公开(公告)号：US20060108651A1

公开(公告)日：2006-05-25

申请号：US10904660

申请日：2004-11-22

申请人： Huilong Zhu ,  Lawrence Clevenger ,  Omer Dokumaci ,  Oleg Gluschenkov ,  Kaushik Kumar ,  Carl Radens ,  Dureseti Chidambarrao

发明人： Huilong Zhu ,  Lawrence Clevenger ,  Omer Dokumaci ,  Oleg Gluschenkov ,  Kaushik Kumar ,  Carl Radens ,  Dureseti Chidambarrao

IPC分类号： H01L29/94

CPC分类号： H01L21/26506 ,  H01L21/26586 ,  H01L29/0843 ,  H01L29/6653 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7834

摘要： A novel transistor structure and method for fabrication the same. The novel transistor structure comprises first and second source/drain (S/D) regions whose top surfaces are lower than a top surface of the channel region of the transistor structure. The method for fabricating the transistor structure starts out with a planar semiconductor layer and a gate stack on top of the semiconductor layer. Then, top regions of the semiconductor layer on opposing sides of the gate stack are removed. Then, regions beneath the removed regions are doped to form lowered S/D regions of the transistor structure

摘要翻译： 一种新颖的晶体管结构及其制造方法。 新颖的晶体管结构包括顶表面低于晶体管结构的沟道区的顶表面的第一和第二源极/漏极（S / D）区域。 用于制造晶体管结构的方法从在半导体层顶部的平面半导体层和栅叠层开始。 然后，去除栅极堆叠的相对侧上的半导体层的顶部区域。 然后，去除区域下方的区域被掺杂以形成晶体管结构的降低的S / D区域

公开(公告)号：US20060124993A1

公开(公告)日：2006-06-15

申请号：US10905041

申请日：2004-12-13

申请人： Huilong Zhu ,  Lawrence Clevenger ,  Omer Dokumaci ,  Kaushik Kumar ,  Carl Radens ,  Dureseti Chidambarrao

发明人： Huilong Zhu ,  Lawrence Clevenger ,  Omer Dokumaci ,  Kaushik Kumar ,  Carl Radens ,  Dureseti Chidambarrao

IPC分类号： H01L29/76

CPC分类号： H01L29/785 ,  H01L29/1083 ,  H01L29/66795

摘要： A novel transistor structure and method for fabricating the same. The transistor structure comprises (a) a substrate and (b) a semiconductor region, a gate dielectric region, and a gate region on the substrate, wherein the gate dielectric region is sandwiched between the semiconductor region and the gate region, wherein the semiconductor region is electrically insulated from the gate region by the gate dielectric region, wherein the semiconductor region comprises a channel region and first and second source/drain regions, wherein the channel region is sandwiched between the first and second source/drain regions, wherein the first and second source/drain regions are aligned with the gate region, wherein the channel region and the gate dielectric region (i) share an interface surface which is essentially perpendicular to a top surface of the substrate, and (ii) do not share any interface surface that is essentially parallel to a top surface of the substrate.

摘要翻译： 一种新颖的晶体管结构及其制造方法。 晶体管结构包括（a）衬底和（b）衬底上的半导体区域，栅极介电区域和栅极区域，其中栅极电介质区域夹在半导体区域和栅极区域之间，其中半导体区域 通过所述栅极电介质区域与所述栅极区域电绝缘，其中所述半导体区域包括沟道区域和第一和第二源极/漏极区域，其中所述沟道区域夹在所述第一和第二源极/漏极区域之间，其中所述第一和/ 第二源极/漏极区域与栅极区域对准，其中沟道区域和栅极电介质区域（i）共享基本上垂直于衬底顶表面的界面，以及（ii）不共享任何界面表面 其基本上平行于衬底的顶表面。

公开(公告)号：US20070092990A1

公开(公告)日：2007-04-26

申请号：US11163523

申请日：2005-10-21

申请人： Michael Belyansky ,  Dureseti Chidambarrao ,  Lawrence Clevenger ,  Kaushik Kumar ,  Carl Radens

发明人： Michael Belyansky ,  Dureseti Chidambarrao ,  Lawrence Clevenger ,  Kaushik Kumar ,  Carl Radens

