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    Methods of manufacturing ferroelectric capacitors and semiconductor devices
    1.
    发明申请
    Methods of manufacturing ferroelectric capacitors and semiconductor devices 审中-公开
    制造铁电电容器和半导体器件的方法

    公开(公告)号：US20060273366A1

    公开(公告)日：2006-12-07

    申请号：US11447545

    申请日：2006-06-06

    申请人： Hwa-Young Ko ,  Suk-Ho Joo ,  Byoung-Jae Bae ,  Hee-Seok Kim ,  Kyung-Rae Byun ,  Jin-Hwan Ham

    发明人： Hwa-Young Ko ,  Suk-Ho Joo ,  Byoung-Jae Bae ,  Hee-Seok Kim ,  Kyung-Rae Byun ,  Jin-Hwan Ham

    IPC分类号： H01L29/94

    CPC分类号： H01L28/55 ,  H01L21/32139 ,  H01L27/11502 ,  H01L27/11507 ,  H01L28/65

    摘要： In a method of manufacturing a ferroelectric capacitor, a lower electrode layer is formed on a substrate. The lower electrode layer includes at least one lower electrode film. A ferroelectric layer is formed on the lower electrode layer, and then an upper electrode layer is formed on the ferroelectric layer. A hard mask structure is formed on the upper electrode layer. The hard mask structure includes a first hard mask and a second hard mask. An upper electrode, a ferroelectric layer pattern and a lower electrode are formed by partially etching the upper electrode layer, the ferroelectric layer and the lower electrode layer using the hard mask structure. The hard mask structure may prevent damage to the ferroelectric layer and may enlarge an effective area of the ferroelectric capacitor so that the ferroelectric capacitor may have enhanced electrical and ferroelectric characteristics.

    摘要翻译： 在制造铁电电容器的方法中，在基板上形成下电极层。 下电极层包括至少一个下电极膜。 在下电极层上形成铁电体层，在铁电层上形成上电极层。 在上电极层上形成硬掩模结构。 硬掩模结构包括第一硬掩模和第二硬掩模。 通过使用硬掩模结构部分蚀刻上电极层，铁电层和下电极层，形成上电极，铁电层图案和下电极。 硬掩模结构可以防止对铁电层的损坏，并且可以增加铁电电容器的有效面积，使得铁电电容器可以具有增强的电和铁电特性。

    SOLAR CELL
    4.
    发明申请
    SOLAR CELL 审中-公开
    太阳能电池

    公开(公告)号：US20110048529A1

    公开(公告)日：2011-03-03

    申请号：US12828588

    申请日：2010-07-01

    申请人： Doo-Youl Lee ,  Dong-Seop Kim ,  Jin-Wook Lee ,  Hwa-Young Ko

    发明人： Doo-Youl Lee ,  Dong-Seop Kim ,  Jin-Wook Lee ,  Hwa-Young Ko

    IPC分类号： H01L31/0236 ,  H01L31/0256

    CPC分类号： H01L31/068 ,  H01L31/02245 ,  Y02E10/547

    摘要： A solar cell includes a semiconductor substrate having a plurality of contact holes penetrating therethrough, from one surface to the opposing surface and including a part having a first conductive layer selected from p-type and n-type and a part having a second conductive layer different from the first conductive layer and selected from p-type and n-type semiconductor, a first electrode formed on one surface of the semiconductor substrate and electrically connected with the part having the first conductive layer, a second electrode formed on the other surface of the semiconductor substrate and electrically connected with the first electrode, and a third electrode formed on the same surface as in the second electrode and electrically connected with the part having the second conductive layer of the semiconductor substrate, wherein the plurality of contact holes form a contact hole group, and the first electrode and the second electrode are connected through one or more of the plurality of contact holes of the contact hole group.

    摘要翻译： 太阳能电池包括从一个表面到相对的表面具有穿过其的多个接触孔的半导体衬底，并且包括具有选自p型和n型的第一导电层的部分和具有不同的第二导电层的部分 从所述第一导电层中选择p型和n型半导体，形成在所述半导体衬底的一个表面上并与具有所述第一导电层的部分电连接的第一电极，形成在所述第一导电层的另一个表面上的第二电极 半导体衬底并与第一电极电连接;以及第三电极，其形成在与第二电极相同的表面上并与具有半导体衬底的第二导电层的部分电连接，其中多个接触孔形成接触孔 并且第一电极和第二电极通过多个中的一个或多个连接 的接触孔组的接触孔。

    Method of manufacturing solar cell
    5.
    发明授权
    Method of manufacturing solar cell 失效
    制造太阳能电池的方法

    公开(公告)号：US08440489B2

    公开(公告)日：2013-05-14

    申请号：US12828701

    申请日：2010-07-01

    申请人： Dong-Kyun Kim ,  Yun-Gi Kim ,  Jin-Wook Lee ,  Hwa-Young Ko

    发明人： Dong-Kyun Kim ,  Yun-Gi Kim ,  Jin-Wook Lee ,  Hwa-Young Ko

    IPC分类号： H01L21/00

    CPC分类号： H01L31/02168 ,  H01L31/022425 ,  H01L31/056 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

    摘要： A method of manufacturing a solar cell includes providing a semiconductor substrate; disposing a reflection layer on one side of the semiconductor substrate, wherein the disposing the reflection layer comprises implanting gas into a surface of the one side of the semiconductor substrate and heating the gas; disposing an n+ region and a p+ region separated from each other on the other opposite facing side of the semiconductor substrate; disposing a first electrode connected to the n+ region; and disposing a second electrode connected to the p+ region.

    摘要翻译： 一种制造太阳能电池的方法包括提供半导体衬底; 在半导体衬底的一侧上设置反射层，其中设置反射层包括将气体注入到半导体衬底的一侧的表面中并加热气体; 在所述半导体衬底的另一个相对的面上设置彼此分离的n +区域和p +区域; 设置连接到n +区的第一电极; 以及设置连接到p +区域的第二电极。