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公开(公告)号：US5600520A
公开(公告)日：1997-02-04
申请号：US441947
申请日：1995-05-16
CPC分类号： G11B5/147 , G11B5/3116 , Y10S428/90 , Y10T428/1129 , Y10T428/24975 , Y10T428/265
摘要： In a laminated magnetic head core, Fe--M--N system soft magnetic thin films (M being at least one element selected from the group consisting of Ta, Nb, Zr, and Hf) and non-magnetic insulating films are alternately laminated. Each of the soft magnetic thin films is 0.2-10 .mu.m thick. Each of the non-magnetic insulating films is 10 through 1000 nm thick. One of the soft magnetic thin films shows high magnetic permeability in a different direction from that of an adjacent soft magnetic thin film via the non-magnetic insulating film within a film surface of the soft magnetic thin film.
摘要翻译： 在层叠磁头芯中，交替层叠Fe-M-N系软磁薄膜（M为选自Ta，Nb，Zr和Hf中的至少一种元素）和非磁性绝缘膜。 每个软磁薄膜的厚度为0.2-10μm。 每个非磁性绝缘膜的厚度为10〜1000nm。 一个软磁性薄膜通过软磁性薄膜的膜表面内的非磁性绝缘膜，在与相邻的软磁性薄膜的方向不同的方向上表现出高的磁导率。
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公开(公告)号：US5429731A
公开(公告)日：1995-07-04
申请号：US86364
申请日：1993-07-06
申请人： Koichi Osano , Hiroshi Sakakima , Keita Ihara , Mitsuo Satomi , Kumio Nago , Youichi Ohnishi , Kunio Tanaka , Hitoshi Yamanishi
发明人： Koichi Osano , Hiroshi Sakakima , Keita Ihara , Mitsuo Satomi , Kumio Nago , Youichi Ohnishi , Kunio Tanaka , Hitoshi Yamanishi
CPC分类号： C23C14/0036 , C23C14/3414 , H01F10/13 , H01F10/265
摘要： The present invention relates to a method for forming a layer of isotropic soft magnetic nitride alloy even by means of mass-production apparatus wherein a target size is large in comparison to a distance between a substrate and a target, by using a bias sputtering method wherein a negative bias voltage is continuously applied to a substrate and sputtering is carried out in Ar atmosphere mixed with nitrogen gas or periodically mixed with nitrogen gas. Furthermore, the present invention may include a heat treatment of the soft magnetic nitride alloy layer deposited on the substrate in a temperature of more than 300.degree..degree.C. to less than 800.degree. C. to improve a soft magnetic characteristic.
摘要翻译： 本发明涉及通过使用偏置溅射法，即使通过使用偏置溅射方法，通过大量生产设备形成各向同性软磁性氮化物合金层的方法，其中靶材尺寸比基板和靶材之间的距离大 向基板连续施加负偏压，在与氮气混合的Ar气氛中进行溅射或与氮气周期性地混合。 此外，本发明可以包括在大于300℃至小于800℃的温度下沉积在基板上的软磁性氮化物合金层的热处理以改善软磁特性。
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公开(公告)号：US5609739A
公开(公告)日：1997-03-11
申请号：US362778
申请日：1994-12-23
CPC分类号： H01J37/3426 , H01J37/3408 , H01J37/3452
摘要： A sputtering apparatus for performing sputtering operation by using a rectangular target made of ferromagnetic material, the apparatus includes an electrode in which one first permanent magnet is disposed on each side edge of a front surface of the target, polarities of the first magnets confronting each other with the target interposed between the first magnets are opposite to each other, one second permanent magnet is disposed on each side edge of a rear surface of the target, polarities of the second magnets confronting each other with the target interposed between the second magnets are opposite to each other, and the polarity of each second magnet disposed on the rear surface of the target is the same as that of the first magnet disposed on the front surface of the target.
摘要翻译： 一种用于通过使用由铁磁材料制成的矩形靶进行溅射操作的溅射装置，该装置包括：电极，其中一个第一永磁体设置在靶的前表面的每个侧边缘上，第一磁体彼此面对的极性 夹在第一磁体之间的目标彼此相对，在目标的后表面的每个侧边缘上设置一个第二永磁体，并且夹在第二磁体之间的目标彼此面对的第二磁体的极性相反 并且设置在靶的后表面上的每个第二磁体的极性与设置在靶的前表面上的第一磁体的极性相同。
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公开(公告)号：US4679022A
公开(公告)日：1987-07-07
申请号：US909327
申请日：1986-09-19
IPC分类号： G01R33/383 , H01F7/02
CPC分类号： G01R33/383 , H01F7/0278
摘要： A magnetic field generating device for nuclear magnetic resonance-computerized tomography of the type wherein permanent magnet assemblies of a pair opposing mutually to define an air gap therebetween are magnetically coupled together by yoke means to create a magnetic field within the air gap is provided, which is characterized in that each permanent magnet assembly comprises a flat plate-like central permanent magnet and peripheral permanent magnets arranged around the central permanent magnet and inclined toward the inside of the air gap, the magnetic pole surface of each permanent magnet assembly forms a curved concave face with respect to the air gap, and each permanent magnet is magnetized in the direction perpendicular to the corresponding magnetic pole surface, whereby the leakage flux is reduced and the magnetic efficiency is enhanced, thus, reduction of the device dimension and weight can be achieved.