IPC分类号： H01L21/00 ,  H01L29/76

CPC分类号： H01L21/76804 ,  H01L29/6659 ,  H01L29/7833 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to an field effect transistor (FET) comprising an inverted source/drain metallic contact that has a lower portion located in a first, lower dielectric layer and an upper portion located in a second, upper dielectric layer. The lower portion of the inverted source/drain metallic contact has a larger cross-sectional area than the upper portion. Preferably, the lower portion of the inverted source/drain metallic contact has a cross-sectional area ranging from about 0.03 μm2 to about 3.15 μm2, and such an inverted source/drain metallic contact is spaced apart from a gate electrode of the FET by a distance ranging from about 0.001 μm to about 5 μm.

摘要翻译： 本发明涉及一种场效应晶体管（FET），其包括反向的源极/漏极金属接触，其具有位于第一下部电介质层中的下部和位于第二上部电介质层中的上部。 倒置的源极/漏极金属触点的下部具有比上部更大的横截面面积。 优选地，倒置的源极/漏极金属接触件的下部具有约0.03毫米2至约3.15微米的横截面积，并且这样的反相源 /漏极金属触点与FET的栅电极间隔约0.001μm至约5μm的距离。

公开(公告)号：US20080042174A1

公开(公告)日：2008-02-21

申请号：US11923075

申请日：2007-10-24

申请人： Michael Belyansky ,  Dureseti Chidambarrao ,  Lawrence Clevenger ,  Kaushik Kumar ,  Carl Radens

发明人： Michael Belyansky ,  Dureseti Chidambarrao ,  Lawrence Clevenger ,  Kaushik Kumar ,  Carl Radens

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L21/76804 ,  H01L29/6659 ,  H01L29/7833 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to an field effect transistor (FET) comprising an inverted source/drain metallic contact that has a lower portion located in a first, lower dielectric layer and an upper portion located in a second, upper dielectric layer. The lower portion of the inverted source/drain metallic contact has a larger cross-sectional area than the upper portion. Preferably, the lower portion of the inverted source/drain metallic contact has a cross-sectional area ranging from about 0.03 μm2 to about 3.15 μm2, and such an inverted source/drain metallic contact is spaced apart from a gate electrode of the FET by a distance ranging from about 0.001 μm to about 5 μm.

摘要翻译： 本发明涉及一种场效应晶体管（FET），其包括反向的源极/漏极金属接触，其具有位于第一下部电介质层中的下部和位于第二上部电介质层中的上部。 倒置的源极/漏极金属触点的下部具有比上部更大的横截面面积。 优选地，倒置的源极/漏极金属接触件的下部具有约0.03毫米2至约3.15微米的横截面积，并且这样的反相源 /漏极金属触点与FET的栅电极间隔约0.001μm至约5μm的距离。

公开(公告)号：US06686637B1

公开(公告)日：2004-02-03

申请号：US10301436

申请日：2002-11-21

申请人： Omer Dokumaci ,  Bruce B. Doris ,  Oleg Gluschenkov ,  Jack A. Mandelman ,  Carl Radens

发明人： Omer Dokumaci ,  Bruce B. Doris ,  Oleg Gluschenkov ,  Jack A. Mandelman ,  Carl Radens

IPC分类号： H01L2978

CPC分类号： H01L29/66545 ,  H01L21/26586 ,  H01L21/28035 ,  H01L21/28044 ,  H01L29/1083 ,  H01L29/4925 ,  H01L29/665

摘要： A gate structure for a semiconductor transistor is disclosed. In an exemplary embodiment, the gate structure includes a lower polysilicon region doped at a first dopant concentration and an upper polysilicon region doped at a second concentration, with the second concentration being different than the first concentration. A conductive barrier layer is disposed between the lower and the upper polysilicon regions, wherein the conductive barrier layer prevents diffusion of impurities between the lower and the upper polysilicon regions.

