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    Susceptor for heat treatment and heat treatment apparatus
    1.
    发明授权
    Susceptor for heat treatment and heat treatment apparatus 有权
    受体用于热处理和热处理设备

    公开(公告)号：US08355624B2

    公开(公告)日：2013-01-15

    申请号：US11832682

    申请日：2007-08-02

    申请人： Ippei Kobayashi ,  Yoshio Ito ,  Akio Wada ,  Kenichi Yokouchi

    发明人： Ippei Kobayashi ,  Yoshio Ito ,  Akio Wada ,  Kenichi Yokouchi

    IPC分类号： A21B2/00

    CPC分类号： F27B17/0025 ,  H01L21/67115

    摘要： A susceptor for holding a semiconductor wafer to be flash-heated by a flash of light emitted from flash lamps is formed of transparent quartz. The susceptor has a backside surface only which is roughened by shot blasting to provide a ground-glass-like surface. When a flash of light is emitted, part of the flash of light emitted from the flash lamps and passing by a peripheral portion of the semiconductor wafer held by the susceptor into the susceptor reaches the ground-glass-like backside surface and is diffusely reflected therefrom. Part of the diffusely reflected light impinges on the peripheral portion of the semiconductor wafer held by the susceptor to thereby heat the low temperature regions which have appeared in the peripheral portion of the semiconductor wafer.

    摘要翻译： 用于保持由闪光灯发出的闪光闪光加热的半导体晶片的感受体由透明石英形成。 基座仅具有背面，通过喷丸粗糙化以提供磨玻璃状表面。 当发出闪光时，从闪光灯发出的闪光的一部分闪光并且被基座保持的半导体晶片的周边部分通过到基座中，到达玻璃状的后表面并且从其中漫反射 。 漫反射光的一部分照射在由基座保持的半导体晶片的周边部分上，从而加热出现在半导体晶片周边部分的低温区域。

    Optical transmitter
    2.
    发明授权
    Optical transmitter 失效
    光发射机

    公开(公告)号：US06192060B1

    公开(公告)日：2001-02-20

    申请号：US09231648

    申请日：1999-01-15

    申请人： Ippei Kobayashi

    发明人： Ippei Kobayashi

    IPC分类号： H01S300

    CPC分类号： H01S5/06835 ,  H04B10/504 ,  H04B10/564

    摘要： An optical transmitter having an automatic output controlling function converts monitor current of a laser into a voltage and detects an average value of the voltage. The average value is compared with a mark-space ratio outputted from a mark-space ratio detection circuit by a bias control circuit, by which a bias circuit is controlled. Meanwhile, the average value described above is divided by the mark-space ratio from the mark-space ratio detection circuit by an operation circuit, and a resulting value is compared with a reference voltage (Vref) and amplified by a pulse current controller. The pulse current driver is controlled with the amplified output of the pulse current controller. Finally, outputs of the pulse current driver and the bias circuit are added to drive the laser.

    摘要翻译： 具有自动输出控制功能的光发射机将激光的监视电流转换成电压并检测电压的平均值。 将平均值与通过偏置控制电路从标记空间比检测电路输出的标记空间比进行比较，通过该偏置控制电路控制偏置电路。 同时，将上述平均值除以运算电路与标记空间比检测电路的标记空间比，并将所得值与参考电压（Vref）进行比较，并由脉冲电流控制器进行放大。 脉冲电流驱动器由脉冲电流控制器的放大输出控制。 最后，添加脉冲电流驱动器和偏置电路的输出来驱动激光器。

    Optical transmitter
    9.
    发明授权
    Optical transmitter 失效
    光发射机

    公开(公告)号：US06480314B1

    公开(公告)日：2002-11-12

    申请号：US09300828

    申请日：1999-04-27

    申请人： Ippei Kobayashi

    发明人： Ippei Kobayashi

    IPC分类号： H04B1004

    CPC分类号： H04B10/504 ,  H01S5/042 ,  H01S5/0683 ,  H04B10/564

    摘要： Part of output light of an LD 11 issuing a signal light 10 depending on a driving current is received by a photo diode 13, and the current corresponding to the reception power is converted into a voltage in a current-voltage converting circuit 14, and an average voltage V1 is detected in an average voltage detecting circuit 15. The average voltage V1 and a reference voltage V2 depending on a mark rate issued from a reference voltage control circuit 16 are entered in an optical output control circuit 17, and the driving current to be supplied into the LD 11 is controlled by a laser driving circuit 19 through a driving current control circuit 18 so that the LD 11 may not pass any current exceeding a preset value. At the time of response by optical output cut-off or its cancellation, by controlling the average voltage V1 and reference voltage V2 by the excessive output preventive circuit 41, generation of excessive optical output is prevented. As a result, an automatic power control circuit of the optical transmitter can emit an output light within the standard from the laser diode even at the time of transient response by optical output cut-off or cancellation of optical output cut-off.

    摘要翻译： 由光二极管13接收根据驱动电流发出信号光10的LD11的输出光的一部分，将与接收功率相对应的电流转换为电流 - 电压转换电路14中的电压， 在平均电压检测电路15中检测平均电压V1。根据从参考电压控制电路16发出的标记速率的平均电压V1和参考电压V2被输入到光输出控制电路17中，并且驱动电流 通过驱动电流控制电路18由激光驱动电路19控制供给到LD 11中，使得LD 11不能通过超过预设值的任何电流。 在通过光输出截止或其取消的响应时，通过由过大输出防止电路41控制平均电压V1和参考电压V2，防止产生过大的光输出。 结果，即使在通过光输出截止或光输出截止的取消的瞬态响应时，光发射机的自动功率控制电路也可以从激光二极管发射标准内的输出光。