Energy storage devices formed with porous silicon
    3.
    发明授权
    Energy storage devices formed with porous silicon 有权
    储能装置由多孔硅形成

    公开(公告)号:US09466662B2

    公开(公告)日:2016-10-11

    申请号:US13730308

    申请日:2012-12-28

    CPC classification number: H01L28/90

    Abstract: In one embodiment, an energy storage device (e.g., capacitor) may include a porous silicon layer formed within a substrate. The porous silicon layer includes pores with a mean pore diameter less than approximately 100 nanometers. A first conductive layer is formed on the porous silicon layer and a first dielectric layer is formed on the first conductive layer. A second conductive layer is formed on the first dielectric layer to form the capacitor.

    Abstract translation: 在一个实施例中,能量存储装置(例如,电容器)可以包括在衬底内形成的多孔硅层。 多孔硅层包括平均孔径小于约100纳米的孔。 第一导电层形成在多孔硅层上,第一介电层形成在第一导电层上。 在第一介电层上形成第二导电层以形成电容器。

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