公开(公告)号：US07254155B1

公开(公告)日：2007-08-07

申请号：US10771192

申请日：2004-02-03

申请人： Hongyu Deng ,  Thomas Lenosky ,  Giorgio Giaretta ,  Jan Lipson

发明人： Hongyu Deng ,  Thomas Lenosky ,  Giorgio Giaretta ,  Jan Lipson

IPC分类号： H01S3/082

CPC分类号： H01S5/183 ,  H01S5/105 ,  H01S2301/163 ,  H01S2301/166

摘要： A single mode high power vertical cavity surface emitting laser (VCSEL) using photonic crystals. A photonic crystal is included in at least one mirror layer of a VCSEL. The reflectivity of the photonic crystal is dependent on the wavelength and incident angle of the photons. The photonic crystal can be formed such that the VCSEL lases at a single mode. Because a single mode is generated, the aperture of the VCSEL can be enlarged to increase the power that is generated by the VCSEL for that mode. The photonic crystal can be used with or without DBR layers. The photonic crystal, in one example, forms an external cavity.

摘要翻译： 使用光子晶体的单模高功率垂直腔面发射激光器（VCSEL）。 光子晶体包括在VCSEL的至少一个镜层中。 光子晶体的反射率取决于光子的波长和入射角。 可以形成光子晶体，使得VCSEL以单一模式发光。 因为生成单个模式，所以可以放大VCSEL的孔径，以增加VCSEL为该模式生成的功率。 光子晶体可以使用或不使用DBR层。 在一个示例中，光子晶体形成外部空腔。

公开(公告)号：US06704343B2

公开(公告)日：2004-03-09

申请号：US10198229

申请日：2002-07-18

申请人： Hongyu Deng ,  Thomas Lenosky ,  Giorgio Giaretta ,  Jan Lipson

发明人： Hongyu Deng ,  Thomas Lenosky ,  Giorgio Giaretta ,  Jan Lipson

IPC分类号： H01S3082

CPC分类号： H01S5/183 ,  H01S5/105 ,  H01S2301/163 ,  H01S2301/166

摘要： A single mode high power vertical cavity surface emitting laser (VCSEL) using photonic crystals. A photonic crystal is included in at least one mirror layer of a VCSEL. The reflectivity of the photonic crystal is dependent on the wavelength and incident angle of the photons. The photonic crystal can be formed such that the VCSEL lases at a single mode. Because a single mode is generated, the aperture of the VCSEL can be enlarged to increase the power that is generated by the VCSEL for that mode. The photonic crystal can be used with/without DBR layers. The photonic crystal, in one example, forms an external cavity.

摘要翻译： 使用光子晶体的单模高功率垂直腔面发射激光器（VCSEL）。 光子晶体包括在VCSEL的至少一个镜层中。 光子晶体的反射率取决于光子的波长和入射角。 可以形成光子晶体，使得VCSEL以单一模式发光。 因为产生单个模式，所以可以放大VCSEL的孔径以增加由VCSEL为该模式产生的功率。 光子晶体可以使用/不使用DBR层。 在一个示例中，光子晶体形成外部空腔。

公开(公告)号：US06829281B2

公开(公告)日：2004-12-07

申请号：US10175309

申请日：2002-06-19

申请人： Hongyu Deng ,  Thomas Lenosky ,  Jan Lipson

发明人： Hongyu Deng ,  Thomas Lenosky ,  Jan Lipson

IPC分类号： H01S308

CPC分类号： H01S5/183 ,  H01S5/105

摘要： A vertical cavity surface emitting laser (VCSEL) using photonic crystals. Photonic crystals are formed such that the active region of the VCSEL is bounded by the photonic crystals. The photonic crystals have a periodic cavity structure that reflects light of certain wavelengths through the active region of the VCSEL such that laser light at the wavelengths is generated. Additional photonic crystals can be formed to increase the bandwidth of the VCSEL. The photonic crystals can also be combined with distributed bragg reflector layers to form the mirrors of a VCSEL.

摘要翻译： 使用光子晶体的垂直腔表面发射激光器（VCSEL）。 形成光子晶体，使得VCSEL的有源区域被光子晶体限制。 光子晶体具有通过VCSEL的有源区域反射某些波长的光的周期性空腔结构，使得产生波长的激光。 可以形成额外的光子晶体以增加VCSEL的带宽。 光子晶体还可以与分布式布拉格反射器层组合以形成VCSEL的反射镜。

公开(公告)号：US06810056B1

公开(公告)日：2004-10-26

申请号：US10256001

申请日：2002-09-26

申请人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

发明人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

IPC分类号： H01S500

CPC分类号： H01S5/18319 ,  H01S5/105 ,  H01S5/18327 ,  H01S2301/166

摘要： A vertical cavity surface emitting laser (VCSEL) using photonic crystals with a central defect. At least one of the mirror layers of a VCSEL includes a photonic crystal with a central defect. The central defect, which is surrounded by a periodic structure of holes or cavities, permits laser light to propagate and exit the VCSEL. Semi-insulating regions are formed in the active region such that when cavities are drilled in the photonic crystal and penetrate the active region, the cavities pass through the semi-insulating regions. This reduces the surface recombination that would otherwise occur in the active region and prevents the threshold current from increasing. The photonic crystal with a central defect has a reflectivity that is wavelength dependent. The VCSEL thus emits a single mode.

