro Sato ,  Satoshi Soeta ,  Tetsuya Igarashi

发明人： Hiroyuki Watanabe ,  Hiroyuki Miyazawa ,  Tatsuhiro Sato ,  Satoshi Soeta ,  Tetsuya Igarashi

IPC分类号： C30B1322

CPC分类号： C03B19/095 ,  C03B2201/23 ,  C03B2201/24 ,  C30B15/10 ,  C30B35/002 ,  Y10S65/08

摘要： There is provided a quartz glass crucible for pulling a silicon single crystal and a production process for the crucible, wherein an inner surface of the crucible is crystallized without addition of impurities during pulling a silicon single crystal, thereby impurities serving as causes of crystal defects being not incorporated into the silicon single crystal, so that deterioration of its inner surface is suppressed to improve a crystallization ratio, and accordingly productivity of the quartz glass crucible as well as a quality of the silicon single crystal is improved, and the quartz glass crucible for pulling a silicon single crystal comprises a crucible base body (3) made of a translucent quartz glass layer and a synthetic quartz glass layer (4) formed on an inner wall surface of the crucible base body (3), wherein a portion encircled by a brown ring on an inner surface of the quartz glass crucible is uniformly crystallized during pulling the silicon single crystal.

摘要翻译： 提供了一种用于拉制硅单晶的石英玻璃坩埚和用于坩埚的制造方法，其中在拉取硅单晶时坩埚的内表面结晶而不添加杂质，从而导致晶体缺陷的原因是 不掺入到硅单晶中，从而抑制其内表面的劣化以提高结晶化率，从而提高了石英玻璃坩埚的生产率以及硅单晶的质量，并且提高了石英玻璃坩埚 拉硅单晶包括由半透明石英玻璃层制成的坩埚基体（3）和形成在坩埚基体（3）的内壁表面上的合成石英玻璃层（4），其中包围由 石英玻璃坩埚的内表面上的棕色环在拉制硅单晶时均匀结晶。

公开(公告)号：US5917103A

公开(公告)日：1999-06-29

申请号：US653131

申请日：1996-05-24

申请人： Hiroyuki Watanabe ,  Tatsuhiro Sato ,  Hiroshi Matsui

发明人： Hiroyuki Watanabe ,  Tatsuhiro Sato ,  Hiroshi Matsui

IPC分类号： C03B23/20 ,  C03B19/04 ,  C03B19/09 ,  C03B20/00 ,  C30B15/12

CPC分类号： C03B19/095 ,  C03B23/20 ,  C30B15/12 ,  Y10S65/08 ,  Y10T117/1052

摘要： Quartz powder is fed into a rotating mold to form a crucible-like quartz powder layer body with the help of centrifugal force in the mold. The layer is melted by heating through the inner surface with an arc discharge to manufacture an outer crucible member. A hollow cylindrical inner crucible member having a beveled lower edge is welded to the outer crucible member while a temperature of the inner surface portion of the outer crucible member remains at 1400.degree. C. or higher by a remaining heat.

摘要翻译： 在模具中借助于离心力将石英粉进料到旋转模具中以形成坩埚状石英粉体层体。 该层通过电弧放电通过内表面加热熔化，以制造外坩埚构件。 将外坩埚部件的内表面部分的温度通过余热保持在1400℃以上的状态下，将具有倾斜下边缘的中空圆柱形内坩埚部件焊接到外坩埚部件。

公开(公告)号：US5637284A

公开(公告)日：1997-06-10

申请号：US620447

申请日：1996-03-22

申请人： Tatsuhiro Sato ,  Hiroyuki Watanabe ,  Werner Ponto

发明人： Tatsuhiro Sato ,  Hiroyuki Watanabe ,  Werner Ponto

IPC分类号： C02F1/28 ,  C01F7/00 ,  C01G9/00 ,  C01G51/00 ,  C01G53/00 ,  C03B19/10 ,  C03B32/00 ,  C03C1/02 ,  C08K3/00 ,  C08K3/10 ,  C08K9/04 ,  C09C1/40 ,  C01B33/18

