公开(公告)号：US06618422B2

公开(公告)日：2003-09-09

申请号：US09863931

申请日：2001-05-22

申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

IPC分类号： H01S300

CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

公开(公告)号：US06650679B1

公开(公告)日：2003-11-18

申请号：US09247887

申请日：1999-02-10

申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

IPC分类号： H01S3097

CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

公开(公告)号：US06466599B1

公开(公告)日：2002-10-15

申请号：US09453670

申请日：1999-12-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S3225

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US06556609B2

公开(公告)日：2003-04-29

申请号：US09826301

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US06430205B2

公开(公告)日：2002-08-06

申请号：US09826372

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US06414978B1

公开(公告)日：2002-07-02

申请号：US09826296

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US20050083984A1

公开(公告)日：2005-04-21

申请号：US10963284

申请日：2004-10-12

申请人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

发明人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/22 ,  H01S3/225

CPC分类号： H01S3/036 ,  H01S3/03 ,  H01S3/225

摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).

摘要翻译： 通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。 除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生 中间气体体积。 可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。 此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

公开(公告)号：US20050002427A1

公开(公告)日：2005-01-06

申请号：US10833455

申请日：2004-04-28

申请人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

发明人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

IPC分类号： H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC分类号： H01S3/0385 ,  H01S3/041 ,  H01S3/225

摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.

摘要翻译： 高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。 为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。 可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。 冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。 由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

公开(公告)号：US06587202B2

公开(公告)日：2003-07-01

申请号：US09726871

申请日：2000-11-30

申请人： Ulrich Rebhan

发明人： Ulrich Rebhan

IPC分类号： G01N2100

CPC分类号： G01N21/59 ,  G01N21/33

摘要： A method for testing a material block prior to forming the material block into one or more optical components for use with a sub-micron lithographic, high power, narrow bandwidth laser system having high wavelength stability includes the step of selecting a block of material having appropriate characteristic optical properties for the source laser system being used. The next step is to test the material block for absorption performance. Then, if the block exhibits a sufficient absorption performance, then one of more optical components such as one or more prisms, etalons, and/or windows, etc. are formed from the material block. Finally, the optical components formed from the block are inserted into a wavelength selection module of the resonator of the laser to participate in producing a high power, narrow bandwidth laser beam which may be used in sub-micron photolithographic applications.

摘要翻译： 在将材料块形成用于具有高波长稳定性的亚微米光刻，高功率，窄带宽激光系统的一个或多个光学部件之前用于测试材料块的方法包括以下步骤：选择具有适当的材料块 使用的源激光系统的特性光学特性。 下一步是测试材料块的吸收性能。 然后，如果块具有足够的吸收性能，则从材料块形成更多的光学部件之一，例如一个或多个棱镜，标准具和/或窗户等。 最后，将从块形成的光学部件插入到激光器的谐振器的波长选择模块中，以参与产生可用于亚微米光刻应用的高功率窄带宽激光束。

公开(公告)号：US06414828B1

公开(公告)日：2002-07-02

申请号：US09482182

申请日：2000-01-12

申请人： Kay Zimmerman ,  Ulrich Rebhan

发明人： Kay Zimmerman ,  Ulrich Rebhan

IPC分类号： H02H300

CPC分类号： F24F7/00 ,  B23K26/1435 ,  B23K26/1438

摘要： A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for excimer lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.

摘要翻译： 公开了用于工业激光系统的通风系统，其可以使正常操作期间所需的冷却空气进入最小化。 即使外壳打开，仍保持足够的通风。 各种传感器监测冷却空气的状况，如果冷却或安全需要，可以增加进气口。 这种通风系统对于微光刻应用中的准分子激光器是特别有利的，因为经过激光设备的实际需要来控制空调洁净室空气的消耗。