摘要翻译： 使用具有中心缺陷的光子晶体的垂直腔表面发射激光器（VCSEL）。 VCSEL的至少一个镜层包括具有中心缺陷的光子晶体。 由孔或腔的周期性结构包围的中心缺陷允许激光传播并离开VCSEL。 在有源区域中形成半绝缘区域，使得当在光子晶体中钻孔并穿透有源区域时，腔体通过半绝缘区域。 这减少了否则将在有源区域中发生的表面复合并且防止阈值电流增加。 具有中心缺陷的光子晶体具有波长依赖性的反射率。 因此，VCSEL发出单一模式。

公开(公告)号：US07668220B2

公开(公告)日：2010-02-23

申请号：US12423791

申请日：2009-04-14

申请人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

发明人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

IPC分类号： H01S5/00

CPC分类号： H01S5/18319 ,  H01S5/105 ,  H01S5/18327 ,  H01S2301/166

摘要： Vertical cavity surface emitting lasers are disclosed, one example of which includes a substrate upon which a lower mirror layer is formed. An active region and upper mirror layer are disposed, in that order, on the lower mirror layer. In particular, the upper mirror layer includes a plurality of DBR layers formed on the active region. The upper mirror layer additionally includes a photonic crystal formed on the plurality of DBR layers and having a periodic structure that contributes to the definition of a central defect. As a consequence of this structure, the photonic crystal has a reflectivity that is wavelength dependent, and the central defect enables the VCSEL to propagate a single mode.

摘要翻译： 公开了垂直空腔表面发射激光器，其一个示例包括其上形成有下镜面层的基板。 有源区和上镜层依次设置在下镜层上。 具体而言，上镜层包括在活性区域上形成的多个DBR层。 上镜层另外包括形成在多个DBR层上并具有有助于定义中心缺陷的周期性结构的光子晶体。 作为这种结构的结果，光子晶体具有波长依赖性的反射率，并且中心缺陷使VCSEL能够传播单个模式。

公开(公告)号：US20050008060A1

公开(公告)日：2005-01-13

申请号：US10913625

申请日：2004-08-06

申请人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

发明人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

IPC分类号： H01S5/10 ,  H01S5/183 ,  H01S3/08 ,  H01S5/00

CPC分类号： H01S5/18319 ,  H01S5/105 ,  H01S5/18327 ,  H01S2301/166

摘要： Vertical cavity surface emitting lasers are disclosed, one example of which includes a substrate upon which a lower mirror layer is formed. An active region and upper mirror layer are disposed, in that order, on the lower mirror layer. In particular, the upper mirror layer includes a plurality of DBR layers formed on the active region. The upper mirror layer additionally includes a photonic crystal formed on the plurality of DBR layers and having a periodic structure that contributes to the definition of a central defect. As a consequence of this structure, the photonic crystal has a reflectivity that is wavelength dependent, and the central defect enables the VCSEL to propagate a single mode.

摘要翻译： 公开了垂直空腔表面发射激光器，其一个示例包括其上形成有下镜面层的基板。 有源区和上镜层依次设置在下镜层上。 具体而言，上镜层包括在活性区域上形成的多个DBR层。 上镜层另外包括形成在多个DBR层上并具有有助于定义中心缺陷的周期性结构的光子晶体。 作为这种结构的结果，光子晶体具有波长依赖性的反射率，并且中心缺陷使VCSEL能够传播单个模式。

公开(公告)号：US20090232176A1

公开(公告)日：2009-09-17

申请号：US12423791

申请日：2009-04-14

申请人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

发明人： Jan Lipson ,  Thomas Lenosky ,  Hongyu Deng

IPC分类号： H01S5/183 ,  H01S5/187 ,  H01S3/08

CPC分类号： H01S5/18319 ,  H01S5/105 ,  H01S5/18327 ,  H01S2301/166

摘要： Vertical cavity surface emitting lasers are disclosed, one example of which includes a substrate upon which a lower mirror layer is formed. An active region and upper mirror layer are disposed, in that order, on the lower mirror layer. In particular, the upper mirror layer includes a plurality of DBR layers formed on the active region. The upper mirror layer additionally includes a photonic crystal formed on the plurality of DBR layers and having a periodic structure that contributes to the definition of a central defect. As a consequence of this structure, the photonic crystal has a reflectivity that is wavelength dependent, and the central defect enables the VCSEL to propagate a single mode.

