公开(公告)号：US09177849B2

公开(公告)日：2015-11-03

申请号：US13719136

申请日：2012-12-18

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar ,  Glen Eric Egami ,  Aaron T. Francis

IPC: H01L21/687 ,  H01L21/683 ,  G03F7/20

CPC classification number: H01L21/6838 ,  G03F7/707 ,  H01L21/68735 ,  H01L21/68757 ,  Y10T279/11

Abstract: Chucks for mounting and retaining semiconductor wafers during processing are described, particularly suited for wafer processing involving total immersion of the wafer-chuck structure in a liquid. Chuck structures are disclosed for preventing or hindering processing chemicals from contacting and contaminating large portions of the underside of the wafer undergoing processing, limiting such chemical contact to readily cleaned, relatively small annular regions on the periphery of the wafer. Embodiments include structures with supplemental gas flows on the underside of the wafer as well as the creation of gas/liquid meniscusci to prevent chemical penetration of the wafer's underside. Methods of processing semiconductor wafers employing such chucks are also described.

Abstract translation: 描述了用于在加工期间安装和保持半导体晶片的卡盘，特别适用于涉及将晶片卡盘结构完全浸入液体中的晶片加工。 公开了用于防止或阻碍处理化学品接触和污染正在进行处理的晶片的下侧的大部分的卡盘结构，将这种化学接触限制在晶片周边上容易清洁的相对较小的环形区域。 实施例包括在晶片的下侧上具有补充气体流动的结构，以及产生气体/液体弯月面以防止晶片下侧的化学渗透。 还描述了使用这种卡盘处理半导体晶片的方法。

公开(公告)号：US20140315370A1

公开(公告)日：2014-10-23

申请号：US14321383

申请日：2014-07-01

Applicant: Intermolecular, Inc.

Inventor： Rajesh Kelekar ,  Aaron T. Francis ,  Gregory P. Lim

IPC: H01L21/76

CPC classification number: H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

Abstract: Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

Abstract translation: 重叠组合处理可以提供更多的处理区域，更好的粒子性能和更简单的工艺设备。 在重叠组合处理中，一个或多个区域与区域之间的一些重叠程度串联处理。 在一些实施例中，重叠的组合处理可以结合非重叠的组合处理和非组合处理来使用，以开发和研究用于设备处理和制造的材料和过程。

公开(公告)号：US20140124038A1

公开(公告)日：2014-05-08

申请号：US13669664

申请日：2012-11-06

Applicant: INTERMOLECULAR, INC.

Inventor： Sandeep Mariserla ,  Aaron T. Francis ,  Jeffrey Chih-Hou Lowe ,  Robert Anthony Sculac

IPC: F17D1/08

CPC classification number: H01L21/67 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67253 ,  H01L21/68785 ,  H01L22/20 ,  Y10T137/0396

Abstract: Methods for combinatorially processing semiconductor substrates are provided. The methods may involve receiving a substrate into a combinatorial processing chamber and sealing a plurality of flow cells against a surface of the substrate. The plurality of flow cells is enclosed within the combinatorial processing chamber to define an enclosed external environment for the plurality of flow cells. A pressure differential is created between a reaction area of the plurality of flow cells of the combinatorial processing chamber and the external environment, wherein each flow cells of the plurality of flow cells defines a site isolating region of die substrate. The regions the substrate are then combinatorially processed.

Abstract translation: 提供了组合处理半导体衬底的方法。 所述方法可以包括将基底接收到组合处理室中并将多个流动池密封抵靠基板的表面。 多个流动池被封闭在组合处理室内以限定多个流动池的封闭的外部环境。 在组合处理室的多个流动池的反应区域和外部环境之间产生压力差，其中多个流动池中的每个流动池限定管芯基板的位置隔离区域。 然后将基底的区域组合处理。

公开(公告)号：US20130039813A1

公开(公告)日：2013-02-14

申请号：US13657006

申请日：2012-10-22

Applicant: Intermolecular, Inc.

Inventor： Aaron T. Francis ,  Kurt H. Weiner

IPC: B01J19/24

CPC classification number: H01L21/67126

Abstract: Substrate processing systems and methods are described for site-isolated processing of substrates. The processing systems include numerous site-isolated reactors (SIRs). The processing systems include a reactor block having a cell array that includes numerous SIRs. A sleeve is coupled to an interior of each of the SIRs. The sleeve includes a compliance device configured to dynamically control a vertical position of the sleeve in the SIR. A sealing system is configured to provide a seal between a region of a substrate and the interior of each of the SIRs. The processing system can include numerous modules that comprise one or more site-isolated reactors (SIRs) configured for one or more of molecular self-assembly and combinatorial processing of substrates.

