PACKAGE INTEGRATED SYNTHETIC JET DEVICE
    6.
    发明申请
    PACKAGE INTEGRATED SYNTHETIC JET DEVICE 有权
    包装集成合成喷嘴装置

    公开(公告)号:US20160358841A1

    公开(公告)日:2016-12-08

    申请号:US14728705

    申请日:2015-06-02

    Abstract: Embodiments include a synthetic jet device formed within layers of a package substrate, such as to provide a controlled airflow for sensing or cooling applications. The jet device includes an electromagnetically driven vibrating membrane of conductive material between a top and bottom cavity. A top lid with an opening covers the top cavity, and a permanent magnet is below the bottom cavity. An alternating current signal conducted through the membrane causes the membrane to vibrate in the presence of a magnetic field caused by the permanent magnet. By being manufactured with package forming processes, the jet (1) is manufactured more cost-effectively than by using silicon chip or wafer processing; (2) is easily integrated as part of and with the other layers of a package substrate; and (3) can be driven by a chip mounted on the package. Embodiments also include systems having and processes for forming the jet.

    Abstract translation: 实施例包括形成在封装衬底的层内的合成喷射装置,以便提供用于感测或冷却应用的受控气流。 喷射装置包括在顶部和底部空腔之间的导电材料的电磁驱动振动膜。 具有开口的顶盖覆盖顶部空腔,并且永久磁铁位于底部空腔下方。 通过膜传导的交流信号导致膜在由永磁体引起的磁场的存在下振动。 通过用封装成形工艺制造,与使用硅芯片或晶片加工相比,射流(1)的成本更高, (2)容易地集成为封装衬底的其他层的一部分并与其一起; 和(3)可以由安装在包装上的芯片驱动。 实施例还包括具有用于形成射流的方法和方法。

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