公开(公告)号：US11239051B2

公开(公告)日：2022-02-01

申请号：US16481918

申请日：2017-02-13

Applicant: Hitachi High-Technologies Corporation

Inventor： Mai Yoshihara ,  Yuusuke Oominami

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/20 ,  H01J37/26 ,  H01J37/10

Abstract: An object of the invention is to provide a device for observing the same field of view with a charged particle beam device and a camera without increasing a size of a housing. A charged particle beam device according to an aspect of the invention includes: a lens barrel that irradiates a sample with a charged particle beam; an imaging unit that images an optical image of the sample; a sample table on which the sample is placed; and a stage that is movable and on which the sample table is placed, wherein when a distance between a physical central axis of the sample table and a physical optical axis of the imaging unit is defined as a first distance, and a distance between a virtual central axis of the sample table and a physical central axis of the imaging unit, or between the physical central axis of the sample table and a virtual central axis of the imaging unit, or between the virtual central axis of the sample table and the virtual central axis of the imaging unit is defined as a second distance, the second distance is shorter than the first distance.

公开(公告)号：US09812288B2

公开(公告)日：2017-11-07

申请号：US15119950

申请日：2015-01-09

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Minami Shouji ,  Takashi Ohshima ,  Yuusuke Oominami ,  Hideo Morishita ,  Kunio Harada

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

公开(公告)号：US10141157B2

公开(公告)日：2018-11-27

申请号：US15580403

申请日：2015-06-29

Applicant: Hitachi High-Technologies Corporation

Inventor： Makoto Nakabayashi ,  Yuusuke Oominami ,  Shinsuke Kawanishi

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22 ,  H01J37/26 ,  H01J37/32

Abstract: In a device for performing observation with a charged particle microscope at an atmospheric pressure using a diaphragm, while there was a demand that a distance between the diaphragm and a sample be reduced as much as possible, there was a problem that a limit for how close the diaphragm and the sample can be brought to each other was unknown in the past. In the present invention, a height adjustment member is used, and the position of a diaphragm in a charged particle beam device with respect to the height adjustment member is defined as the specific point of an optical device, so that the positional relationship between the height adjustment member and the diaphragm in the optical device is reproduced, and the height of a sample table with a Z-axis driving mechanism is adjusted so as to locate the surface of the sample at the position of the specific point of the optical device. According to this, the distance between the diaphragm and the sample can be safely and simply adjusted, and thus, an object is to adjust the distance between the diaphragm and the sample so that the distance is reduced as much as possible or the distance is fixed every time the sample is replaced.

公开(公告)号：US09875877B2

公开(公告)日：2018-01-23

申请号：US15111907

申请日：2015-02-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shinsuke Kawanishi ,  Yuusuke Oominami

IPC: G01N23/00 ,  H01J37/18 ,  H01J37/16 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2605

Abstract: In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.

公开(公告)号：US10134564B2

公开(公告)日：2018-11-20

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga Okumura ,  Takashi Ohshima ,  Yuusuke Oominami ,  Minami Shouji ,  Akiko Hisada ,  Akio Yoneyama

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.