Abstract translation: 基板处理系统和方法被描述用于基板的场隔离处理。 处理系统包括许多场地隔离反应器（SIR）。 处理系统包括具有包括大量SIR的单元阵列的反应器块。 套筒连接到每个SIR的内部。 套筒包括配置成在SIR中动态地控制套筒的垂直位置的顺应装置。 密封系统被配置为在衬底的区域和每个SIR的内部之间提供密封。 处理系统可以包括多个模块，其包括被配置用于衬底的分子自组装和组合处理中的一个或多个的一个或多个位置隔离反应器（SIR）。

公开(公告)号：US20140150245A1

公开(公告)日：2014-06-05

申请号：US13692206

申请日：2012-12-03

Applicant: INTERMOLECULAR, INC.

Inventor： Aaron T. Francis

IPC: B23Q3/00

CPC classification number: H01L21/00 ,  H01L21/6719 ,  Y10T29/49998

Abstract: In some embodiments of the present disclosure, an apparatus for combinatorial wet processing includes: a chuck, a substrate located on the chuck, a cell located over the substrate; and a height adjustment mechanism for the cell above the substrate wherein applying compressed air on an O-ring in a gland prevents vertical movement of the cell relative to the position of the substrate.

Abstract translation: 在本公开的一些实施例中，用于组合湿法处理的装置包括：卡盘，位于卡盘上的基板，位于基板上方的单元; 以及用于基板上方的单元的高度调节机构，其中在压盖中的O形环上施加压缩空气防止单元相对于基板的位置的垂直移动。

公开(公告)号：US20140144512A1

公开(公告)日：2014-05-29

申请号：US13687906

申请日：2012-11-28

Applicant: INTERMOLECULAR, INC.

Inventor： Satbir Kahlon ,  Aaron T. Francis ,  Chi-I Lang ,  Gregory P. Lim ,  Jeffrey Chih-Hou Lowe ,  Robert Anthony Sculac

IPC: B65D83/00

CPC classification number: H01L21/00 ,  H01L21/67017 ,  H01L21/6715 ,  Y10T137/0318 ,  Y10T137/0424 ,  Y10T137/86493 ,  Y10T137/87249 ,  Y10T137/87281

Abstract: Provided are methods and systems for dispensing different chemicals used for high productivity combinatorial processing. A dispense panel may include multiple inlet lines for supplying different chemicals. Each inlet line is connected to its own three-way valve that either allows the supplied chemical to flow from the inlet line towards a dispense valve connected to a dispense manifold (during dispensing of the supplied chemical) or allows another chemical to flow from the dispense valve to a waste manifold (during priming of the dispense manifold with this other chemical). Specifically, during priming a chemical supplied from its inlet line and is passed through a corresponding three-way valve and is directed to its dispense valve and then into the dispense manifold. Other dispense valves and three-way valves of the dispense panel allow this chemical to flow out of the dispense manifold, thereby priming remaining parts of the panel.

Abstract translation: 提供了用于分配用于高生产率组合处理的不同化学品的方法和系统。 分配面板可以包括用于供应不同化学品的多个入口管线。 每个入口管路连接到其自己的三通阀，其允许供应的化学品从入口管线流向连接到分配歧管的分配阀（在分配供应的化学品期间）或允许另一种化学品从分配流出 阀门到废液歧管（在使用这种其他化学品的分配歧管启动期间）。 具体来说，在从其入口管线引入化学物质并通过相应的三通阀时，被引导到其分配阀然后进入分配歧管。 分配面板的其他分配阀和三通阀允许该化学品流出分配歧管，从而引发面板的剩余部分。

公开(公告)号：US20130171802A1

公开(公告)日：2013-07-04

申请号：US13738826

申请日：2013-01-10

Applicant: Intermolecular Inc.

Inventor： Rajesh Kelekar ,  Aaron T. Francis ,  Gregory P. Lim

IPC: H01L21/02

CPC classification number: H01L21/76 ,  H01L21/02 ,  H01L21/306 ,  H01L21/67017

Abstract: Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

公开(公告)号：US08893923B2

公开(公告)日：2014-11-25

申请号：US13687906

申请日：2012-11-28

Applicant: Intermolecular, Inc.

