公开(公告)号：US20160245841A1

公开(公告)日：2016-08-25

申请号：US15051856

申请日：2016-02-24

Applicant: Intel Corporation

Inventor： Qing MA ,  Valluri RAO ,  Feras EID ,  Kevin LIN ,  Weng Hong TEH ,  Johanna SWAN ,  Robert SANKMAN

IPC: G01P15/097

CPC classification number: G01P15/097 ,  G01P15/105 ,  G01P15/18

Abstract: An accelerometer includes a mass, suspended by a beam, and associated conductive paths. Each conductive path is subjected to a magnetic field, such that, when a time varying signal is applied to the conductive paths, a characteristic resonant frequency is produced, and when the mass experiences an acceleration, a respective change in the resonant frequency is produced that may be interpreted as acceleration data. Embodiments include methods of manufacturing an accelerometer and systems and devices incorporating the accelerometer.

Abstract translation: 加速度计包括由梁悬挂的质量块和相关联的导电路径。 每个导电路径受到磁场的影响，使得当对导电路径施加时变信号时，产生特性谐振频率，并且当质量经历加速度时，产生谐振频率的相应变化， 可以解释为加速度数据。 实施例包括制造加速度计的方法和结合有加速度计的系统和装置。

公开(公告)号：US20160280539A1

公开(公告)日：2016-09-29

申请号：US15176467

申请日：2016-06-08

Applicant: Intel Corporation

Inventor： Qing MA ,  Johanna M. SWAN ,  Min TAO ,  Charles A. GEALER ,  Edward T. ZARBOCK

IPC: B81C1/00 ,  B81B7/00

CPC classification number: B81C1/00301 ,  B81B7/007 ,  B81C1/00238 ,  B81C2203/0145 ,  G01P15/0802 ,  H01L23/481 ,  H01L23/49816 ,  H01L23/5384 ,  H01L24/03 ,  H01L25/0652 ,  H01L2224/0401 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/73204 ,  H01L2924/01327 ,  H01L2924/07811 ,  H01L2924/12042 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/014

Abstract: Integration of sensor chips with integrated circuit (IC) chips. At least a first sensor chip including a first sensor is affixed to a first side of an interposer to hermetically seal the first sensor within a first cavity. An IC chip is affixed to a second side of the interposer opposite the first sensor, the IC chip is electrically coupled to the first sensor by a through via in the interposer. In embodiments, the first sensor includes a MEMS device and the IC chip comprises a circuit to amplify a signal from the MEMS device. The interposer may be made of glass, with the first sensor chip and the IC chip flip-chip bonded to the interposer by compression or solder. Lateral interconnect traces provide I/O between the devices on the interposer and/or a PCB upon which the interpose is affixed.

Abstract translation: 传感器芯片与集成电路（IC）芯片的集成。 至少包括第一传感器的第一传感器芯片固定在插入件的第一侧上，以将第一传感器密封在第一空腔内。 IC芯片被固定到与第一传感器相对的插入件的第二侧，IC芯片通过插入器中的通孔电耦合到第一传感器。 在实施例中，第一传感器包括MEMS器件，并且IC芯片包括放大来自MEMS器件的信号的电路。 插入器可以由玻璃制成，其中第一传感器芯片和IC芯片倒装芯片通过压缩或焊接接合到插入器。 横向互连迹线在插入件上的器件和/或其上插入插入物的PCB之间提供I / O。