摘要翻译： 公开了垂直空腔表面发射激光器，其一个示例包括其上形成有下镜面层的基板。 有源区和上镜层依次设置在下镜层上。 具体而言，上镜层包括在活性区域上形成的多个DBR层。 上镜层另外包括形成在多个DBR层上并具有有助于定义中心缺陷的周期性结构的光子晶体。 作为这种结构的结果，光子晶体具有波长依赖性的反射率，并且中心缺陷使VCSEL能够传播单个模式。

公开(公告)号：US06744804B2

公开(公告)日：2004-06-01

申请号：US10197997

申请日：2002-07-18

申请人： Hongyu Deng ,  Thomas Lenosky ,  Jan Lipson

发明人： Hongyu Deng ,  Thomas Lenosky ,  Jan Lipson

IPC分类号： H01S3081

CPC分类号： H01S5/12 ,  B82Y20/00 ,  G02B6/1225 ,  H01S5/1021 ,  H01S5/105 ,  H01S5/125 ,  H01S5/14 ,  H01S5/2231 ,  H01S5/5045

摘要： An edge emitting laser that emits a single mode using photonic mirrors. An edge emitting laser includes an active region that is formed between an n-type semiconductor material and a p-type semiconductor material. Photonic mirrors are formed in the laser to define a gain cavity and an external cavity. The gain cavity is bounded by a cleaved facet and a photonic mirror or by a pair of photonic mirrors. The external cavity is bounded by the photonic mirror of the gain cavity and either a cleaved facet or another photonic mirror. The mode emitted by the laser is determined by characteristics of the photonic mirrors, including the periodic cavity structures of the mirrors.

摘要翻译： 使用光子镜发射单模的边缘发射激光器。 边缘发射激光器包括形成在n型半导体材料和p型半导体材料之间的有源区。 在激光器中形成光子镜以限定增益腔和外部腔。 增益腔由切割小面和光子镜或一对光子镜限定。 外腔由增益腔的光子镜和切割小面或另一个光子镜界定。 激光发射的模式由光子镜的特性决定，包括反射镜的周期性空腔结构。

公开(公告)号：US06965628B1

公开(公告)日：2005-11-15

申请号：US10284128

申请日：2002-10-30

申请人： Thomas Lenosky ,  Giorgio Giaretta ,  Qing Deng

发明人： Thomas Lenosky ,  Giorgio Giaretta ,  Qing Deng

IPC分类号： H01S3/08 ,  H01S5/12

CPC分类号： H01S5/12 ,  H01S5/1212 ,  H01S5/1215 ,  H01S5/1225 ,  H01S5/124

摘要： A distributed feedback (“DFB”) laser featuring improved manufacturing yield and operational characteristics is disclosed. The present DFB laser includes a bottom confinement layer, an active region, and a top confinement layer disposed atop an n-doped substrate. A p-doped first top layer having a first index of refraction is disposed atop the top confinement layer. A grating is defined in the top surface of the first top layer, and a p-doped second top layer is overlaid on the grating. The two laser end facets are antireflectively coated. The grating is anisotropically etched to define a low kappa grating half and a high kappa grating half. Light waves produced in the active region interact with the grating and are biased toward the low kappa grating half that results in the majority of light signals passing through the end facet adjacent the low kappa grating half.

摘要翻译： 公开了一种具有改进的制造产量和操作特性的分布式反馈（“DFB”）激光器。 本DFB激光器包括底部限制层，有源区和设置在n掺杂衬底顶部的顶部限制层。 具有第一折射率的p掺杂的第一顶层设置在顶部限制层的顶部。 光栅被限定在第一顶层的顶表面中，并且p掺杂的第二顶层覆盖在光栅上。 两个激光端面是抗反射涂层的。 光栅被各向异性蚀刻以限定低kappa光栅半部和高kappa光栅一半。 在有源区域中产生的光波与光栅相互作用，并被朝向低kappa光栅一半偏置，导致大部分光信号通过邻近低kappa光栅一半的端面。

公开(公告)号：US20050117622A1

公开(公告)日：2005-06-02

申请号：US11021320

申请日：2004-12-22

申请人： Thomas Lenosky ,  Giorgio Giaretta ,  Qing Deng

发明人： Thomas Lenosky ,  Giorgio Giaretta ,  Qing Deng

IPC分类号： H01S3/08 ,  H01S5/12

CPC分类号： H01S5/12 ,  H01S5/1212 ,  H01S5/1215 ,  H01S5/1225 ,  H01S5/124

摘要： This disclosure concerns distributed feedback (“DFB”) lasers. In one example, a DFB laser includes a body that has first and second end facets. The DFB laser is implemented in a stack configuration that includes an active region interposed between a first top layer and a substrate. A second top layer is disposed on the first top layer and has an index of refraction different from that of the first top layer. Additionally, a grating is defined in one of the top layers and extends from the first end facet to the second end facet. The grating includes a tooth/gap structure whose configuration varies between the first end facet and the second end facet. Finally, an antireflective (AR) coating is disposed on the first end facet and on the second end facet.

摘要翻译： 本公开涉及分布式反馈（“DFB”）激光器。 在一个示例中，DFB激光器包括具有第一和第二端面的主体。 DFB激光器以堆叠配置实现，其包括置于第一顶层和衬底之间的有源区。 第二顶层设置在第一顶层上并具有不同于第一顶层的折射率。 此外，光栅被限定在顶层中的一个中并且从第一端面延伸到第二端面。 光栅包括齿/间隙结构，其构造在第一端面和第二端面之间变化。 最后，抗反射（AR）涂层设置在第一端面和第二端面上。