Inventor： Satbir Kahlon ,  Aaron T. Francis ,  Chi-I Lang ,  Gregory P. Lim ,  Jeffrey Chih-Hou Lowe ,  Robert Anthony Sculac

IPC: B67B7/00 ,  H01L21/00

CPC classification number: H01L21/00 ,  H01L21/67017 ,  H01L21/6715 ,  Y10T137/0318 ,  Y10T137/0424 ,  Y10T137/86493 ,  Y10T137/87249 ,  Y10T137/87281

Abstract: Provided are methods and systems for dispensing different chemicals used for high productivity combinatorial processing. A dispense panel may include multiple inlet lines for supplying different chemicals. Each inlet line is connected to its own three-way valve that either allows the supplied chemical to flow from the inlet line towards a dispense valve connected to a dispense manifold (during dispensing of the supplied chemical) or allows another chemical to flow from the dispense valve to a waste manifold (during priming of the dispense manifold with this other chemical). Specifically, during priming a chemical supplied from its inlet line and is passed through a corresponding three-way valve and is directed to its dispense valve and then into the dispense manifold. Other dispense valves and three-way valves of the dispense panel allow this chemical to flow out of the dispense manifold, thereby priming remaining parts of the panel.

Abstract translation: 提供了用于分配用于高生产率组合处理的不同化学品的方法和系统。 分配面板可以包括用于供应不同化学品的多个入口管线。 每个入口管路连接到其自己的三通阀，其允许供应的化学品从入口管线流向连接到分配歧管的分配阀（在分配供应的化学品期间）或允许另一种化学品从分配流出 阀门到废液歧管（在使用这种其他化学品的分配歧管启动期间）。 具体来说，在从其入口管线引入化学物质并通过相应的三通阀时，被引导到其分配阀然后进入分配歧管。 分配面板的其他分配阀和三通阀允许该化学品流出分配歧管，从而引发面板的剩余部分。

公开(公告)号：US20140133265A1

公开(公告)日：2014-05-15

申请号：US13673560

申请日：2012-11-09

Applicant: INTERMOLECULAR, INC.

Inventor： Aaron T. Francis ,  Peter Satitpunwaycha ,  John Schmidt

IPC: B01F13/08

CPC classification number: B01F13/0863

Abstract: Provided are liquid agitating systems having magnetically actuated agitating members that do not come in contact with internal surfaces of liquid holding vessels. As such, some mechanically weak materials, such as polytetrafluoroethylene and perfluoroalkoxy polymer, may be used for internal surfaces of these vessels. An agitating member may be held by a supporting member that allows the agitating member to move within a vessel without touching its bottom. The supporting member effectively controls the distance between the agitating member and some supporting point. An external magnet provided under the vessel may be used for magnetic actuation. The agitating member includes an internal magnet that is magnetically coupled to the external magnet and that follows the path of the external magnet thereby moving the agitating member and agitating the liquid. In some embodiments, multiple external magnets may be used to position one or more agitating member.

Abstract translation: 提供了具有不与液体保持容器的内表面接触的具有磁力驱动的搅拌构件的液体搅拌系统。 因此，可以使用一些机械弱的材料，例如聚四氟乙烯和全氟烷氧基聚合物，用于这些容器的内表面。 搅拌构件可以由允许搅拌构件在容器内移动而不接触其底部的支撑构件保持。 支撑构件有效地控制搅拌构件与一些支撑点之间的距离。 设置在容器下方的外部磁体可用于磁致动。 搅拌构件包括磁耦合到外部磁体并且沿着外部磁体的路径的内部磁体，从而移动搅拌构件并搅拌液体。 在一些实施例中，可以使用多个外部磁体来定位一个或多个搅拌构件。

公开(公告)号：US08603245B2

公开(公告)日：2013-12-10

申请号：US13657006

申请日：2012-10-22

Applicant: Intermolecular, Inc.

Inventor： Aaron T. Francis ,  Kurt H. Weiner

IPC: C23C16/00 ,  H01L21/306

CPC classification number: H01L21/67126

Abstract: Substrate processing systems and methods are described for site-isolated processing of substrates. The processing systems include numerous site-isolated reactors (SIRs). The processing systems include a reactor block having a cell array that includes numerous SIRs. A sleeve is coupled to an interior of each of the SIRs. The sleeve includes a compliance device configured to dynamically control a vertical position of the sleeve in the SIR. A sealing system is configured to provide a seal between a region of a substrate and the interior of each of the SIRs. The processing system can include numerous modules that comprise one or more site-isolated reactors (SIRs) configured for one or more of molecular self-assembly and combinatorial processing of substrates.

Abstract translation: 基板处理系统和方法被描述用于基板的场隔离处理。 处理系统包括许多场地隔离反应器（SIR）。 处理系统包括具有包括大量SIR的单元阵列的反应器块。 套筒连接到每个SIR的内部。 套筒包括配置成在SIR中动态地控制套筒的垂直位置的顺应装置。 密封系统被配置为在衬底的区域和每个SIR的内部之间提供密封。 处理系统可以包括多个模块，其包括被配置用于衬底的分子自组装和组合处理中的一个或多个的一个或多个位置隔离反应器（SIR）。