摘要翻译： 一种用于核磁共振计算机断层摄影的磁场产生装置，其中一对相对的互相定义气隙的永磁体组件通过轭装置磁耦合在一起，以在气隙内产生磁场，其中 其特征在于，每个永磁体组件包括平板状中心永磁体和围绕中心永磁体布置并且朝向空气间隙的内侧倾斜的外围永磁体，每个永磁体组件的磁极表面形成弯曲的凹部 并且每个永磁体在垂直于相应的磁极表面的方向上被磁化，从而减小漏磁通并提高磁效率，从而可以实现器件尺寸和重量的减小 。
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公开(公告)号：US5415901A
公开(公告)日：1995-05-16
申请号：US69520
申请日：1993-06-01
CPC分类号： H01F41/205 , C23C14/0021 , C23C14/28 , C30B23/002 , H01F10/20
摘要： A laser ablation device for forming a thin film includes a vacuum chamber having a gas introduction port through which an oxidating gas is introduced into the chamber, and a light-transmittable section, a target holder disposed in the vacuum chamber for holding a target made of a film forming material of an oxide, an object holder confronting the target holder for holding an object on which the thin film is to be formed, a short wavelength laser which emits a first short wavelength laser light passing to the target in the vacuum chamber through the light-transmittable section from outside of the vacuum chamber, and a short wavelength laser light irradiating device for irradiating the object with a second short wavelength laser light passing into the vacuum chamber through the light-transmittable section from outside of the vacuum chamber. The second short wavelength laser light has an intensity lower than that of the first short wavelength laser light irradiating the target. Alternatively, a short wavelength laser light passing device causes the second short wavelength laser light to pass through the light-transmittable section from outside of the vacuum chamber and then to pass in the vicinity of a surface of the object in the vacuum chamber as approximately parallel to the surface of the object.
摘要翻译： 用于形成薄膜的激光烧蚀装置包括具有气体导入口的真空室，通过该气体导入口将氧化气体引入到室中，以及透光部，设置在真空室中的用于保持由 形成氧化物的成膜材料，面对用于保持要形成薄膜的物体的目标保持器的物体保持器，发射通过真空室中的目标物的第一短波长激光的短波长激光器，通过 来自真空室的外部的透光部分和用于通过透光部分从真空室外部向第一短波长激光照射物体的短波长激光照射装置。 第二短波长激光的强度比照射目标的第一短波长激光的强度低。 或者，短波长激光通过装置使第二短波长激光从真空室的外部通过透光部，然后在真空室内的物体的表面附近大致平行 到物体的表面。
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公开(公告)号：US5554222A
公开(公告)日：1996-09-10
申请号：US501698
申请日：1995-07-12
IPC分类号： C23C14/32 , C23C14/54 , C23C16/458 , C23C16/503 , C23C16/00
CPC分类号： C23C16/4584 , C23C16/503
摘要： An ionization deposition apparatus includes an ion source which is located in a vacuum chamber and which is provided with gas introduction ports for supplying a gaseous film material into the vacuum chamber, a filament unit, which is separated into a plurality of independently controllable filaments, for generating thermoelectrons when the filaments are heated by filament currents, and an anode electrode for accelerating and colliding the thermoelectrons against molecules of the gaseous film material to thereby turn the molecules to plasma. A holder for holding a to-be-deposited object, the holder being placed confronting the anode electrode of the ion source in the vacuum chamber, and connected to a bias source to attract ions in the plasma to a surface of the holder.