CPC分类号： C03B19/1095 ,  C01G3/006 ,  C01G51/006 ,  C01G53/006 ,  C01G9/006 ,  C03B32/00 ,  C03C1/022 ,  C01P2002/72 ,  C01P2002/74 ,  C01P2004/80 ,  C01P2006/40

摘要： A rotating cylindrical quartz glass tube is partitioned into at least 3 chambers comprising a pre-heating chamber, a reaction chamber, and a gas desorption chamber. The process comprises pre-heating the starting quartz powder by continuously supplying it into the pre-heating chamber, refining the powder by transferring it into the reaction chamber in which the powder is brought into contact with a chlorine-containing gas atmosphere, and transferring the powder into the gas desorption chamber; the chambers may be partitioned using a sectioning plate having an opening. Alkali metal elements such as sodium and potassium, as well as transition metal elements such as iron, copper, chromium, and nickel are removed from a powder of naturally occurring quartz. The process also removes alkaline earth metal elements such as magnesium and calcium. Furthermore, it is of high productivity because it can be operated continuously to yield high purity quartz powder at a low cost.

摘要翻译： 旋转的圆柱形石英玻璃管被分隔成至少3个腔室，包括预热室，反应室和气体解吸室。 该方法包括通过将起始石英粉连续地供应到预热室中来预热起始石英粉末，通过将粉末转移到其中与含氯气体气氛接触的反应室中来精炼粉末，并将 粉末进入气体解吸室; 可以使用具有开口的分段板来分隔室。 碱性金属元素如钠和钾，以及过渡金属元素如铁，铜，铬和镍从天然存在的石英粉中去除。 该方法还除去碱土金属元素如镁和钙。 此外，由于可以连续运转以低成本生产高纯度石英粉，所以生产率高。

公开(公告)号：US08364632B2

公开(公告)日：2013-01-29

申请号：US13057231

申请日：2009-05-18

申请人： Shuichiro Sakikawa ,  Tatsuhiro Sato ,  Toyohisa Morita ,  Hirotake Yoshida

发明人： Shuichiro Sakikawa ,  Tatsuhiro Sato ,  Toyohisa Morita ,  Hirotake Yoshida

IPC分类号： G06F17/30

CPC分类号： G06F17/30575 ,  B61L27/0027 ,  G06F11/1469 ,  G06T1/60

摘要： An operation arrangement work is accelerated by improving efficiency of not only process of generating an operation arrangement proposal but also process of confirming whether the operation arrangement proposal is good or not by a user. An operation support system has an operation arrangement proposal generation part (1110) which executes automatic generation of an operation arrangement proposal, a diagram prediction part which executes simulation of train operation in the future, a diagram display part (1120) which displays an operation schedule and the operation arrangement proposal as a diagram, and a user input part which receives input of a parameter from the user. The system has a snapshot restoration part (1130) which restores snapshots of the operation arrangement proposal in an automatic generation process on the basis of a diagram change history outputted by the operation arrangement proposal generation part (1110), and a snapshot display input part (1140) which displays to the user a snapshot according to input from the user.

摘要翻译： 通过提高不仅生成操作布置方案的处理的效率，而且通过确认用户的操作安排方案是否良好的处理来加快操作布置工作。 操作支持系统具有执行动作排列方案的自动生成的操作安排提案生成部（1110），执行将来的列车运行的模拟的图预测部，显示操作进度的图表显示部（1120） 以及操作安排提案作为图，以及用户输入部分，其从用户接收参数的输入。 该系统具有快照恢复部（1130），其基于由操作安排提案生成部（1110）输出的图表变更历史，以及快照显示输入部（1130），在自动生成处理中恢复操作安排提案的快照， 1140），其根据用户的输入向用户显示快照。