摘要翻译： 公开了一种用于半导体晶体管的栅极结构。 在示例性实施例中，栅极结构包括以第一掺杂剂浓度掺杂的下多晶硅区域和以第二浓度掺杂的上多晶硅区域，其中第二浓度不同于第一浓度。 导电阻挡层设置在下部和上部多晶硅区域之间，其中导电阻挡层防止杂质在下部和上部多晶硅区域之间的扩散。

公开(公告)号：US06911384B2

公开(公告)日：2005-06-28

申请号：US10605697

申请日：2003-10-21

申请人： Omer Dokumaci ,  Bruce B. Doris ,  Oleg Gluschenkov ,  Jack A. Mandelman ,  Carl Radens

发明人： Omer Dokumaci ,  Bruce B. Doris ,  Oleg Gluschenkov ,  Jack A. Mandelman ,  Carl Radens

IPC分类号： H01L21/265 ,  H01L21/28 ,  H01L21/336 ,  H01L29/10 ,  H01L29/49 ,  H01L21/3205

CPC分类号： H01L29/66545 ,  H01L21/26586 ,  H01L21/28035 ,  H01L21/28044 ,  H01L29/1083 ,  H01L29/4925 ,  H01L29/665

摘要： A gate structure for a semiconductor transistor is disclosed. In an exemplary embodiment, the gate structure includes a lower polysilicon region doped at a first dopant concentration and an upper polysilicon region doped at a second concentration, with the second concentration being different than the first concentration. A conductive barrier layer is disposed between the lower and the upper polysilicon regions, wherein the conductive barrier layer prevents diffusion of impurities between the lower and the upper polysilicon regions.

摘要翻译： 公开了一种用于半导体晶体管的栅极结构。 在示例性实施例中，栅极结构包括以第一掺杂剂浓度掺杂的下多晶硅区域和以第二浓度掺杂的上多晶硅区域，其中第二浓度不同于第一浓度。 导电阻挡层设置在下部和上部多晶硅区域之间，其中导电阻挡层防止杂质在下部和上部多晶硅区域之间的扩散。

公开(公告)号：US07691698B2

公开(公告)日：2010-04-06

申请号：US11358483

申请日：2006-02-21

申请人： Dureseti Chidambarrao ,  Anda C. Mocuta ,  Dan M. Mocuta ,  Carl Radens

发明人： Dureseti Chidambarrao ,  Anda C. Mocuta ,  Dan M. Mocuta ,  Carl Radens

IPC分类号： H01L21/8238

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823878 ,  H01L27/1203 ,  H01L29/165 ,  H01L29/665 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848

摘要： The invention relates to a semiconductor structure and method of manufacturing and more particularly to a CMOS device with at least one embedded SiGe layer in the source/drain region of the PFET, and at least one embedded SiGe layer in the channel region of the NFET. In one embodiment, the structure of the invention enhances the electron mobility in the NFET device, and further enhances the hole mobility in the PFET device. Additionally, by using the fabrication methods and hence achieving the final structure of the invention, it is also possible to construct a PFET and NFET each with embedded SiGe layers on the same substrate.

摘要翻译： 本发明涉及半导体结构和制造方法，更具体地说涉及在PFET的源极/漏极区域中具有至少一个嵌入的SiGe层以及在NFET的沟道区域中至少一个嵌入的SiGe层的CMOS器件。 在一个实施方案中，本发明的结构增强了NFET器件中的电子迁移率，并进一步提高了PFET器件中的空穴迁移率。 此外，通过使用制造方法并因此实现本发明的最终结构，还可以在同一衬底上构造每个具有嵌入的SiGe层的PFET和NFET。

公开(公告)号：US07659160B2

公开(公告)日：2010-02-09

申请号：US11923075

申请日：2007-10-24

申请人： Michael P. Belyansky ,  Dureseti Chidambarrao ,  Lawrence A. Clevenger ,  Kaushik A. Kumar ,  Carl Radens

发明人： Michael P. Belyansky ,  Dureseti Chidambarrao ,  Lawrence A. Clevenger ,  Kaushik A. Kumar ,  Carl Radens

IPC分类号： H01L21/8238

CPC分类号： H01L21/76804 ,  H01L29/6659 ,  H01L29/7833 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention relates to an field effect transistor (FET) comprising an inverted source/drain metallic contact that has a lower portion located in a first, lower dielectric layer and an upper portion located in a second, upper dielectric layer. The lower portion of the inverted source/drain metallic contact has a larger cross-sectional area than the upper portion. Preferably, the lower portion of the inverted source/drain metallic contact has a cross-sectional area ranging from about 0.03 μm2 to about 3.15 μm2, and such an inverted source/drain metallic contact is spaced apart from a gate electrode of the FET by a distance ranging from about 0.001 μm to about 5 μm.