摘要翻译： 电离沉积装置包括位于真空室中的离子源，其设置有用于将气体膜材料供应到真空室中的气体引入口，被分离成多个可独立控制的细丝的灯丝单元，用于 当细丝被细丝电流加热时产生热电子，以及阳极电极，用于加速和碰撞热电子与气态膜材料的分子，从而将分子转化为等离子体。 用于保持待沉积物体的保持器，所述保持器被放置在与所述真空室中的所述离子源的阳极相对的位置，并且连接到偏压源以将所述等离子体中的离子吸引到所述保持器的表面。
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公开(公告)号：US5229723A
公开(公告)日：1993-07-20
申请号：US550081
申请日：1990-07-09
申请人： Hideya Sakurai , Masaaki Aoki , Youichi Ohnishi
发明人： Hideya Sakurai , Masaaki Aoki , Youichi Ohnishi
IPC分类号： A61B5/055 , G01R33/38 , G01R33/383 , G01R33/3873 , H01F7/02
CPC分类号： G01R33/3873 , G01R33/383
摘要： Disclosed is an MRI-dedicated magnetic field generating device for generating magnetic fields within an air gap, including: a pair of permanent magnet assemblies opposite to each other to form an air gap therebetween; yokes for magnetically linking the permanent magnet assemblies; and magnetic pole pieces fixed to air-gap-confronting surfaces thereof. Based on this construction, intensities of the magnetic fields are increased by disposing a plurality of magnetic material segments on the same circle or a concentric circle on the confronting surface thereof or decreased by disposing a plurality of permanent magnet segments having a magnetizing direction opposite to that of the permanent magnet assemblies on the same circle or the concentric circle on the confronting surface thereof; or alternatively both the magnetic material segments and the permanent magnet segments are disposed on the same circle or the concentric circle.
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公开(公告)号：US4812712A
公开(公告)日：1989-03-14
申请号：US861305
申请日：1986-05-09
申请人： Youichi Ohnishi , Akira Okuda , Hiromi Shima , Shinichi Mizuguchi
发明人： Youichi Ohnishi , Akira Okuda , Hiromi Shima , Shinichi Mizuguchi
IPC分类号： C23C16/517 , H01J37/32 , H01L21/318 , C23C15/00
CPC分类号： H01J37/32082 , C23C16/517 , H01J37/32174 , H01L21/3185 , H01J2237/0206
摘要： A plasma processing apparatus wherein a means is provided to apply the proper negative DC voltage through a filter circuit to an electrode for generating the low-temperature plasma through the feed of the high-frequency power. When the high-frequency power has been fed in the higher high-frequency power density to the electrode for generating the low temperature plasma, the sparks (abnormal discharge) easy to be generated are prevented from being caused to generate the stable low-temperature plasma for better plasma processing.
摘要翻译： 一种等离子体处理装置，其中提供了一种装置，以通过滤波器电路将适当的负DC电压施加到用于通过高频功率的馈送产生低温等离子体的电极。 当以较高的高频功率密度将高频功率供给到用于产生低温等离子体的电极时，防止容易产生的火花（异常放电）产生稳定的低温等离子体 用于更好的等离子体处理。
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公开(公告)号：US5082545A
公开(公告)日：1992-01-21
申请号：US450920
申请日：1989-12-14
申请人： Kunio Tanaka , Youichi Ohnishi , Masahide Yokoyama
发明人： Kunio Tanaka , Youichi Ohnishi , Masahide Yokoyama
CPC分类号： C23C14/3421 , C23C14/0036 , C23C14/34 , H01J37/34 , H01J37/3497
摘要： A sputtering apparatus to be used in reactive sputtering which mixes a reactive gas into a discharge gas so as to form chemical compound thin membranes.A heating means is provided for heating the target. Light such as infrared rays or the like, and laser beams are ideal as the heating means. A thermometer for applying light is preferable to measure the temperature of at least one portion of the target for controlling the heating condition of the target. The composition of the thin membrane to be formed by the reactive sputtering can may be made constant.
摘要翻译： 用于反应溅射中的溅射装置，其将反应气体混合到放电气体中以形成化合物薄膜。 提供用于加热靶的加热装置。 诸如红外线等的光和激光束是加热装置的理想选择。 优选用于施加光的温度计来测量靶的至少一部分的温度以控制靶的加热条件。 可以使通过反应性溅射形成的薄膜的组成恒定。
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公开(公告)号：US4714061A
公开(公告)日：1987-12-22
申请号：US759946
申请日：1985-07-29
CPC分类号： F02B61/02 , F02B75/20 , F02B2075/027 , F02B2075/1816 , F02B2275/18 , F02F2001/245
摘要： A motorcycle having an improved engine construction wherein the combined crankcase transmission assembly of the power plant is formed from upper and lower members that have mating faces that lie in a plane that is disposed at a downwardly extending angle in a forward direction to the horizontal. A cylinder block having a plurality of transversely spaced cylinder bores is affixed to the forward end of the upper member of the main casing and has the cylinder bores inclined at a forwardly extending angle to the vertical.
摘要翻译： 具有改进的发动机结构的摩托车，其中发电厂的组合式曲轴箱变速器组件由具有配合面的上部和下部构件形成，所述配合面位于与向水平方向的向前方向上以向下延伸的角度设置的平面中。 具有多个横向隔开的气缸孔的气缸体固定在主壳体的上部构件的前端，并且具有以垂直方向向前延伸的角度倾斜的气缸孔。
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