摘要翻译： 本发明涉及一种场效应晶体管（FET），其包括反向的源极/漏极金属接触，其具有位于第一下部电介质层中的下部和位于第二上部电介质层中的上部。 倒置的源极/漏极金属触点的下部具有比上部更大的横截面面积。 优选地，反相源极/漏极金属触点的下部具有约0.03mum2至约3.15mum2的横截面积，并且这种反向的源极/漏极金属触点与FET的栅电极间隔开一个 距离范围从约0.001毫米到约5毫米。

公开(公告)号：US20070196987A1

公开(公告)日：2007-08-23

申请号：US11358483

申请日：2006-02-21

申请人： Dureseti Chidambarrao ,  Anda Mocuta ,  Dan Mocuta ,  Carl Radens

发明人： Dureseti Chidambarrao ,  Anda Mocuta ,  Dan Mocuta ,  Carl Radens

IPC分类号： H01L21/336

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823878 ,  H01L27/1203 ,  H01L29/165 ,  H01L29/665 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848

摘要： The invention relates to a semiconductor structure and method of manufacturing and more particularly to a CMOS device with at least one embedded SiGe layer in the source/drain region of the PFET, and at least one embedded SiGe layer in the channel region of the NFET. In one embodiment, the structure of the invention enhances the electron mobility in the NFET device, and further enhances the hole mobility in the PFET device. Additionally, by using the fabrication methods and hence achieving the final structure of the invention, it is also possible to construct a PFET and NFET each with embedded SiGe layers on the same substrate.

摘要翻译： 本发明涉及半导体结构和制造方法，更具体地说涉及在PFET的源极/漏极区域中具有至少一个嵌入的SiGe层以及在NFET的沟道区域中至少一个嵌入的SiGe层的CMOS器件。 在一个实施方案中，本发明的结构增强了NFET器件中的电子迁移率，并进一步提高了PFET器件中的空穴迁移率。 此外，通过使用制造方法并因此实现本发明的最终结构，还可以在同一衬底上构造每个具有嵌入的SiGe层的PFET和NFET。

公开(公告)号：US20070114611A1

公开(公告)日：2007-05-24

申请号：US11164378

申请日：2005-11-21

申请人： Dureseti Chidambarrao ,  Carl Radens

发明人： Dureseti Chidambarrao ,  Carl Radens

IPC分类号： H01L23/62

CPC分类号： H01L29/6659 ,  H01L29/41733 ,  H01L29/41775 ,  H01L29/458 ,  H01L29/6653 ,  H01L29/7833 ,  H01L29/78621 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a method in which a low-resistance connection between the MOS channel and silicided source/drain regions is provided that has an independence from the extension ion implant process as well as device overlap capacitance. The method of the present invention broadly includes selectively removing outer spacers of an MOS structure and then selectively plating a metallic or intermetallic material on exposed portions of a semiconductor substrate that were previously protected by the outer spacers. The present invention also provides a semiconductor structure that is formed utilizing the method. The semiconductor structure includes a low-resistance connection between the silicided source/drain regions and the channel regions which includes a selectively plated metallic or intermetallic material.

摘要翻译： 本发明提供了一种方法，其中提供了与扩展离子注入工艺无关的MOS沟道和硅化源极/漏极区之间的低电阻连接以及器件重叠电容。 本发明的方法广泛地包括选择性地去除MOS结构的外部间隔物，然后在先前由外部间隔物保护的半导体衬底的暴露部分上选择性地镀覆金属或金属间化合物。 本发明还提供了利用该方法形成的半导体结构。 半导体结构包括硅化源/漏区和沟道区之间的低电阻连接，其包括选择性镀金属或金属间化合物。